Attachment 1-Statement of Work (SOW).pdf

STATEMENT OF WORK

Title: Laser Ablation-Inductively Coupled Plasma-Mass Spectrometer

Lab: Inorganic Chemical Metrology Group (ICMG)

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps, NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The National Institute of Standards and Technology (NIST), Inorganic Chemical Metrology Group (ICMG) performs elemental measurements using a variety of instrumental methods. With these methods, we fulfill the customer needs through the provision of NIST Standard Reference Materials (SRMs) and development of methods used for the value assignment of elemental data to SRMs. For this project, we will develop new SRMs, Reference Materials (RMs), and Research Grade Test Materials (RGTMs) of high-purity solids currently lacking in chips manufacturing. This will enable more effective, efficient, and comparable characterizations of source materials, as well as process control improvements.

To achieve these goals, we will develop new NIST capabilities using laser-based analytical methods, specifically an instrument that can perform both Laser Induced Breakdown Spectroscopy (LIBS) t and Laser Ablation-Inductively Coupled Plasma-Mass Spectrometry (LA-ICP-MS). Research and development will be conducted in our laboratories on the Gaithersburg campus. Through our efforts, we will provide spatial information, depth profiling of the materials as well as provide amounts of elements that may be difficult to measure using methods already used by the NIST ICMG.. We will evaluate the homogeneity of the materials as a step of providing reference materials to the industry. RTGMs will provide industry with a way to assess the current level of comparability of purity evaluation in their materials.

II. PURPOSE

Purity is critical to the semiconductor industry and the reliable production of chips manufacturing. The industry needs the ability to accurately and reproducibly characterize the purity and to quantify potential contaminants in bulk solids and on otherwise clean surfaces. We will be purchasing an Inductively Coupled Plasma- Mass Spectrometry (ICP-MS) instrument to accomplish this task. The ICP-MS system will attached to a system which can perform both a Laser Induced Breakdown Spectroscopy (LIBS) and Laser Ablation-ICP-MS (LA-ICP-MS), with the ICP-MS being critical to the laser ablation measurements. The desired ICP-MS system must be able to use laser ablation as a sample introduction method with a high degree of stability when operating under conditions that are typical for laser ablation.

III. MINIMUM REQUIREMENTS

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The Contractor shall provide a system that meets all technical specifications identified below. All items must be new and be commercially available “off the shelf” products.

Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: Inductively Couple Plasma-Mass Spectrometer (ICP-MS) requirements Description: Instrument for elemental analysis and laser ablation Quantity: one (1) A. System

a. The ICP-MS instrument must include sample introduction system, that after no more than two (2) ignition cycles, must produce a stable plasma when any of the commonly available ICP nebulizers (cross-flow, concentric, microconcentric) and spray chambers (cyclonic, Scott-type and combinations thereof) are used to perform analyses.

b. A mass range of 2-240 amu, be capable of achieving sensitivities from ppt to high ppm without dilution, and a mass calibration stability of better than 0.05 amu per day.

c. In addition, stable plasmas must be obtained when commonly used alternate sample introduction systems such as Laser Ablation, ETV, FIA, GC, HPLC systems are interfaced to the instrument. The instrument design must permit switching between different sample introduction systems with ease and without affecting the instrument’s performance.

d. The microconcentric nebulizer must be provided with low flow (20 ul/min, 50 ul/min, 100 ul/min and 200 ul/min) integrated autosampler Probes (PEEK or Carbon).

e. Cooling, auxiliary and nebulizer gas flows must use mass flow controllers.

f. The instrument must have a minimum of 2 additional programmable/digital external mass flow controllers (MFCs). At a minimum, one controller must be optimized for a Helium (He) and Argon (Ar) gases to be used with a laser ablation system. The mass flow controllers must be software controlled allowing the user to independently adjust flow rates of the two channels.

g. The instrument shall include an ESI SC-2 DX, or equivalent, HF-resistant auto sampler system with integrated Autosampler Probe (PEEK or Carbon) capable of flow rates ranging from 0.02 mL/min to 2 mL/min, holding samples from 0.5 mL to 250 mL. The autosampler must be capable of sampling from racks housing vials of 4 mL, 10 mL, and 50 mL capacity at a minimum. The autosampler must be compatible with the instrument software.

h. The instrument must be supplied with a peristaltic pump with a minimum of 3 channels that can be controlled by the instrument software. Appropriate compatible drainage tubing must also be provided for the peristaltic pump.

i. A moveable sample table with lockable wheels must be supplied to accommodate the autosampler.

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j. The plasma and interface must be easily accessible for examination and replacement of cones and attaching peripheral devices for chromatographic separations (e.g., gas chromatograph, HPLC) and solid sampling (e.g., laser ablation) necessitating both to be at ground potential.

k. The cone mountings must be reproducible and durable and allow for replacement to be performed by the user with minimal chance of breaking. An automatic gate-valve, isolating the plasma interface from the focusing lens assembly, must be installed if present. Extraction lens must be of plug-in type if present.

l. Procedures for plasma shutdown and start-up must be automated to provide full protection of the vacuum and electrical systems.

m. The system must include a collision cell with 3 gas options (helium, hydrogen, and ammonia gases) to assist in the reduction of interferences in the sample matrix.

n. The system must be equipped with specific water chiller(s) to cool the interface and turbo pumps and other parts of the instrument, if warranted. The chillers used with devices operating at high voltage must be equipped with safety interlock features: conductivity meter, emergency shutdown, etc.

Additionally, a pre- water filter must be supplied and installed with the water chiller to extend the life of the chiller.

o. The torch position must be capable of being optimized in three directions (X, Y, Z) under full computer control.

p. The system should include a power conditioning unit to provide stable power to the ICP-MS in the event of transient power variances.

q. Ion source settings for various analysis regimes must be able to be stored and accessible for later use.

B. Vacuum System

a. Air cooled turbo molecular pump having capacity of producing 1 x 10-5 torr or less pressure in the analyzer.

b. Pressure within the interface, differential pumping chambers must be continuously monitored by digital readout and immediately accessible through software.

c. The instrument must have an integrated vacuum management system that protects instrument vacuum from power failures or other accidental venting.

C. Hardware/ Software

a. Workstation must operate in a Windows 11 environment. The computer must be equipped with one LCD flat panel color monitor.

b. The computer system must include all necessary hardware (e.g., RAM, hard drive, video cards, IEEE adapters, etc) and software to control the instrument, monitor all adjustable mechanical and electronic parameters, and capture and process data. A “full install” CD and/or memory stick for the operating system must be provided.

c. Software must be capable of real time monitoring and control of all adjustable mechanical, vacuum and electronic parameters including gas flows, torch positions, valve positions, vacuum readings, beam focusing, collector

4 | P a g e positions, magnetic field parameters, zoom lens settings and other relevant parameters.

d. The software system supplied with the instrument must be supported for a minimum period of five years from date of delivery. If the operating system is changed or upgraded within five years, the supplier will provide, at no additional cost, all software and hardware necessary to accommodate an upgrade to a new operating system.

e. The instrument software will be provided on CD and/or other convenient media (e.g., memory stick) so that software can be reloaded in the event of computer malfunction or accidental corruption of software.

f. Two (2) site licenses (dongles) must be provided to permit offline data processing and access for the purpose of processing data from a remote location, required only if one installation is allowed per license.

g. Data file formats must be compatible with industry standards to allow the use of common spreadsheet (e.g., MS EXCEL), database and word processor applications.

h. Data export must include all relevant data and machine parameters to permit full offline processing of the data that capture the parameters of the instrument at the time of samples analysis.

i. An index of functions and protocols used by the software to treat the raw data must be provided. All relevant algorithms or full and complete reference to published methodologies must be provided. This will include baseline corrections; dead-time corrections; fractionation correction models; gain corrections; yield corrections; data outlier discrimination models; peak centering routine and mass calibration.

j. Instrument software must be compatible with current industry standard laser ablation systems and autosampler systems with minimal effort by the user.

k. The software and data processing algorithms must include procedures for time-resolved analyses (e.g., using laser ablation, chromatographic separation systems and other sources of transient signals).

l. System must be capable of interfacing with an auto-sampler and membrane desolvator.

Operating Environment

a. NIST requires that the instrument be supplied ready for use and be compatible with United States standard electrical power. If transformers are required for operation with U.S. standard electrical power, such transformers and line conditioners shall be included with the instrument.

D. Documentation

a. Documentation and manuals shall be provided describing all aspects of operations, data reduction methods, data calculations, maintenance, and troubleshooting of every sub-system of which the instrument is comprised.

Software refers to all instrument control, host computer to instrument computer/controller interface, and data acquisition, reduction, and display functions. One electronic (pdf) and one paper (hardcopy) version of all manuals shall be provided.

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Line Item 0002: Option line items Quantity: One (1)

a. The contractor shall provide on-site field service (commencing after the one-year warranty) for preferably 2 years after receipt and acceptance. Service shall be provided within 5-10 business days of the initial telephone call from the end user. The service shall include an on-site visit covering all travel, labor, related parts (parts include general parts of the instrument, and consumables), shipping, one preventive maintenance visit per year, unlimited telephone support and software upgrades.

IV. SCHEDULE OF DELIVERABLES

Complete the table providing the information for all the tasks identified above.

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 Inductively Coupled Plasma- Mass

Spectrometry (ICP-MS) capable of laser ablation

One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

2 Manufacturer’s cart One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

3 Windows Workstation One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

4 Operations and maintenance manual for the ICP-MS

One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

5 Power supply compatible with standard US voltage

One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

6 Chiller One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

7 Power conditioner One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

8 Consumables Kit One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

9 Installation Once No later than 30 calendar days after receipt of instrument.

NIST

Gaithersburg, MD

10 Training of NIST personnel at NIST Once No later than 60 calendar days after receipt of instrument

NIST

Gaithersburg, MD

11 Warranty One (1) year

Commence upon successful installation and meeting specifications.

NIST

Gaithersburg, MD

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the

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Contractor Point of Contact (POC) within 2 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.).

PLACE OF PERFORMANCE

The instrument is to be installed in Building 227 at the NIST Gaithersburg, MD

REGULAR BUSINESS HOURS

Regular business hours are Monday through Friday, (revise as applicable 8:00 am to 5:00 pm) Eastern Time, excluding Federal holidays and NIST closures, and must be coordinated with the NIST Technical Point of Contact (TPOC).

PERIOD OF PERFORMANCE

The instrument will be received within 3 months of the date of purchase.

V. DELIVERY TERMS

The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O/ POC/COR (Name and Building Number): Korina Menking-Hoggatt Building 227/B328

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 30 days after delivery during normal business hours. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- Building 227. All installation requirements are identified below:

• Adequate power supply as specified by the contractor.

• Proper ventilation for the instrument (ICP-MS only) as specified by the contractor.

• Access to house gas lines or gas cylinders determined by the instrument purchased.

• Proper laboratory space for the instrument determined by the instrument purchased.

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VII. TRAINING

The contractor shall conduct training session for up to four (4) users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours (see REGULAR BUISNESS HOURS section above and will be coordinated with the NIST Technical Point of Contact (TPOC) to ensure maximum availability of NIST personnel. Training is to be completed within 60 days after delivery.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

• Visual-Physical check at NIST laboratory for adherence to design specifications.

• Performance check at NIST will be to demonstrate that no damage or misalignment issues arose during transportation and installation in the laboratory.

• The tests will be performed as soon as the instrument is installed and ready.

• The following specific acceptance criteria will be evaluated. Criteria must be satisfactorily met prior to acceptance of the system by NIST.

Offerors must meet the following performance specifications by supplying data taken on the instrument being delivered to NIST. The data is intended to be a baseline for instrument performance and, as such, may be taken at the factory during assembly and final test. On-site measurements can therefore be specifically focused on measurements used to test or benchmark that no damage or misalignment issues have arisen due to transportation and installation.

Instrument performance check Demonstrate the instrument is reducing the amount of doubly charged and oxide species in no gas mode by meeting the following criteria:

• 156/140 m/z (oxide CeO+/Ce+) < 3 %

• 70/140 m/z (doubly charged Ce++/Ce+) < 5 %

Demonstrate the instrument is reducing the amount of oxide species are reduced when using a collision gas in the collision cell by meeting the following criteria:

• 156/140 m/z (oxide CeO+/Ce+) < 2 %

Sensitivity

• Demonstrate single digit ug/kg level detection limits in aqueous solutions for at least 20 elements of interest to semiconductor industry. The instrument should

8 | P a g e also be able to make reproducible measurements with relative standard deviations of < 5%.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

IX. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after FULL ACCEPTANCE of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

• Unlimited telephone/e-mail support for questions regarding operation

• All costs including parts, shipping, labor, travel, and other expenses necessary to replace or repair the system will be borne solely by the contractor at no additional cost to the U.S. Government.

• All defects in materials and workmanship for a period of one year from the date of final acceptance by the Government.

• The warranty shall commence upon successful completion of delivery, installation, training and demonstration of all required specifications.

X. PAYMENT SCHEDULE

Define how the contractor will be paid if more information besides what is included in the payment clause is needed. If firm-fixed-price construction, for example, it may warrant further definition.

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

• 100% after installation and acceptance by the POC of fully installed system, AND

• After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

• After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.