Wafer Spinner - SEE DESCRIPTION (G5-213047. 1)

The Department of Energy Office of Science, through Argonne National Laboratory, is seeking to procure one wafer spinner capable of spinning photoresist and other polymers with highly specific technical requirements. The equipment must operate at speeds ranging from 50-8000 rpm with precision of +/- 1 rpm, feature a 150mm capacity with safety glass bowl cover, digital vacuum monitoring, and accommodate multiple spin chuck sizes including 150mm, 100mm, 3", and 2" wafers. The solicitation requires vendors to complete six mandatory response components (A-F) on the ANL-70 form, including country of origin documentation, shipping costs, lead time estimates, signed documentation, and detailed pricing. All proposals must comply with Buy American requirements where U.S. components must exceed 65% of total component costs, and submissions must include comprehensive technical specifications and certifications. The response deadline is August 13, 2025 at 12:00 PM CST, with all inquiries directed to awegrzyn@anl.gov, and incomplete submissions will be automatically discarded.

This procurement does not utilize any set-aside designations and is open to all qualified vendors in the semiconductor machinery manufacturing sector. No incumbent contractors or previous award values are specified in the solicitation materials. The contract calls for delivery of a single unit of specialized laboratory equipment with extensive technical specifications including 200 programmable recipes with 40 steps each, acceleration capabilities of 4000 rpm/sec, and dimensional constraints not exceeding 350x446x430mm. Performance will occur at Argonne National Laboratory in Lemont, Illinois, with the equipment requiring 115VAC power supply and featuring advanced safety interlocks and vacuum monitoring systems. The procurement includes additional components such as spare bowls, waste bottles, and options for future dispense and edge bead upgrades, indicating a comprehensive equipment package for semiconductor processing applications.