Questions and Answers_N0017325Q0006_NRL Response.pdf

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Photoresist Direct Write Lithography System
Solicitation number
N0017325Q0006
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This document is a Questions and Answers file for Solicitation N0017325Q0006, focused on clarifying details about Optical Modules for a Photoresist Direct Write Lithography System. The document addresses two specific questions regarding spare light sources for 375 nm and 405 nm wavelength optical modules. For both wavelengths, the Navy Research Laboratory (NRL) confirms that the intent is to provide replacement laser diodes, not complete basic or upgraded optical modules. The responses also note that if a laser diode fails, the entire optical module must be returned to the factory for refurbishment, as field replacement is not possible.

The solicitation is issued by the Department of the Navy's Office of Naval Research and seeks a commercial Photoresist Direct Write Lithography System. The Q&A document provides technical clarification on specific components of the system, specifically detailing the nuanced requirements for optical modules with different wavelength capabilities and their potential spare parts configuration.

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Solicita on N0017325Q0006

References:

Item 3.1 by itself describes a ‘basic’ Op cal Module at 375 nm wavelength. Items 3.2 and

3.3 are add‐ons, or upgrades, to the base 375 Op cal Module to enable a wide range of spot size wri ng modes.

Item 3.4 by itself describes a ‘basic’ Op cal Module at 405 nm wavelength. Items 3.5 and

3.6 are add‐ons, or upgrades, to the base 405 Op cal Module to enable a wide range of spot size wri ng modes.

Ques on 1: Item 3.9 describes “one spare 375 nm light source having 0.3 micrometer or less resolu on”. Is the intent to have (i) a basic 375 Op cal Module (e.g. item 3.1) , or (ii) another fully upgraded 375 Op cal Module (e.g. items 3.1 plus 3.2 plus 3.3), or (iii) a replacement 375 nm laser diode to have for when the original 375 diode eventually dies?

Response: (iii) is the correct interpreta on.

Ques on 2: The similar ques ons regarding Item 3.10. Is the inten on to have (i) a basic 405 Op cal Module, (ii) another fully upgraded 405 Op cal Module, or (iii) a replacement 405 nm laser diode? If the intent is (iii), to have replacement laser diodes on hand, please know that replacement of light source (laser diode) cannot be accomplished in the field. The Op cal Module unit would s ll need to be returned to factor for refurbishment.

Response: (iii) is the correct response and NRL makes note of the requirement to return the op cal module to the factory for refurbishment.

File details come from the government source that posted it. Updated .