UV photostabilizer system
Award Notice Posted
- Solicitation number
- SB1341-12-RQ-0305
- Agency
-
National Institute of Standards and Technology
Department of Commerce
- Awarded
- to Bachur & Associates
- Set-aside
- Total Small Business
Opportunity facts
- Contract number
- DOCSB134112SU1215 Federal contract award
- NAICS code
- 333295 Semiconductor Machinery Manufacturing
- PSC
- Not on record
- Place of performance
- 100 Bureau Drive Gaithersburg, Maryland 20899, United States
Notice details come from SAM.gov. Updated .
Notice text
3 versions
Update #3 · Latest ·
Added: Jul 16, 2012 2:29 pm
AMENDMENT A02:
THE PURPOSE OF THIS AMENDMENT IS TO REMOVE A LINE ITEM AND EXTEND THE DUE DATE FOR QUOTATIONS:
OPTION LINE ITEM 5, PROGRAMMABLE SOFTWARE CONTROL AND MONITOR ON EXPOSURE TIME, LAMP INTENSITY, LEVEL AND HEATING PROCESS: WINDOWS BASED SOFTWARE, IS HEREBY REMOVED FROM THIS SOLICITATION IN ITS ENTIRETY.
THE DUE DATE FOR QUOTATIONS IS EXTENDED AS FOLLOWS:
FROM: JUNE 19, 2012 BY 2:30 PM EASTERN TIME
TO: JULY 23, 2012 BY 2:30 PM EASTERN TIME.
ALL OTHER TERMS AND CONDITIONS REMAIN UNCHANGED.
Update #2 ·
Added: Jun 11, 2012 11:04 am
The purpose of this amendment is to answer questions:
Question 1:
Specification 2, Item 2, states "Must include adjustable heated vacuum sample stage with the following minimum capability", V: Proximity bake or equivalent. Please clarify the requirement for Vacuum Sample Stage and Proximity bake or equivalent.
Answer 1:
Vacuum Sample Stage: the heating sample stage must have vacuum capability to stabilize the wafer position during the bake.
Proximity bake is a photoresist baking process with nitrogen purging below the wafer so the wafer is not actually in contact with the hotplate surface. Alternative ways to avoid the direct contact and maintain the thermal stability shall be considered.
Question 2:
Item IV in specification 2, programmable temperature controller, Does that mean one can program the desired temperature or the ramp (up down) or both?
Also, please clarify "must have curing time" under item IV. Does this refer to illumination, heating, or both?
Answer 2:
Programmable Temperature Controller means one can program the desired temperature.
Curing time is applied to both.
All other terms remain unchanged.
Update #1 ·
Added: Jun 06, 2012 9:23 am SEE ATTACHED COMBINED SYNOPSIS/SOLICITATION
Files
| File | Type | Posted |
|---|---|---|
| Solicitation.doc | DOC document |
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