ANL-70 Request for Quotation (00A).doc

ANL-70 (February 22, 2013)

UCHICAGO ARGONNE, LLC

OPERATOR OF

ARGONNE NATIONAL LABORATORY

BLDG. 201 OCF, 9700 S. Cass Ave., Lemont, IL 60439

(CONTRACT NO. DE-AC02-06CH11357)

REQUEST FOR QUOTATION

THIS IS NOT AN ORDER

NOTICE:

1. The right is reserved to accept or reject quotations on each item separately unless your quotation states otherwise.

2. The right is reserved to accept minor deviations from specifications herein listed or referenced.

3. Firm prices are requested. If other than firm prices are quoted, conditions of escalation are to be stated.

4. If material is packaged in returnable containers the amount of deposit, if any, is to be stated together with instructions for returning.

5. Terms and Conditions referenced below will apply to any resulting Purchase Order.

Please provide your best and final firm fixed price quote in USD for the materials/services listed on pages 2-3. Relevant documentation is also on these pages.

Any inquiries are to be directed to Annette Wegrzyn at awegrzyn@anl.gov. Please provide your response no later than 12pm CST on 8/13/2025.

Offerors to provide ALL components A-F on page 3 to support their price.

Any resulting Purchase Order will be subject to the Argonne Terms and Conditions attached hereto and made part of hereof and will be exempt from Illinois Occupation and Use Taxes and from Manufacturers and Retailers Excise Taxes.

We quote you F.O.B. Destination. Shipment can be made in days from receipt of order.

Date

*If Shipment will not be made via FedEX, UPS, or USPS, Please provide estimate of weight and volume _________________________________________ cft

COMPLETE AND RETURN ONE COPY

PLEASE MARK “NO BID” IF YOU CANNOT QUOTE

AUTHORIZED SIGNATURE

- Wafer spinner that can spin photoresist and other polymers

- splash ring

- speed 50-99rpm, 100-8000rom (+/- 1 rpm) with 150mm round

- Bowl Cover made of safety glass

- Process bowl of polypropylene (removable)

- d- igital vacuum gauge

- vacuum monitoring

- cover open interlock

- 115VAC 60/50hz 5/3 single phase

- Acceleration 4000 rpm/sec

- spinning time 1s-999s

- 200 recipes with 40 steps each

- waste bottle (0.5l in front of spinner)

- Exhaust connection PG11 tube

- Dimension: (wxdxh) cannot exceed (350x446x430mm)

- directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line

- spin chucks for : 150mm, 100mm, 3", 2" - with centering rings

- piece chuck with 3mm diameter vacuum area

- spare bowl

- spare waste bottle

- options for future dispense and edge bead upgrades

Applicable Documentation:

1. The following applicable documentation is attached hereto and made a part hereof:

2. Appendix "A" Argonne Terms and Conditions for Commercial Items and Services, ANL-71-COM, dated 02/13/2023 (Review)

1. Reps & Certs, ANL-70A, dated 01/13/2025 (Complete)

Offerors to provide ALL the following to support their price:

*Note: Country of Origin should be consistent with FAR 52.225-1 for Buy American-Supplies: U.S. components must exceed 65% of total component costs for 2024-2028 deliveries. Components of foreign origin of the same class or kind as those that the agency determines are not mined, produced, or manufactured in sufficient and reasonably available commercial quantities of a satisfactory quality are treated as domestic. Components of unknown origin are treated as foreign.

Quote shall be responsive to the terms and conditions made part of this solicitation. Any exceptions taken shall be detailed and refer to specific Articles of the Applicable Documentation.

Inapplicable clauses are self-deleting.

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