Custom High-Vacuum E-Beam Evaporation System
Closed Pre-Solicitation Posted
- Solicitation number
- KT-2026-01
- Agency
-
Department of Energy
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 333242 Semiconductor Machinery Manufacturing
- PSC
- 6640 Laboratory Equipment And Supplies
- Place of performance
- California 94720, United States
- Points of contact
Notice details come from SAM.gov. Updated .
About this opportunity
The Department of Energy is conducting market research to identify sources capable of providing a custom high-vacuum electron-beam evaporation system, including installation, for Lawrence Berkeley National Laboratory's Advanced Light Source Division; responses to the Request for Information are due by 5:00 PM Pacific on September 25, 2026.
The RFI is issued under the University of California's prime contract for LBNL management and operations. Respondents must submit published product literature and technical specifications demonstrating compliance via email to LBNL Procurement Representative Karen Tays at kktays@lbl.gov and indicate the country of origin of the manufactured instrument.
The system must feature a nominal throw distance of approximately 1.0 meter, a dedicated substrate load-lock assembly capable of transferring substrates up to 200 mm × 40 mm × 50 mm without venting the main chamber, an integrated motorized tilt stage providing 95-degree tilting capability, and dual ion beam capabilities accommodating both a Gridded Ion Source (equivalent to Kaufman & Robinson KDC 75) and a Gridless Ion Beam Source (equivalent to KRI EH1000 10 A). Overall system dimensions must not exceed 8 feet (length) × 7 feet (width) × 7.5 feet (tall), with electrical requirements not exceeding 208V three-phase and 100A. Place of performance is Lawrence Berkeley National Laboratory in California. The NAICS code is 333242 (Semiconductor Machinery Manufacturing) with a small business size standard of 1,500 or fewer employees. This RFI is for informational and planning purposes only and does not constitute a solicitation or commitment.
Notice text
Lawrence Berkeley National Laboratory’s Advanced Light Source (ALS) Division operates a DOE Office of Science user facility that provides synchrotron light for research in materials science, chemistry, biology, and energy is conducting market research to identify sources that posess the capabilities and experience necessary to provide a Custom High-Vacuum E-beam Evaporation System, including installation.
Files
| File | Type | Posted |
|---|---|---|
| RFI KT-2026-01.pdf |
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