Sources Sought Notice of Intent to Sole Source for Preventative Maintenance on a Chemical Mechanical Planarization System (CMP)
Closed Special Notice Posted
- Solicitation number
- NIST-SS26-15
- Agency
-
National Institute of Standards and Technology
Department of Commerce
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 811210 Electronic and Precision Equipment Repair and Maintenance
- Place of performance
- Gaithersburg, Maryland 20899, United States
Notice details come from SAM.gov. Updated .
About this opportunity
The National Institute of Standards and Technology issued a combined sources sought notice and notice of intent to sole source for preventative maintenance on a Chemical Mechanical Planarization (CMP) system, with responses due August 3, 2026. NIST is conducting market research to identify alternative sources capable of providing preventative maintenance and recalibration services for a CMP system acquired in 2018 that has never received preventive maintenance since installation. The CMP is critical for advancing materials development in quantum devices, measurement standards, semiconductors, and quantum computing. NIST acknowledges that ASM is the original equipment manufacturer but states that identifying ASM does not constitute a binding commitment to conduct a sole source procurement.
Respondents must submit company summary information including corporate details, point of contact, company size status relative to NAICS code 811210, and SAM.gov registration status. Submissions should include specifications, original equipment manufacturer information, country of manufacture, commercial product or COTS classification, standard commercial pricing and estimated price ranges, standard commercial terms and conditions including warranty, FAR compliance information regarding small business subcontracting limitations, and details on existing governmentwide contract vehicles such as GSA Multiple Award Schedule contracts. Respondents should provide feedback on draft requirements regarding clarity, competitiveness, potential exclusion of domestic involvement, and opportunities to improve domestic product consideration. Responses must be submitted in Microsoft Word, Adobe PDF, or Microsoft Excel format via email. This notice does not obligate the Government to award a contract or pay for information provided, and responses will not constitute adequate responses to any subsequent formal solicitation.
Notice text
See attached Sources Sought Notice of Intent to Sole Source for Preventative Maintenance on a Chemical Mechanical Plantarization System (CMP).
Files
| File | Type | Posted |
|---|---|---|
| Combined SSN and NOI to Sole Source.docx | DOCX document |
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