RFI KT-2026-01.pdf

LBNL Request for Information No. KT-2026-01 Page 1

September 16, 2026

Subject: Request for Information (RFI) No. KT-2026-01 Response Due Date: September 25, 2026

Introduction The University of California, Lawrence Berkeley National Laboratory (LBNL) is conducting market research to identify sources that possess the capabilities and experience necessary to provide a Custom High-Vacuum E-Beam Evaporation System.

Background Lawrence Berkeley National Laboratory’s Advanced Light Source (ALS) Division operates a DOE Office of Science user facility that provides synchrotron light for research in materials science, chemistry, biology, and energy. A custom high-vacuum e-beam evaporation system supports this mission by enabling precise, high-purity thin-film deposition for samples, optics, and detector components, ensuring the specialized coatings needed for beamline instrumentation and experiments meet the facility’s demanding performance standards.

Preliminary Specifications LBNL intends to acquire an instrument that meets or exceeds the following specifications. These are preliminary and subject to change.

Throw Distance: Must accommodate a nominal throw distance of ~1.0 meter to satisfy specific coating geometry requirements.

Substrate Load-Lock & Capacity: Must include a dedicated substrate load-lock assembly capable of transferring substrates measuring up to 200 mm × 40 mm × 50 mm without venting or interrupting the vacuum in the main deposition chamber.

In-Situ Motorized Tilting Stage: Must feature an integrated motorized tilt stage providing $\pm95^{\circ}$ tilting capability for controlled incline/angled deposition in-situ without requiring chamber opening or vacuum interruption.

Dual Ion Beam Capabilities: System vacuum chamber and power architecture must simultaneously accommodate two separate ion sources:

o One Gridded Ion Source (equivalent to Kaufman & Robinson KDC 75).

o One Gridless Ion Beam Source (equivalent to KRI EH1000 10 A).

Physical Dimension and Electrical Constraints:

o Overall system dimension must not exceed 8 feet (length) x 7 feet (width) x 7.5 feet (tall).

o Electrical: No more than 208V three phase and 100A.

NAICS Code and Size Standard The North American Industry Classification System (NAICS) Code for this acquisition will be 333242 (Semiconductor Machinery Manufacturing). The corresponding small business size standard is 1,500 or fewer employees.

LBNL Request for Information No. KT-2026-01 Page 2

Instructions Respondents who can demonstrate a proven record of delivering an Evaporation System per the preliminary specifications above should email the LBNL Procurement Representative Karen Tays at kktays@lbl.gov with relevant published product literature and/or technical specifications demonstrating compliance. Attachments or hyperlinks are both acceptable. Please indicate the country of origin where the instrument is manufactured.

All responses must be submitted by email no later than 5:00pm Pacific on Friday, September 25, 2026.

Request for Information Only This RFI is for informational and planning purposes only. This is not a request for quote or proposal. It does not constitute a solicitation and shall not be construed as a commitment by the University.

Responses in any form are not offers and no subcontract will be awarded as a result of this announcement. No inquiries regarding a bid package or solicitation will be answered, because there is no bid package or solicitation yet available. Any information submitted by respondents to this RFI is strictly voluntary.

In order to protect the procurement integrity of any future procurement that may arise from this RFI, information regarding the technical point of contact will not be given and no appointments for presentations will be made. No funds are available to pay for preparation of responses to this announcement, and no reimbursement will be made for any costs associated with providing information in response to this RFI or any follow-up information requests related to this RFI. Responding to this RFI does not provide any advantage or disadvantage to potential offerors if LBNL chooses to issue a formal solicitation at a later date.

This Request for Information is governed by procurement policies and procedures established under the University's Prime Contract with the U.S. Government, represented by the Department of Energy, for management and operation of Lawrence Berkeley National Laboratory.

Proprietary Information Because information received in response to this RFI may be used to structure future programs and may be made available to the public, respondents must not include any information in their responses that might be considered business sensitive, proprietary, or otherwise confidential. Responses must be submitted with the understanding that their contents may be publicly disclosed and, in the event of a public disclosure, LBNL will not notify respondents or provide any opportunity to revise or redact submitted information.

Karen Tays LBNL Procurement Representative

(510) 486-4926 kktays@lbl.gov

(End of RFI document) mailto:kktays@lbl.gov mailto:kktays@lbl.gov

NAICS Code and Size Standard