Deep Reactive Ion Etching of Single Crystal 4H-SiC

NASA's National Aeronautics and Space Administration Shared Services Center (NASA/NSSC) has issued a Special Notice on December 18, 2025, announcing its intention to award a sole source contract for Deep Reactive Ion Etching of Single Crystal 4H-SiC. The government has determined that BIOTRONICS, INC, located in North Olmsted, Ohio, is the sole provider capable of performing this specialized service. The procurement will be executed under the authority of FAR 13.106-1(b)(1)(i) and will utilize the provisions and procedures prescribed in FAR Parts 12 and 13 for the acquisition of commercial items and services. Performance of the contract will occur at NASA Glenn Research Center (GRC). The NAICS classification for this procurement is 334513 (Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables).

The primary objective of this Special Notice is to solicit written submissions from interested organizations regarding their capabilities and qualifications to perform Deep Reactive Ion Etching of Single Crystal 4H-SiC, with such responses evaluated solely to determine whether the government should conduct this procurement on a competitive basis rather than as a sole source award. Interested parties must submit their capabilities and qualifications in writing by December 22, 2025, at 4:00 p.m. Central Standard Time to Laura Quave, the primary point of contact, at laura.a.quave@nasa.gov or 228-813-6420. The Statement of Work specifies requirements for etching a 4-inch, single crystal 4H-SiC wafer that is approximately 350 microns thick and electroplated with a patterned nickel etch mask, with critical specifications including maintaining diaphragm thickness uniformity within 5% and achieving an aspect ratio of at least 5. There are no set-asides for this procurement, and oral communications are not acceptable in response to this notice. The government's final determination regarding competitive versus sole source procurement remains solely within its discretion.