2024-06DC Addendum I.pdf

PDF 774 KB Posted

Attached to
Customized GCA 8500 i-line 5X Wafer Stepper System
Solicitation number
ITB-11546
Issued by
Orange County, Orlando City, Florida

About this file

This is Addendum I issued by the University of Central Florida (UCF) Procurement Services for ITB 2024-06DC for a Customized GCA 8500 i-line 5X Wafer Stepper System. The addendum serves two purposes: to answer vendor questions submitted during the Q&A period and to correct an error in the bid due date, which is now confirmed as February 19, 2025 at 3:00 PM. The addendum clarifies technical specifications, confirming that the requirement for "templates for controlled illumination patterns" refers to the ability to add an apodizer or digital filter to alter uniformity or energy.

The addendum provides important clarification regarding system requirements, specifically that the LED-based optical sources for I-line lithography requirement can be fulfilled through an add-on unit/upgrade, provided the tool can accommodate it. UCF specifies that this upgrade should be delivered within 18 months of the initial delivery. The document requires bidders to acknowledge receipt by signing and returning it with their bid, with failure to do so potentially resulting in bid rejection.

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Text version

Phone: 407.823.2661 • Fax: 407.823.5551 • Web: https://procurement.ucf.edu | Division of Administration & Finance

Procurement Services 12424 Research Parkway, Suite 355 Orlando, FL 32826-3249

ADDENDUM

IMPORTANT DOCUMENT – INVITATION TO BID ADDENDUM

ITB NUMBER: 2024-06DC OPENING DATE & TIME: February 19, 2025 @ 3:00 PM

ITB TITLE: Customized GCA 8500 i-line 5X Wafer Stepper System

ADDENDUM NUMBER: I ADDENDUM DATE: February 10, 2025

The purpose of this addendum is to:

Answer questions submitted by vendors during the open Q/A period.

Correct an error in the due date. The bid states 2/19/24 but it should be 2/19/25.

PLEASE ACKNOWLEDGE RECEIPT OF THIS ADDENDUM AND RETURN IT WITH YOUR BID. FAILURE

TO SIGN AND RETURN WITH YOUR BID COULD RESULT IN REJECTION OF YOUR BID.

BIDDER’S SIGNATURE PRINT OR TYPE BIDDER’S NAME

COMPANY NAME EMAIL ADDRESS

Phone: 407.823.2661 • Fax: 407.823.5551 • Web: https://procurement.ucf.edu | Division of Administration & Finance

Answers to Questions

ITB 2024-06DC

CUSTOMIZED GCA 8500 I-LINE 5X WAFER STEPPER SYSTEM

1. Under the "Required Specifications" section, one of the requirements is that:

“The system must be accessible to insert templates for controlled illumination patterns.”

What is this referring to?

UCF Answer:

This is referring to the ability to add an apodizer or digital filter to alter the uniformity or energy.

2. Under the "Required Specifications" section, one of the requirements is that:

“The system must accommodate LED based optical sources for I-line lithography.”

A. Will the university accept this requirement be filled by an add-on unit/upgrade?

Yes, this is acceptable providing the tool can accommodate the upgrade.

B. If yes, by what date is this add-on unit/upgrade required to be delivered?

It desired to be within 18 months of delivery.

File details come from the government source that posted it. Updated .