Inductively Coupled Plasma Deep Reactive Ion Etch

Award Notice Posted

Solicitation number
N0017325P0063
Agency
Awarded
to Oxford Instruments America, Inc.
Set-aside
No set-aside

Opportunity facts

Contract number
N0017325P0063 Federal contract award
NAICS code
333242 Semiconductor Machinery Manufacturing
PSC
3670 Specialized Semiconductor, Microcircuit, And Printed Circuit Board Manufacturing Machinery
Place of performance
United States
Points of contact

Notice details come from SAM.gov. Updated .

About this opportunity

The Office of Naval Research, part of the Department of the Navy, awarded a non-competitive, firm-fixed price contract N0017325P0063 to Oxford Instruments America, Inc. for an Inductively Coupled Plasma Deep Reactive Ion Etch system on September 25, 2025. The contract value totals $687,895.85 and represents specialized semiconductor manufacturing equipment used for precision etching processes in advanced materials research and development. This award notice was posted on September 26, 2025, and utilized no set-aside provisions, indicating it was procured through sole-source acquisition methods typical for highly specialized scientific instrumentation.

Notice text

The awarded contract is a non-competitive, firm-fixed price award to the awardee specified. 

Awarded contract N0017325P0063 to OXFORD INSTRUMENTS AMERICA, INC. for 687895.85 on 2025-09-25.

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