Solicitation.doc

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED.

This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-58, effective May 18, 2012.

The associated North American Industrial Classification System (NAICS) code for this procurement is 333295 with a small business size standard of 500 employees. This acquisition is set aside 100 percent for small businesses.

1352.215-72 INQUIRIES (APR 2010)

Offerors must submit all questions concerning this solicitation in writing to Lynda.Roark@nist.gov Questions should be received no later than 10 calendar days after the issuance date of this solicitation. Any responses to questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. Even if provided in other form, only the question responses included in the amendment to the solicitation will govern performance of the contract.

(End of Provision)

Background:

The National Institutes of Standards and Technology (NIST), Center for Nanoscale Science and Technology (CNST) has a requirement for a UV Photostabilizer System.

The CNST mission is guided by an understanding that rapid commercial development of nanotechnology—in particular, the speed with which industry can bring a specific new nanotechnology from discovery to production—depends critically on the availability and efficacy of applicable metrology tools and processes at each stage of the transition. Developing these tools and processes will have an immediate and significant impact on the commercial viability of nanotechnologies in a diverse array of fields, such as electronics, computation, information storage, medical diagnostics and therapeutics, and national security and defense.

The CNST NanoFab has a need for a UV Photostabilizer System to stabilize the post-developed photoresist pattern. This tool is required for a photoresist stabilization step where patterned photoresist material is exposed to radiation having a wavelength that promotes cross-linking in the shallow surfaces of the patterned photoresist features. This process creates a robust surface polymer layer which is immune to photoresist developer, photoresist solvents, intense ion implantation and intense etchants and also enables for the resist not to deform when baked at a temperature above its glass transition temperature. The diversity of mask pattern and material systems encountered from the wide range of projects at NIST demands an advanced and flexible photostabilizer system to provide researchers more precise and consistent critical dimensions and pattern.

Line Item 0001: Quantity one (1) each, UV Photostabilizer System , meeting or exceeding the following minimum specifications: All equipment must be new. Used or remanufactured equipment will not be considered for award.

1. Specifications:

1. Must include one or more UV lamps with the following minimum capability:

i. Spectrum range within: 200nm to 400nm

ii. Illumination area: ≥ 200mm x 200mm

iii. Beam uniformity over 200mm diameter: +-5% (overall difference <10%)

iv. Intensity level ≥ 8 mW/cm2 @ 254nm

v. Digital shutter controller

vi. Lamp housing with exhaust module

vii. Adjustable intensity control system

viii. Supply two or more wavelengths

2. Must include adjustable heated vacuum sample stage with the following minimum capability:

i. Temperature range: 50 to 200 °C

ii. Uniformity: +-2% across the sample stage

iii. Handle sample size from pieces to 200mm wafer

iv. Programmable temperature controller

v. Proximity bake or equivalent

3. Must include the following feature in the tool body:

i. Enclosed lamp housing design to protect operators from exposing to the dangerous level of UV light

4. Minimum Measurement Requirements:

i. UV light intensity meter

ii. Temperature monitor for sample stage

iii. Must have Curing time Items 5 and 5.a are option line items. The Contractor shall provide pricing for the option line item. The price quoted for option line item shall remain in effect for a period of one year from the date the Government accepts the instrument. The Government may exercise the option line item, at its discretion, at any time during the one year period.

5. Programmable software control and monitor on exposure time, lamp intensity level and heating process.

i. Windows based software

5. a. Tool Body Option Line Item:

i. Nitrogen environment control for an enclosed exposure chamber for the tool body.

Warranty:

i. Must include at least 6 months warranty

ii. Operation and service manuals must be included Delivery:

Delivery shall be completed not later than 60 days after receipt of award.

Delivery term shall be FOB Destination.

Evaluation Criteria:

Award shall be made to the Contractor whose quotation meets all of the required minimum specifications listed above and quotes the lowest price. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability of Meeting or Exceeding the Requirement, and Price.

Price shall be evaluated for reasonableness.

Technical Capability:

Evaluation of Technical Capability shall be based on the documentation provided in the quotation, including data submissions. Technical descriptions and product literature submitted in the quotation shall be evaluated to determine that the proposed instrument meets or exceeds all required specifications listed above.

Required Submissions:

All quoters shall submit the following:

1). An original and one copy (one copy only if submitting electronically) of a price quotation which addresses all line items;

2). For the purpose of technical evaluation quoters shall submit:

a. Two copies (one copy if submitting electronically) of technical description and/or product literature which clearly details the manufacturer, make and model of the proposed product(s), addresses all specifications, and clearly documents that the offered product(s) meet(s) or exceeds the minimum specifications listed above.

3). Acceptance of Terms (Addendum to FAR 52.212-1(b)(11):

This is an Open-Market Combined Synopsis/Solicitation for equipment as defined herein.

The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows:

The offeror shall state “The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition.”

OR

The offeror shall state “The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following:

Offeror shall list exception(s) and rationale for the exception(s)

Please note that this procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price. However, the terms and conditions stated herein will be included in any resultant Purchase Order, not the terms and conditions of the offeror’s FSS or GWAC contract, and the statement required above shall be included in the quotation.

Due Date for Quotations:

All quotations shall be sent to the National Institute of Standards and Technology, Acquisition Management Division, Attn: Lynda Roark, 100 Bureau Drive, Stop 1640, Gaithersburg, MD 20899-1640.

All offerors shall ensure the RFQ number is visible on the outermost packaging.

Submission must be received not later than 2:30 p.m. local time on Tuesday June 19, 2012. FAX quotations shall not be accepted. E-mail quotations shall be accepted. Offerors’ quotations shall not be deemed received by the Government until the quotation is entered into the e-mail address inbox set forth above.

Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be provided to Lynda Roark, Contract Specialist on 301-975-3725. NIST is not responsible for late delivery due to the added security measures. In addition, quoters who do not provide 24-hour notification in order to coordinate entrance to the NIST campus shall assume the risk of not being able to deliver quotes on time.

Provisions and Clauses:

The full text of a FAR provision or clause may be accessed electronically at www.acqnet.gov/far.

The following provisions apply to this acquisition:

52.212-1, Instructions to Offerors — Commercial;

52.212-3, Offeror Representations and Certifications — Commercial Items.

52-217-5, Evaluation of Options

In accordance with FAR 52.212-3 Offeror Representations and Certifications — Commercial Items, offerors must complete annual representations and certifications on-line at http://orca.bpn.gov. If paragraph (j) of the provision applies, a written submission is required;

52.225-25, Prohibition on Contracting with Entities Engaging in Sanctioned Activities Relating to Iran—Representation and Certification;

1352.233-70, Agency Protests;

1352.233-71, GAO and Court of Federal Claims Protests;

The following clauses apply to this acquisition:

1352.201-70, Contracting Officer’s Authority

1352.209-73, Compliance with the laws

1352.209-74, Organizational Conflict of Interest

52.212-4, Contract Terms and Conditions—Commercial Items;

52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders—Commercial Items including subparagraphs:

52.204-10, Reporting Executive compensation and First-Tier Subcontract Awards (Jul 2010);

52.219-28, Post Award Small Business Program Representation

52.222-3, Convict Labor;

52.222-19, Child Labor—Cooperation with Authorities and Remedies;

52.222-21, Prohibition of Segregated Facilities;

52.222-26, Equal Opportunity;

52.222-36, Affirmative Action for Workers with Disabilities;

52.223-18, Contractor Policy to Ban Text Messaging While Driving;

52.225-3, Buy American Act –Free Trade Agreements – Israeli Trade Act

52.225-13, Restriction on Certain Foreign Purchases;

52.232-33, Payment by Electronic Funds Transfer--Central Contractor Registration.

52.217-7, Option for Increased Quantity – Separately Priced Line Item;

As prescribed in 17.208(e), insert a clause substantially the same as the following:

Option for Increased Quantity—Separately Priced Line Item (Mar 1989)

The Government may require the delivery of the numbered line item, identified in the Schedule as an option item, in the quantity and at the price stated in the Schedule. The Contracting Officer may exercise the option by written notice to the Contractor within 30 days. Delivery of added items shall continue at the same rate that like items are called for under the contract, unless the parties otherwise agree.

(End of clause) 52.247-34, FOB Destination

Representation by Corporations Regarding an Unpaid Delinquent Tax Liability or a

Felony Conviction Under Any Federal Law (Class Deviation) (March 2012)

(1) In accordance with Sections 543 and 544 of Public Law 112-55 Commerce, Justice, Science, and Related Agencies Appropriations Act 2012, Title V

(General Provisions) none of the funds made available by that Act may be used to enter into a contract with any corporation that-

(a) Was convicted of a felony criminal violation under any Federal law within the preceding 24 months, unless the agency has considered suspension or debarment of the corporation and made a determination that this further action is not necessary to protect the interests of the Government.

(b) Has any unpaid Federal tax liability that has been assessed, for which all judicial and administrative remedies have been exhausted or have lapsed, and that is not being paid in a timely manner pursuant to an agreement with the authority responsible for collecting the tax liability, unless the agency has considered suspension or debarment of the corporation and made a determination that this further action is not necessary to protect the interests of the Government.

(2) The Offeror represents that, as of the date of this offer-

(a) It is [ ] is not [ ] a corporation that was convicted of a felony criminal violation under a Federal law within the preceding 24 months.

(b) It is [ ] is not [ ] a corporation that has any unpaid Federal tax liability that has been assessed, for which all judicial and administrative remedies have been exhausted or have lapsed, and that is not being paid in a timely manner pursuant to an agreements with the authority responsible for collecting the tax liability.

(End of provision)

SB1341-12-RQ-0305