Customized GCA 8500 i-line 5X Wafer Stepper System

The University of Central Florida (UCF) is seeking to procure a Customized GCA 8500 i-line 5X Wafer Stepper System for the fabrication of wafer-based optical elements through Invitation to Bid (ITB) 2024-06DC. The procurement is located in Orange County and Orlando City, Florida, and requires a highly specialized scientific instrument with specific technical specifications. The system must be a stand-alone unit with vibration isolation and environmental controls, featuring a field size greater than 15mm square or 20mm circle, NA 0.35 for I-line projection lithography, and resolution better than 0.8 microns for equal line/space patterns. Key deliverables include the stepper system, installation, training, and a minimum one-year warranty. Potential bidders must submit questions by February 5, 2025, at 3:00 PM EST, with final bids due on February 19, 2025, at 3:00 PM EST through the Bonfire Web Portal. The evaluation criteria will focus on the lowest responsive and responsible bidder meeting all specifications, with consideration given to quality, conformity, suitability, delivery terms, qualifications, and past performance.

The procurement appears to be open to all qualified vendors, with a potential preference for Florida-based businesses in accordance with Florida Statutes 287.084. The bid will be awarded on an all-or-none basis, meaning the entire system must be procured from a single vendor. While no specific set-aside designations for disadvantaged enterprises are mentioned, the procurement allows for some flexibility, such as the option to add LED-based optical sources through an upgrade within 18 months of initial delivery. The system is specifically designed for 100mm fused silica wafers and requires comprehensive documentation for maintenance and operation. Although a specific budget range is not disclosed, the technical complexity and specialized nature of the equipment suggest a significant investment. Vendors must provide pricing that includes shipping, delivery, installation, training, and all necessary documentation, with no allowance for equivalent alternative systems.