Vacuum compatible reflective microscope objective and optomechanical hardware

The National Institute of Standards and Technology, part of the Department of Commerce, seeks quotations for vacuum-compatible reflective microscope objectives and optomechanical hardware to support EUV lithography characterization, with quotations due September 27, 2026 at 12:00 PM Eastern Time.

This is an unrestricted open market acquisition with no set-aside, NAICS code 334516 (Analytical Laboratory Instrument Manufacturing), PSC 6640 (Laboratory Equipment and Supplies). Place of performance and acceptance is NIST Gaithersburg, Maryland.

The procurement consists of four units of vacuum-compatible reflective microscope objectives meeting specifications: 350–800 nm wavelength range with UV-enhanced aluminum coating, 0.3 numerical aperture, 23.8 mm working distance, 13.3 mm focal length, infinity correction, and full-access Zemax optical ray trace models. Additional line items cover vacuum-compatible optomechanical hardware components (including lens tubes, SMA fiber adapters, optical posts, mirror mounts, and XY manipulators per attached parts listing) and specialized tools and fasteners. All items must be new, commercially available products; no gray market, experimental, prototype, or custom items are permitted. Vacuum compatibility must achieve 10⁻⁶ Torr or better (10⁻⁸ Torr preferred) with no exposed brass, bronze, or anodization. Components must be chemically cleaned and bagged for vacuum service.

Delivery is F.O.B. Destination to NIST Gaithersburg within 16 weeks of award. Payment is 100% upon acceptance by the Technical Point of Contact following successful performance demonstration; partial shipments are not accepted unless pre-approved. The contractor must provide a minimum one-year warranty covering material defects, surface coating integrity, and glued optics integrity, commencing upon government acceptance. NIST reserves inspection and testing rights within 10 working days of receipt and may require repair or replacement of nonconforming supplies at no contractor cost. Quotations must be submitted in three separate volumes addressing technical merit, price, and terms and conditions. Award will be made to the lowest-priced quoter whose proposal is technically acceptable. Price quotations remain valid for 90 days. All quoters must maintain active SAM.gov registrations.