Attachment 1 Statement of Work (SOW).pdf

STATEMENT OF WORK

Title: Vacuum compatible reflective microscope objective and optomechanical hardware Lab: Physical Measurement lab, Sensor Science Division

I. BACKGROUND INFORMATION

The National Institute of Standards and Technology (NIST) is embarking on a project to support the EUV lithography (EUVL) community by developing characterization of EUV scintillator materials. Many techniques for measuring spatial distribution (or image) of EUV rely on scintillators or devices that convert EUV radiation into visible light.

Scintillators tend to be robust and afford the user the ability to use less costly and easier to characterize, visible light detection or imaging systems. However, their characterization requires specialized techniques and hardware which NIST must develop in order to provide accurate characterization of the performance of EUV scintillators. This procurement is for vacuum compatible reflective microscope objectives and optomechanical components for an optical microscope assembly for measuring the visible light output of scintillator samples.

This purchase supports the “Optical Metrology for Extreme Ultraviolet (EUV) Generation” Project under Grand Challenge 2, “Advanced Metrology for Future Microelectronics Manufacturing,” for CHIPS R&D Metrology.

II. PURPOSE

This procurement is for vacuum compatible reflective microscope objectives and optomechanical components for an optical microscope assembly for measuring the visible light output of scintillator samples. The purchase of these components enables NIST to construct an ultra-high vacuum microscope to operate in NIST SURF III EUV reflectometer beamline. The microscope will allow for the measurement of EUV scintillator efficiency, output spectrum and point spread function.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of

“gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Vacuum compatible reflective microscope objective Quantity: 4

A. Technical Specifications

a. Reflective objective: wavelength range 350 nm to 800 nm (UV enhanced aluminum coating)

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b. Vacuum compatible: 10-6 Torr or better, 10-8 Torr preferred. No exposed brass, bronze or anodization.

c. Numerical aperture: 0.3

d. Working distance: 23.8 mm (nominal)

e. Focal length: 13.3 mm

f. Infinity corrected

g. Zemax optical ray trace model must be available to end users. Full access to model. Black box type model is not accepted.

Line Item 0002:

Description: Vacuum compatible optomechanical hardware (see attached parts listing) Quantity: varies

A. Technical Specifications

a. Vacuum compatible: 10-6 Torr or better, 10-8 Torr preferred. No exposed brass, bronze or anodization. Low vapor pressure grease (10-12 Torr or better at 20 C°) if required.

b. Chemically Cleaned and bagged for vacuum service. End-user will bake prior to installation.

Line Item 0003:

Description: Specialized tools and fasteners (see attached parts listing)

Quantity: varies A. Technical Specifications

a. Vacuum compatible parts: 10-6 Torr or better, 10-8 Torr preferred. No exposed brass, bronze or anodization. Low vapor pressure grease (10 -12 Torr or better at 20 C°) if required.

b. Chemically Cleaned and bagged for vacuum service. End-user will bake prior to installation.

c. Tools are not required to be vacuum compatible.

IV. SCHEDULE OF DELIVERABLES

Deliverable

Number Description Quantity Due Date

Place of Delivery

1 Vacuum compatible reflective microscope objective

4 16 weeks

ARO

NIST Gaithersburg

2 Vacuum compatible optomechanical hardware

Various 16 weeks

ARO

NIST Gaithersburg

3 Specialized tools and fasteners Various 16 weeks

ARO

NIST Gaithersburg

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PLACE OF PERFORMANCE

Completed optics will be shipped to NIST Gaithersburg Campus

PERIOD OF PERFORMANCE

16 weeks ARO. This does not include warranty.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology

Shipping and Receiving

100 Bureau Drive, Building 301

Gaithersburg, MD 20899

C/O/ POC/COR TBD and building 245/C100)

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Review of packing list and included items.

2. Unbox items and inspect for damage.

3. Visual inspection of microscope objectives: Review of surface coatings and finish.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or

4 | P a g e replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the

Government.

The Government will test, inspect, and accept or reject the equipment within 10 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

1. Materials are free of defects,

2. Surface coatings remain intact: no peeling or flaking

3. Glued optics remain intact with no discoloration.

VIII. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after acceptance by the TPOC of fully installed system, AND

2. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the

RFQ for consideration.