Photoresist Direct Write Lithography System
Closed Solicitation Posted
This opportunity was awarded. See the award notice from .
- Solicitation number
- N0017325Q0006
- Agency
-
Office of Naval Research
Secretary of the Navy, Department of Defense
- Responses due
- Set-aside
- Total Small Business
Opportunity facts
- NAICS code
- 333242 Semiconductor Machinery Manufacturing
- Place of performance
- United States
Notice details come from SAM.gov. Updated .
About this opportunity
The Office of Naval Research is seeking to procure a Photoresist Direct Write Lithography System for the Naval Research Laboratory through a combined synopsis/solicitation. The system must meet precise technical specifications including substrate handling capabilities for sizes from 5x5 mm to 250 mm diameter, position repeatability of 50 nm or less, light sources at 375 nm and 405 nm wavelengths, and minimum feature sizes of 0.3 micrometers. The procurement will be evaluated using the Lowest Price Technically Acceptable (LPTA) method, with evaluation factors including technical acceptability against Attachment 1 specifications, delivery capability within 365 days, supplier performance risk assessment, and total price. Questions regarding the solicitation must be submitted within ten days of the June 3, 2025 posting date, and quotes are due by 4:00 PM on July 3, 2025. The government expects to make award without discussions, though reserves the right for limited exchanges to clarify quote aspects.
This opportunity is designated as a Total Small Business set-aside under NAICS code 333242 for Semiconductor Machinery Manufacturing. The solicitation does not identify any incumbent contractors or specific budget ranges for the procurement. The system must be delivered by September 29, 2026, with installation required in a Class 100 clean room at the Naval Research Laboratory located at 4555 Overlook Ave SW in Washington, DC. The vendor must provide one day of hardware and software training for up to four personnel and offer a twelve-month warranty with telephone support and on-site response within seven days. The period of performance extends from September 30, 2025, through September 29, 2026, with acceptance testing to be conducted using specific protocols and a Zeiss Model Gemini 560 scanning electron microscope.
Notice text
2 versions
Update #2 · Latest ·
Amendment 0001 is hereby issued to accomplish the following:
1. Provide responses to questions received.
2. All other terms and conditions remain unchanged.
This Request for Quote (RFQ) is for the procurment of a Photoresist Direect Write Lithography System as described in Attachment 1 of this solicitation.
This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulations (FAR) Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. Solicitation documents and incorporated provisions are those in effect through Federal Acquisition Circular 2021-06 and NMCARS 18-18.
All changes to this solicitation that occur prior to the closing date will be issued via amendment posted to the announcement on Contract Opportunities (beta.sam.gov). It is the responsibility of interested vendors to monitor the announcement for amendments that may be issued to this solicitation. For changes made after the closing date, only those quoters that provide a quote will be provided any changes/amendments and considered for future discussions and/or award.
Questions must be submitted to the Point(s) of Contact listed no later than ten (10) days after the Posted Date.
Update #1 ·
This Request for Quote (RFQ) is for the procurment of a Photoresist Direect Write Lithography System as described in Attachment 1 of this solicitation.
This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulations (FAR) Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. Solicitation documents and incorporated provisions are those in effect through Federal Acquisition Circular 2021-06 and NMCARS 18-18.
All changes to this solicitation that occur prior to the closing date will be issued via amendment posted to the announcement on Contract Opportunities (beta.sam.gov). It is the responsibility of interested vendors to monitor the announcement for amendments that may be issued to this solicitation. For changes made after the closing date, only those quoters that provide a quote will be provided any changes/amendments and considered for future discussions and/or award.
Questions must be submitted to the Point(s) of Contact listed no later than ten (10) days after the Posted Date.
Files
Notice history
| Notice | Type | Posted |
|---|---|---|
| Photoresist Direct Write Lithography System | Award Notice | |
| This notice | Solicitation |
Similar open opportunities
| Opportunity | Agency | Set-aside | Responses due |
|---|---|---|---|
| Photon Detector Modules | Office of Naval Research | Total Small Business | |
| Toptica 440nm laser for quantum optics | Office of Naval Research | No set-aside |
On GovTribe
Work this opportunity
- Track it in your pipeline
- Find teaming partners
- Similar opportunities
- Ask GovTribe AI about this opportunity