Horizontal Four Tube LPCVD System

The National Institute of Standards and Technology seeks to procure a horizontal four-tube low-pressure chemical vapor deposition system through simplified acquisition procedures. Offerors must meet requirements for furnace specifications, gas delivery systems, software control, safety features, and film deposition capabilities as outlined in the amended statement of work. Proposals will be evaluated based on technical capability of the proposed equipment to meet requirements, past performance, and price, with technical capability being most important. Proposals are due by July 21, 2022.

There is no set-aside designation. The North American Industry Classification System code is 333242 for semiconductor machinery manufacturing. Offerors must provide a firm-fixed price for one system to be delivered to the NIST campus in Gaithersburg, Maryland within 20 weeks of award. Payments will be made at 40% with drawing approval, 50% at delivery, and 10% after acceptance and demonstration that the system meets all technical and film deposition requirements over a 60-day installation and acceptance period.