and Laser Ablation-Inductively Coupled Plasma-Mass Spectrometry (LA-ICP-MS)

The National Institute of Standards and Technology (NIST) is seeking quotations for the procurement of a new Inductively Coupled Plasma-Mass Spectrometer (ICP-MS) system with integrated Laser Ablation-ICP-MS (LA-ICP-MS) and Laser Induced Breakdown Spectroscopy (LIBS) capabilities to support semiconductor supply chain metrology within its Inorganic Chemical Metrology Group. The system must meet stringent technical specifications including a mass range of 2-240 amu, mass calibration stability better than 0.05 amu per day, and capabilities to achieve single-digit g/kg detection limits for at least 20 semiconductor industry-relevant elements. Evaluation will prioritize technical capability and compliance with statement of work requirements, followed by demonstrated experience delivering and installing similar instruments, and finally proposed price reasonableness. The Government reserves the right to award without discussions based on initial quotes. All quotations must be submitted electronically by 11:00 AM Eastern Time on March 18, 2026, to the Contract Specialist (forest.crumpler@nist.gov) and Contracting Officer (donald.collie@nist.gov), with pre-quote inquiries due within two calendar days of the March 5, 2026 solicitation issuance.

This solicitation is set aside for small businesses under NAICS code 334516 (Analytical Laboratory Instrument Manufacturing) with a 1,000-employee size standard. The procurement includes one primary line item for the ICP-MS unit plus two optional line items for one year of preventive maintenance service and transportation charges. Delivery and installation must occur within 90 calendar days of order receipt, with installation completed within 30 days and user training within 60 days at NIST's Gaithersburg, Maryland facility (Building 227). The contractor must provide a one-year warranty commencing upon successful installation and performance demonstration, with optional field service available for two additional years thereafter. Quotations must be submitted as firm-fixed-price with FOB Destination terms in four distinct volumes addressing technical capability, demonstrated experience with relevant contracts, pricing with 90-day validity, and terms and conditions acceptance, with payment scheduled for 100 percent upon installation, acceptance, and successful completion of all testing and performance demonstrations.