Vacuum Pumps

Closed Solicitation Posted

Solicitation number
1333ND26QNB030118
Agency
Responses due
Set-aside
Total Small Business

Opportunity facts

Place of performance
Boulder, Colorado 80305, United States

Notice details come from SAM.gov. Updated .

About this opportunity

The National Institute of Standards and Technology (NIST), a civilian agency under the Department of Commerce, is procuring a suite of specialized vacuum pumps for its EUV Ptychographic Reflectometry research program. The procurement requires four specific line items: two Edwards nEXT 240D turbopumps, one Edwards nEXT 85D turbopump, one Edwards nXDS10i oil-free dry scroll vacuum pump, and one Ebara EV-A06-1 air-cooled dry vacuum pump. All equipment must be brand new with original manufacturer packaging, minimum one-year warranties, and specific technical configurations including ISO inlet flanges, water-cooling kits, controllers, and power supplies rated for single-phase 100-120V 60 Hz operation. Award will be made to the responsible quoter offering the lowest priced, technically acceptable quotation based on firm-fixed-price quotations that include transportation and delivery costs. Questions must be submitted in writing within two business days of the posting date (by March 8, 2026), and completed quotations must be submitted electronically to the Contract Specialist and Contracting Officer no later than 12:00 PM Eastern Time on March 20, 2026.

This is a total small business set-aside procurement under NAICS code 333242 (Semiconductor Machinery Manufacturing) with no incumbent contractors identified. Delivery is required within four months from the award order to NIST's facility at 325 Broadway, Building 81, Boulder, Colorado 80305, with installation and testing occurring two weeks post-delivery. Payment is 100% upon installation, acceptance by the Technical Point of Contact, and successful completion of testing requirements. All quoters must maintain active System for Award Management (SAM.gov) registration at the time of submission and through final payment. The solicitation incorporates standard FAR and Commerce Acquisition Regulation clauses, including Buy American requirements, cybersecurity provisions consistent with FISMA and NIST SP 800-171, and restrictions on covered telecommunications equipment and sanctioned countries.

Notice text

As described in the attached Combined Synopsis Solicitation, Statement of Work and Applicable Provisions and Clauses.  

Files

File Type Posted
Statement of Work.pdf PDF
Combined Synopsis Solicitation.docx DOCX document
CSS Provisions and Clauses.docx DOCX document

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