Deep Reactive Ion Etching of Single Crystal 4H-SiC

Closed Solicitation Posted

Solicitation number
80NSSC24867518Q
Agency
Shared Services Center National Aeronautics and Space Administration
Responses due
Set-aside
Total Small Business

Opportunity facts

NAICS code
334519 Other Measuring and Controlling Device Manufacturing
PSC
9390 Miscellaneous Fabricated Nonmetallic Materials
Points of contact

Notice details come from SAM.gov. Updated .

About this opportunity

The National Aeronautics and Space Administration (NASA) Shared Services Center has issued a Request for Quote (RFQ) for the Deep Reactive Ion Etching of Single Crystal 4H-SiC. The scope of work requires the fabrication of three 4-inch single crystal 4H-SiC wafers, each etched to a thickness of 300 microns with a 50-micron thick diaphragm and a diameter ranging from 300 to 900 microns. Key requirements include a smooth diaphragm surface, 5% thickness uniformity, smooth sidewalls, and an aspect ratio of at least 5. The evaluation will be based on the lowest price technically acceptable offer.

This procurement is set aside for small businesses under NAICS code 334519. The RFQ includes provisions on required representations and certifications, such as prohibitions on certain telecommunications equipment and services. Quotes are due by April 26, 2024 at 2:00 pm CT. There is no information provided on potential incumbents or award values.

Notice text

Please see attached SOW and RFQ.

Attachments

Files attached to this notice, newest first
File Type Posted
SATPC0034809 Tab 10 1 RFQ.pdf PDF
SATPC0034809 Tab 04 4 SOW.pdf PDF

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