Statement of Work.pdf

STATEMENT OF WORK

Suite of Vacuum Pumps:

[EUV Ptychographic Reflectometry]

[686.12]

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing. As part of this effort, NIST has a program to develop new methods to non-destructively measure and characterize the structure of complex nanoscopic devices. This approach is based on applying an extreme ultraviolet (EUV) high-harmonic generation (HHG) light source to combine reflectometry with spatial imaging and atomic core level spectroscopy. This effort requires strict operation under high vacuum conditions. To achieve a high vacuum environment for the entire beamline and measurement chamber, several turbopumps, a scroll pump and a roots pump are required. To reduce risk to the overall program we must maintain compatibility and interchangeability with existing vacuum pumps already in use on our existing system. We therefore require specific brand names and model numbers.

II. SCOPE

The goal of this contract is to procure a suite of turbopumps, a scroll pump and a roots pump.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: This acquisition is for a suite of turbopumps, a scroll pump and a roots pump.

A. General Technical Specifications

a. CLIN 0001: A quantity of 2 Edwards nEXT 240D turbopumps with the following configuration and options for EACH unit:

i. Shall have an ISO-100 inlet flange

ii. Shall include a water-cooling kit

iii. Shall include a pump controller, power supply and all necessary cables and accessories for turbopump operation

iv. Shall include an extension cable of at least 1 m between the pump and controller

v. The power input requirement must be configured for single phase

100-120 V 60 Hz.

vi. The exhaust port shall have a KF(NW)-type flange

b. CLIN 0002: A quantity of 1 Edwards nEXT 85D turbopumps with the following configuration and options for EACH unit:

i. Shall have an ISO-63 inlet flange

ii. Shall include a water-cooling kit

iii. Shall include a pump controller, power supply and all necessary cables and accessories for turbopump operation

iv. Shall include an extension cable of at least 1 m between the pump and controller

v. The power input requirement must be configured for single phase

100-120 V 60 Hz.

vi. The exhaust port shall have a KF(NW)-type flange

c. CLIN 0003: A quantity of 1 Edwards nXDS10i Oil-Free Dry Scroll Vacuum Pump

i. The power input requirement for all pumps must be configured for single phase 100-120 V 60 Hz.

ii. Both the inlet and exhaust ports shall have a KF(NW)-type flange

d. CLIN 0004: A quantity of 1 Ebara EV-A06-1 Air Cooled Dry Vacuum Pump

i. Both the inlet and exhaust ports shall have a KF(NW)-type flange

ii. The power input requirement for all pumps must be configured for single phase 100-120 V 60 Hz.

e. All pumps must have a warranty of at least 1 year

f. All components must be new. Used or refurbished systems will not be considered.

IV. DELIVERABLES

Standards of Acceptance: The NIST TPOC shall review (list deliverable) and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 2 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (draft plans, drawings, etc.)

V. PLACE OF PERFORMANCE

System will be installed at the 325 Broadway. Building 81, Boulder CO 80305.

Attn: TBD

VI. PERIOD OF PERFORMANCE/LEAD TIME

Item Description Period Date(s)

System Delivery 4 months ARO

Installation / Facilitization 2 weeks post delivery

VII. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Quantity Description Due Date Format

2 Edwards nEXT 240D turbopumps

4 months ARO Equipment

1 Edwards nEXT 85D turbopump

4 months ARO Equipment

1 Edwards nXDS10i oil free dry scroll vacuum pump

4 months ARO Equipment

1 Ebara EV-A06-1 air cooled dry vacuum pump

4 months ARO Equipment

Shipping & Receiving 325 Broadway. Building 81, Boulder CO 80305.

Attn: TBD

***Due to ongoing limited site access of the NIST facilities, the Awardee SHALL confirm with the Designated Government Official and the Contracting Officer prior to ANY shipment to NIST***

VIII. INSTALLATION

The system will be installed by NIST

IX. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated.

The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST TPOC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 2 weeks of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

X. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

XI. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the TPOC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the

RFQ for consideration.

I. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards

(e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to

NIST special publication control set SP 800-171.

Minimally Acceptable Controls

• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.