To procure the inductively coupled plasma (ICP) deep reactive ION etching (DRIE) tool to include all of the required specifications found in attachment 1.
Ended Purchase Order Awarded Last action
- Contract number
- N0017325P0063
- Awardee
-
Oxford Instruments America, Inc. UEI QK66A86PKE67
- Awarding agency
-
Office of Naval Research
Secretary of the Navy, Department of Defense
- Obligated
- $687,896
Award facts
- Contract value 100% obligated
- $687,895.85 Current and potential, with all options
- Completion date 100% complete
- Current and potential, with all options
- NAICS code
- 333242 Semiconductor Machinery Manufacturing
- Set-aside
- No set-aside
- Competition
- Not Competed under SAP · 1 offer Simplified Acquisition
- Pricing
- Firm Fixed Price
- Place of performance
- Concord, MA 01742, USA
Award details come from SAM.gov/FPDS.
Transactions
| Action | Obligated | Date |
|---|---|---|
| Other Administrative Action | $0 | |
| Original award | $687,896 |
About this award
The Office of Naval Research awarded a $687,895.85 firm fixed-price purchase order to Oxford Instruments America, Inc. on September 25, 2025, for the procurement of an Inductively Coupled Plasma Deep Reactive Ion Etching (ICP-DRIE) tool with all required specifications as detailed in the contract attachments. The work will be performed in Concord, Massachusetts, with an ultimate completion date of July 2, 2026. No small business set-aside was utilized for this award.
Oxford Instruments, a foreign-owned scientific equipment manufacturer based in Concord, Massachusetts, brings substantial experience to this procurement, having served as a prime federal contractor since 2001 with documented awards exceeding $18 million across more than 100 contracts. The company specializes in providing advanced analytical instrumentation and materials characterization systems to federal research institutions, with particular expertise in plasma processing systems and specialized research equipment. This ICP-DRIE tool acquisition aligns with the Office of Naval Research's mission to support scientific research and development activities critical to naval and defense applications, leveraging Oxford Instruments' established capabilities in delivering sophisticated analytical systems to the federal research enterprise.
Quick answers
Who was awarded contract N0017325P0063?
N0017325P0063 was awarded to Oxford Instruments America, Inc. by Office of Naval Research (Secretary of the Navy) on September 25, 2025.
How much is contract N0017325P0063 worth?
The government has obligated $687,896 on N0017325P0063.
Was contract N0017325P0063 competed?
The extent of competition for N0017325P0063 was not competed under sap. The government received 1 offer.
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