UHV Chamber and Component Production Requirements - AL-1220-7841.pdf

UHV Chamber and Component Production Requirements

Tom Swain Release Date: Apr 19 2022 10:17:26 AM PDT

Document Number: AL-1220-7841 Revision: E

Document Status: Released Document Type: INSTRUCTION

Category Code: AL7000

ALS-U - GENERAL

MISCELLANEOUS

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Advanced Light Source Upgrade Project

Lawrence Berkeley National Laboratory All officially released LBNL documents are watermarked and contain LBNL Document

Control Center release information in the lower-left corner of the document's pages.

Printed hard copies of this document are for reference only.

TABLE OF CONTENTS

1 Revisions

1.1 Major Revisions

1.2 Minor Revisions

2 Approvals

2.1 Major Revisions

2.2 Minor Revisions

3 Abbreviations and Acronyms

4 Definition

5 Introduction

6 Specification Definition

7 Environmental requirements

7.1 Codes and Standards

7.2 Cleanliness environment

7.3 Cleaning fluids

7.4 Cutting fluids

7.5 Material for UHV fabrication

7.6 Fasteners

7.6.1 General

7.6.2 Plated Fasteners

7.6.3 Fastener in UHV Service

7.7 Flanges and gaskets

7.8 Alternate Flanges

7.9 Viewports

8 Part fabrication

8.1 Machining

8.2 EDM (electrical Discharge Machining)

8.3 Surface Finish

8.3.1 Electro-Polishing

8.3.2 Anodizing

8.3.3 Acid Etching

8.3.4 Mechanical Polishing

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8.4 Additive Manufacturing

9 Part Cleaning

9.1 General

9.2 Cleaning of Ferrous and Aluminum Parts

9.3 Cleaning of Copper and Nonferrous Parts

10 Parts Joining

10.1 General

10.2 Welding – Stainless steel

10.3 Welding – Aluminum

10.4 Brazing

10.5 Electron Beam Welding

10.6 Other

10.7 Component leak check

10.8 Marking

11 Final Cleaning and packing

11.1 Intent

11.2 Final cleaning

11.3 Electro-Polishing

11.4 Vacuum Furnace Degassing

11.5 Stress Relief Annealing (Vacuum Firing)

11.6 Packing

12 Component Inspection

13 Final Assembly

14 Bake and Quality Assurance

14.1 Bakeout

14.2 Residual Gas Analysis

14.3 Outgassing measurement

14.4 Final Leak Test

14.5 Final Pressure Measurement

14.6 HPN2 Backfill

15 Shipping

16 Factory Acceptance Test Vacuum Data templates

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16.1 Visual & Mechanical Inspection

16.2 Bakeout Data

16.3 RGA Instrument Data

16.4 RGA Scan Data

16.5 Outgassing Data

16.6 Leak Test Results

16.7 Final Pressure Measurement

16.8 HPN2 Backfill

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1 REVISIONS

1.1 Major Revisions

Rev. CM Number Description of Change A First Release B ISO 5817 weld quality relaxed to level D; minor corrections C Ferrous cleaning steps (Section 9.2) includes

Aluminum; formatting for improved legibility.

1.2 Minor Revisions

Rev. CM Number Description of Change D Added chromium. Prior approval allowed for UHV non-machined surfaces and nonstandard marking, Eliminated requirement for cold rolled fasteners.

Reformatted footer.

E RGA acceptance criteria change (Sections 14.2, 16.4).

Added Section 10.5, Electron Beam Welding.

2 APPROVALS

2.1 Major Revisions

The following individuals shall approve this document:

Approver Project Role Dawn Munson Manufacturing Engineer Elaine DiMasi ALS-U Beamlines Lead Jiani Niu ALS-U QA Manager Thomas Gaucher ALS-U Manufacturing Engineer Sol Omolayo ALS/ALS-U Vacuum Systems Lead Will Hutcheson ALS Mechanical Engineering Lead Christoph Steier Accelerator Systems Lead

2.2 Minor Revisions

The following individual shall approve this document:

Approver Project Role Sol Omolayo ALS/ALS-U Vacuum Systems Lead

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3 ABBREVIATIONS AND ACRONYMS

ALS Advanced Light Source ALS-U Advanced Light Source Upgrade ASTM American Society for Testing Materials CF Conflat Flange COTS Commercial, off the shelf FAT Factory Acceptance Test HMSLD Helium Mass spectrometer Leak Detector ID Identification ISO International Standards Organization LBNL Lawrence Berkeley National Laboratory NUM Number PPM Parts per Million Ra Average Roughness of a surface, in micrometers RGA Residual Gas Analyzer UHV Ultra High Vacuum WPS Welding Procedure Specification

4 DEFINITION

UHV

Generally, refers to a level of vacuum pressure in the range 1x10-8 to 1x10-11 torr. Vacuum systems capable of UHV are typically of all-metal construction and required to be bakeable.

Vacuum Chamber

A metallic high purity chamber or enclosure that is a key component of vacuum assemblies. It manages structural, thermal, and seismic demand loads, and may contain features such as viewports, mechanical interfaces, cable-ways and survey & alignment monuments.

Component

One or more parts joined together that contain at least one UHV surface. Examples include flanges, bellows, mirrors, and chambers.

Bake out

The controlled heating and cooling of a chamber or component to liberate (desorb) surface contaminants such as water and hydrocarbons. This is usually required to achieve UHV.

DN

Inside diameter, in mm, of a tube or CF flange. Conflat sizes are customarily referenced by their outside diameter (OD). For example, a “ten inch Conflat” refers to a CF flange with a 10” outside diameter and

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200 mm (8”) inside diameter. This will be referred to as size DN 200 or alternatively CF 200.

Table 4-1 : Conflat sizes

DN Size [mm] Conflat nominal OD, inches

DN 16 1.33”

DN 35 2.75”

DN 40 2.75”

DN 50 3.375”

DN 63 4.5”

DN 100 6”

DN 160 8”

DN 200 10”

DN 250 12”

DN 300 14.25

IPA Electronic grade isopropyl alcohol. This can have 0-10% DI Water content. Electronic grade ethanol may be substituted.

DI Water Deionized; free of salts that can cause scale and spot formation, with a volume resistivity greater than 1x106 Ω-cm.

VCR An industry-standard all-metal fitting typically used in the distribution of high purity gases.

HPN2

High purity Nitrogen gas furnished from an electronic grade gas cylinder or a liquid nitrogen dewar and then processed through a cleanroom gas filter cartridge (Fig. 2). Ideally, all the connections and hoses downstream of the filter are of all-metal construction and free of elastomers.

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Figure 4-1: A High Purity Nitrogen (HPN2) Source

Cleanroom Foil

A specialty aluminum foil for protection and storage of UHV parts.

This is free of oils and surface contaminants.

Technical Rep.

Short for Technical Representative, the LBL engineer assigned to address vendor questions of a technical nature concerning a specific procurement.

5 INTRODUCTION

This document outlines the UHV compatibility requirements for manufacture, cleaning, qualification and packaging of vacuum chambers and vacuum components for use at the ALS at LBNL. The ALS-U project will provide a major upgrade of accelerator and beamline systems. All new and upgraded ALS UHV system and component will comply with the requirements detailed in this document.

This document may also be adopted by other LBNL projects besides the ALS and

ALS-U projects. The Figure 5-1 illustrates a typical fabrication, assembly, and test workflow.

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Figure 5-1 : Typical manufacturing workflow

This document focuses on the requirements, practices and procedures for production and delivery of UHV chambers that do not possess leaks, contamination, or damage that renders them unusable or compromised. This requires vigilance at multiple risk points in the manufacturing workflow.

Vendor should thoroughly review this document prior to responding to a request for quotation or information. Questions should be addressed to the Technical Rep.

Each specification stated in this document has a unique identification (ID) number (ID-NUM).

Substitutions, enhancements, or deviations from this specification may appear in a higher level technical specification document such as a Statement of Work.

6 SPECIFICATION DEFINITION

Shall, will, may, and should are used to define every specification listed in this document. The definitions of these terms are as follows

May – is used to indicate a desire or goal of a specification. This can also be interpreted ‘as nice to have’ and are not contractually binding.

Shall –is a specification that is contractually binding and must be implemented.

Should – is used to indicate a desire or goal of a specification. This can also be interpreted ‘as nice to have’ and are not contractually binding.

Will – is used to inform intent or declaration of purpose. This is not a specification.

Example, the author will use the word ‘shall’ to indicate that a specification is contractually binding and must be implemented.

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7 ENVIRONMENTAL REQUIREMENTS

7.1 Codes and Standards

The following code and standards should be used to manufacture UHV components.

ID NUM

(SYY-XX-) Specification

S09-05- 000400

Welding Certification:

• ISO 15614-1, ISO 15614-11, test and inspection.

• ISO 13919-1, ISO 5817, weld quality: level B, rigorous.

• ISO 9606-1, welder qualification.

• ISO 15609-3, ISO 15609-1, welding procedure specifications, WPS

• AWS D1.6, Structural Welding Code – Stainless Steel

• AWS D1.2, Structural Welding Code – Aluminum

• ASME, BPVC, Section IX, welding processes and welder certifications

• ASME, BPVC, Section V, non-destructive tests.

• ASME, BPVC, Section II, part C, Specifications for Welding Rods

Electrodes and Filler Metals.

Material certification:

• EN ISO 10204 (type 3.1)

Manufacturing:

• ASME, BPVC, Section VIII, Division 2

• ASTM E2734/E2734 M − 10.

Non Destructive Testing:

• ASTM E498

7.2 Cleanliness environment

The term "Cleanliness conditions" means the environment and working conditions to be guaranteed and the precautions to be adopted in order to avoid contamination from oils, greases, shavings, powders, paints etc. on the components under construction. The subcontractor shall comply with the following requirements.

ID NUM Specification

S09-05-000401 A clean area shall be used for post fabrication operation (Such as Assembly, Test, Etc…)

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ID NUM Specification

S09-05- 000402

The cleaning area shall have HVAC system separate from that of nearby machine shop areas, such that detectable aromatic odors are absent or minimal

S09-05- 000403

Documentation shall be posted on the proper use of cleanroom garments such as gowns, head covers and shoe covers.

S09-05- 000404

Smoking, eating and drinking shall be forbidden inside the clean area

S09-05-000405 The use of hydrocarbon and fluorocarbon greases and oil shall be forbidden

S09-05- 000406

An adequate quantity of tools degreased and cleaned shall be permanently kept inside the Clean Area.

S09-05-000407 Other tools to be introduced inside the Clean Area shall be at first degreased and cleaned

7.3 Cleaning fluids

LBNL gives the subcontractor a list of recommended cleaning fluids.

Name Manufacturer D909 Dubois Chemicals

Surtec 131 Surtec International Mirachem 500 Mirachem Corp.

Cor1 & Cor2 (232-010, 232-011) Coral Chemicals

S09-05-000408

The subcontractor may substitute an alternative only if the subcontractor can prove that the cleaning agent is compliant with UHV cleaning and prior approval obtained from LBNL Technical Rep.

7.4 Cutting fluids

LBNL gives the subcontractor the following list of the cutting fluids allowed in UHV.

ACCU-LUBE LB-2000

ACCU-LUBE LB-2001

AQUA KOOL 21EP-5

Aqua Syn 55 Aqua Cool 21EP-5 Aqua Cool 4-EPX (

AQUA SYN 160 (FORMERLY "DIP COOL 862")

AQUA SYN 180 (FORMERLY "DIP COOL 868")

Diamond Way 2010 (Yamazen) Dip Kool 862 Dip Kool 868 Dip Kut 819H Extreme Cut 250C Ethanol Haloform CW-40

HANGSTERFER'S S-500 CF

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AQUA SYN 190

AQUA SYN 55

BIOCUT 1500

BIOCUT 2200

BIOCUT 3600

BIOCUT 4600

BLASOCUT 2000 CF ART 875

BLASOCUT 2000 CFSW, ART 875-21

BLASOCUT KOMBI ART 883

CIMPERIAL 1060CF

CIMSTAR 40

CIMSTAR 40 F

Cimcool 5 Star 40 Cimperial 1011 Cindol 3102

DASCOOL 2003

Relton A-9 Rust-Lick Vytron-N Rust-Lick G-25-J Rust-Lick WS11 Rust-Lick WS600A Rust-Lick Safetap Ultima

SPARCUT NC

Sunnen Man-852

HANGSTERFER'S S-506 CF

HANGSTERFER'S CRYSTAL CUT 465

HANGSTERFER'S ANTI-FOAM SL

HOCUT 801

HYCUT CF21

HYCUT ADDITIV BF

HYSOL MB 50

Isopropyl alcohol Kerosene

KOOL MIST #77

LARD CUT 240

Micro-Drop (Trico) Perkut 301GG Rapid Tap Tool Saver TAP Magic Formula 2 Eco-oil TAP Magic Formula 1 Aqueous Trigo MD1 Trim 9106 Trim E206 Trim Microsol 585 XT Trim Tap Tap Magic Syntillo 9930

S09-05-000409 Use of alternate cutting fluids shall require review and advance written approval from the Technical Rep.

S09-05-000410 The subcontractor shall NOT use fluid with 50 ppm or more of sulfur or silicone.

S09-05-000411 The subcontractor shall use a water-soluble cutting fluid.

7.5 Material for UHV fabrication

S09-05-000412 All materials for UHV surface fabrication shall be sourced from qualified sources.

The following materials are allowed fabrication materials for UHV fabrication.

• Stainless Steels - AISI 304L, 304LN, 316L, 316LN, 321, 347, 17-4, 440C,

• Inconel

• Aluminium 5082. 5083, 6061, 6063

• Copper (OFHC, CuCrZr, UNS 10700, GlidCop)

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• Non-porous ceramics such as high-density Alumina, Beryllia, Macor, machinable glass, synthetic Mica

• Beryllium, Beryllium Copper, Tellurium Copper

• Glass (SiO2), Silicon, Sapphire

• Gold, Silver, Tin

• Mu-metal, Monel metal

• Titanium, Tungsten

• Molybdenum, including TZM

• Bronzes, Phosphor Bronzes types 510 and 544, Ampco 18 & 22 Aluminum

• Bronze, Aluminum

• Kovar (Fe-Ni-Co)

• Chromium

S09-05-000413 Written approval shall be required from the Technical Rep for the use of any material that is not listed above.

S09-05-000414 The subcontractor shall avoid the use of materials incompatible with synchrotron radiation.

7.6 Fasteners

7.6.1 General

ID NUM Specification S09-05-000415 Fasteners shall comply with ISO standard.

S09-05-000416 Fasteners shall be austenitic stainless steel.

S09-05-000417 If metric fasteners are used, it shall be noted.

S09-05-000418 Fastener heads shall be 12-point, hexagon or hexagon socket cap.

S09-05-000419 Metric nuts and washers shall comply with ISO standards.

S09-05-000420 Fastener material shall be A2 or A4 stainless steel.

7.6.2 Plated Fasteners

ID NUM Specification

S09-05-000422 Where stainless steel fasteners mate with stainless steel threaded components, threads of the fasteners shall be silver plated to a minimum thickness of 5μm.

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7.6.3 Fastener in UHV Service

S09-05-000423 If silver plated fasteners are used in UHV, they shall be vacuum furnace degassed prior to assembly.

S09-05-000424 Screws shall be vented when installed in blind tapped holes.

7.7 Flanges and gaskets

S09-05-000425 All vacuum joints shall be metal-sealed unless otherwise specified.

S09-05-000426 All flanges shall be CF type unless otherwise specified.

S09-05-000427 All flanges shall conform to ASTM standard E2734/E2734M − 10.

S09-05-000428 Flanges (including knife-edge and flat flanges) shall be manufactured from stainless steel grades 304L, 304LN, 316L or

316LN.

S09-05-000429 Use of stainless steel grades 304 or 316 for weldments shall require prior approval.

S09-05-000430 Flange sizes shall be one of the following CF 16, CF 25, CF 35, CF 40, CF 50, CF 63, CF100, CF 160, CF 200, CF250, and CF 300.

Other sizes require prior approval.

S09-05-000431 CF knife edge radius shall have a minimum radius of 0.1 mm and a maximum radius of 0.2 mm.

S09-05-000432 Knife-edge interior angle shall be 90 degrees (corresponding to a 20-degree counter slope).

S09-05-000433 CF gaskets shall be bare copper.

S09-05-000434 CF gaskets shall be stamped or machined.

S09-05-000435 CF gaskets shall be quarter hard or half hard unless otherwise agreed.

S09-05-000436 Silver plated gaskets shall require approval from the Technical Rep.

S09-05-000437 Any blanking flanges, gaskets, fasteners and washers necessary for the delivery and shipment of sealed and backfilled chambers shall be included.

Note: CF 35 and 40 have identical knife-edge and fastener group details.

7.8 Alternate Flanges

ID NUM Specification

S09-05-000438 Alternate flanges shall be reviewed and approved in advance by the Technical Rep.

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7.9 Viewports

S09-05-000439 Viewport shall be composed of borosilicate glass or sapphire with a Kovar/glass all-metal braze interface.

8 PART FABRICATION

8.1 Machining

ID NUM Specification

S09-05-000440 The machining of the part shall be performed with high speed diamond or diamond like carbide tools.

S09-05-000441 The clamp of the part on CNC machine shall be sufficiently rigid.

8.2 EDM (electrical Discharge Machining)

ID NUM Specification S09-05-000442 The part shall be marked or labelled as EDM-machined.

S09-05-000443 EDM-residue shall be removed by etching or machining.

8.3 Surface Finish

ID NUM Specification S09-05- 000444

All UHV surfaces shall be machined unless prior approval is received by the Technical Rep.

S09-05-000445 All UHV surfaces shall have a surface roughness (Ra) value of 6.3 or better unless otherwise specified.

8.3.1 Electro-Polishing

ID NUM Specification S09-05- 000446

If electro-polishing is employed, it is critical that external cracks and joints shall be thoroughly flushed and cleaned afterwards.

S09-05-000447 Components shall be free of evidence of corrosion from electro-polishing residues, because joint or sealing failure may eventually follow.

S09-05- 000448

The subcontractor shall perform a complete cleaning of electro-polished parts.

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8.3.2 Anodizing

S09-05- 000449

Anodizing or Alodining of parts for UHV service shall be prohibited except in the case of review and approval in writing.

8.3.3 Acid Etching

ID NUM Specification S09-05- 000450

Acid etching of as-delivered surfaces shall require prior approval from the Technical Rep.

8.3.4 Mechanical Polishing

ID NUM Specification S09-05-000451 Sand Blasting of parts for UHV service is prohibited.

S09-05- 000452 Bead blasting shall require prior approval from the Technical Rep.

S09-05- 000453 The use of other solid kinetic abrasive material is prohibited.

S09-05- 000454 Resin or rubber bonded abrasives is prohibited.

S09-05- 000455 Tungsten carbide and diamond wheels may be used

S09-05- 000456

The subcontractor shall use the following abrasives listed below:

• 3M Scotch Brite Type S, silicon carbide (gray)

• 3M Type A, aluminum oxide (maroon)

• 3M Type S, silicon carbide (gray)

• 3M Wetordry Fabricut (aluminum oxide or silicon carbide types).

• 3M 413Q silicon carbide

• 3M Wetordry Tri-M-ite 411Q

8.4 Additive Manufacturing

ID NUM Specification S09-05- 000457

Additive manufacturing shall be permitted in the case of review and approval in writing.

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9 PART CLEANING

9.1 General

ID NUM Specification

S09-05-000458 Parts shall be cleaned after machining. The cleaning should occur as soon as possible after machining.

S09-05-000459

For nonporous machined metal parts or components, an aqueous, halogen and silicon-free anionic detergent cleaning agent with surfactants and builders that is neutral or mildly alkaline shall be used.

S09-05-000460 Deionized (DI) water shall be used at final rinse steps, with a minimum volume resistivity of 1 mega ohm-cm.

S09-05-000461 All parts shall be cleaned prior to joining.

S09-05-000462 Cleaning tool shall be compatible with UHV.

S09-05-000463 Brushes other than organic fiber or Stainless steel shall not be used without prior approval from LBNL Tech Rep.

S09-05-000464 After cleaning, parts shall be handled with cleanroom gloves.

S09-05-000465 Parts shall only be marked in a manner specified by accompanying contract document.

S09-05-000466 Parts shall be wrapped in cleanroom foil (or bagged in cleanroom bags) and then marked.

S09-05-000467 The subcontractor shall use the list of accepted cleaning fluids listed in §7.3.

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9.2 Cleaning of Ferrous and Aluminum Parts

S09-05-000468

The subcontractor shall use the following cleaning procedure:

1. Immerse parts in a prepared cleaning agent bath at room temperature for 10 minutes or more, depending on the amount of soil (see §7.3 for accepted cleaning fluids).

2. Rinse and spray with tap water.

3. Inspect and brush as needed to remove remaining contaminants. A Tampico fiber brush is suitable here.

4. Manually flush blind tapped holes and other entrapment features using pressurized spray water.

5. Spray rinse parts again with tap water.

6. Verify that all surfaces sheet. Repeat steps 4-5 as required.

7. Immerse parts in room temperature DI water with appropriate energy, agitation.

8. Immerse parts in hot DI water (>50°C) with appropriate energy, agitation.

9. Blow dry with dry filtered air or HPN2. Ensure all surfaces are dry before proceeding.

10. As soon as is practical, wrap parts in cleanroom paper secured with cleanroom tape. For storage > 24 hours, seal in cleanroom poly bags.

S09-05-000469 Use of alternate cleaning procedures shall require prior approval from the Technical Rep.

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9.3 Cleaning of Copper and Nonferrous Parts

S09-05-000470

The subcontractor shall use the following cleaning procedure:

1. Proceed as with steps 1-6 in §9.2 “Ferrous parts”.

2. Deoxidation: Immerse in 15% Hydrochloric acid for 2-10 minutes.

3. Rinse in deionized water.

4. Coral Chemical Bright Dip (Cor1 /Cor2 Mixed 50%/50%) – 1 to 3 minutes with occasional gentle agitation.

5. Rinse in deionized water.

6. Repeat steps 1-8 in §9.2 “Ferrous and Aluminum Parts”.

7. Spray part with analytical grade ethanol 99.8%, to facilitate rapid drying.

8. Blow Dry with HPN2 with particular attention to regions prone to retain liquids (e.g. blind holes).

9. Bake by dry hot air flow at 60°C for 10-60 minutes and allow cooling down.

10. Pack in cleanroom paper and store in sealed poly bags. Vendor should void direct contact aluminum foil, which can cause galvanic corrosion in the presence of entrapped moisture.

S09-05-000471 Use of alternate cleaning procedure shall require shall prior approval from the Technical Rep.

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10 PARTS JOINING

10.1 General

ID NUM Specification S09-05-000472 The subcontractor shall have a Certified Welding Inspector (CWI).

S09-05-000473 The subcontractor shall have Welding Procedure Specification

(WPS).

S09-05-000474 The subcontractor shall have the WPS available on request.

S09-05-000475 The welding shall be performed in compliance with AWS D1.6

10.2 Welding – Stainless steel

ID NUM Specification

S09-05-000476 The subcontractor shall perform an inspection of surface to ensure to be contamination free.

S09-05-000477 Welds from the UHV side (seal weld) shall be continuous GTAW TIG fusion welds, with no filler material.

S09-05-000478

When a seal weld is applied on UHV side, an external structural weld is performed and shall be discontinuous, laid out in a manner that does not trap volumes, yet still providing access to a helium probe for helium leak checking.

S09-05-000479 To the extent possible, these seams shall be left in the “as welded condition” without further modification or surface treatment.

S09-05- 000480

To avoid excessive coloration and scaling, subcontractor shall flush heat-affected zone(s) during weld operations with an inert gas until they have cooled down below 400°C.

S09-05-000481 Removal of weld coloration with acid paste requires approval from the Technical Rep.

S09-05- 000482 Dye penetrants for weld defect shall not be used.

S09-05- 000483

Defective weld shall be removed by machining with tungsten carbide diamond tooling.

S09-05- 000484 The filler material to repair the defective weld shall be 308 SS.

S09-05-000485 The inert gas shall have a purity of 99.995% or better.

S09-05- 000486 The inert gas shall be Helium, Argon or Argon-Helium.

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10.3 Welding – Aluminum

S09-05- 000487

To avoid oxidation, any welding of aluminum parts shall be performed in the first 24h after cleaning.

S09-05- 000488

To protect the weld zone from oxidation, parts shall be flushed with inert gas until they have cooled down to a temperature of 60°C.

10.4 Brazing

ID NUM Specification S09-05- 000489

Flame brazing of UHV surface components shall require approval from the Technical Rep.

S09-05- 000490 Vacuum furnace brazing shall be preferred.

S09-05-000491

A vacuum furnace brazing shall have a braze plan with the following detail:

• Fixturing and brazing support.

• Braze filler Materials.

• Thermal ramp rate, soak time, and descent rate.

• Furnace gases and pressure schedule.

• Special instructions regarding water/air and air/vacuum interfaces.

• Leak and hydrostatic Testing.

10.5 Electron Beam Welding

ID NUM Specification

S09-05-000586 Electron Beam welding of surfaces in contact with vacuum shall be joined at a pressure of 0.13 Pa (1 x 10-3 torr) or lower.

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10.6 Other

S09-05-000492 Use of components joined with explosion bonding shall require a fabrication plan and prior approval from the Technical Rep.

S09-05-000493 Welding of components joined with explosion bonding shall require a fabrication plan and prior approval from the Technical Rep.

S09-05- 000494

Brazing of components joined with explosion bonding shall require a fabrication plan and prior approval from the Technical Rep.

S09-05-000495 Friction stir welding shall require a fabrication plan and prior approval from the Technical Rep.

S09-05- 000496

Frit bonding shall require a fabrication plan and prior approval from the Technical Rep.

S09-05-000497 Industrial adhesive bonding shall require a fabrication plan and prior approval from the Technical Rep.

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10.7 Component leak check

S09-05- 000498

The subcontractor may inspect the component for bucking or plastic deformation when under vacuum.

S09-05- 000499

The subcontractor should perform an intermediate He Leak check of the component before final assembly.

S09-05- 000500 The Helium leak check criteria shall be the same as §14.4.

10.8 Marking

ID NUM Specification

S09-05-000501 The subcontractor shall scribe or laser etch part number and serial number onto the outside of the chamber. Other marking methods shall requires prior approval by the Technical Rep.

11 FINAL CLEANING AND PACKING

11.1 Intent

ID NUM Specification S09-05- 000502

Once the final cleaning process has started, it shall continue without interruption until complete.

S09-05-000503 After the final cleaning, all subsequent operations shall be performed in a cleanroom.

11.2 Final cleaning

ID NUM Specification S09-05- 000504

The subcontractor shall use requirements given in §9 to perform the final cleaning.

11.3 Electro-Polishing

ID NUM Specification

S09-05-000505 If electro-polishing is employed, it is critical that external cracks and joints shall be thoroughly flushed and cleaned afterwards.

S09-05- 000506

Evidence of corrosion from electro-polishing residues shall result in the rejection of the component, because joint or sealing failure may eventually occur.

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S09-05-000507 The subcontractor shall perform a complete cleaning of the part electro-polished.

11.4 Vacuum Furnace Degassing

ID NUM Specification S09-05-000508 Furnace shall be oil-free.

S09-05-000509 Pumps shall be oil-free.

S09-05-000510 Furnace shall be capable of achieving a base pressure of 1x10-7 torr.

S09-05-000511 The temperature of the furnace shall not exceed 250°C for stainless steel.

S09-05-000512 The temperature of the furnace shall not exceed 250°C for copper.

S09-05-000513 The temperature of the furnace shall not exceed 150°C for Aluminum.

S09-05-000514 If COTS have a lower thermal limit than stated above, the lower thermal limit shall be adhered to.

S09-05-000515 Unless otherwise specified, ramp temperature shall be no higher than 60°C per hour.

S09-05-000516 Unless otherwise specified, dwell time shall have a minimum of 12 hours.

S09-05-000517 The partial pressure shall be 1x10-3 Torr or lower before initiating bakeout.

S09-05-000518 At the conclusion of degassing, the furnace shall be vented in a controlled way with HPN2 such that 60°C per hour is not exceeded.

11.5 Stress Relief Annealing (Vacuum Firing)

ID NUM Specification S09-05-000519 Heat treatment data shall be available upon request.

S09-05- 000520 Material certification shall be available upon request.

S09-05-000521 Furnace shall be oil-free.

S09-05-000522 Pumps shall be oil-free.

S09-05-000523 Furnace shall be capable of achieving a base pressure of 1x10-7 torr.

S09-05-000524 Unless otherwise specified, treatment shall consist of two hours at 900 °C to 1000 °C (1650°F to 1830°F)

S09-05-000525 Furnace shall be cooled with an inert gas.

S09-05-000526 The part shall not have any evidence of oxidative discoloration.

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11.6 Packing

S09-05-000527 Prior to packaging for storage or shipment, component shall be free of particles under bright light visual inspection.

S09-05-000528 Component shall be completely dry prior to bagging.

S09-05-000530 Cosmetic corrosion caused by improper storage may be cause for rejection of the part and/or rework.

12 COMPONENT INSPECTION

ID NUM Specification

S09-05-000531 Prior to initiating final assembly, the subcontractor shall complete template given in §16.1

13 FINAL ASSEMBLY

ID NUM Specification

S09-05-000532 The final assembly shall take place in a clean area as described in 7.2.

S09-05-000533 Knife edge shall be protected from damage.

S09-05-000534 Knife edge shall be covered with cleanroom foil and plastic flange cover cap.

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14 BAKE AND QUALITY ASSURANCE

The Figure 14-1 gives a typical layout of bench test to perform the final test of the UHV components before delivery to LBNL.

Figure 14-1: Typical bake and quality assurance test set up

S09-05-000535 During pumping down of the part, all connection above the turbo pump shall be all-metal

S09-05-000536 The HPN2 port shall be all-metal

S09-05-000537 The HPN2 port shall be a VCR to CF16 adapter that is replaced with a CF16 blank as the last connection to the chamber prior to shipping.

S09-05-000538 LBNL shall have right to visit the subcontractor during the phase of the final test

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14.1 Bakeout

S09-05-000539 Unless otherwise specified, components shall be baked at 170°C ± 20°.

S09-05-000540 Unless otherwise specified, the temperature shall be maintained for a minimum of 72 hours.

S09-05-000541 The turbo pump shall be oil-free.

S09-05-000542 The rough pump shall be oil-free.

S09-05-000543 Unless otherwise prescribed, the ± 20°C tolerance shall be fully respected to ensure that all UHV surface achieve at least 150°C.

S09-05-000544 The thermal ramp rate shall be 25°C / hour at maximum.

S09-05-000545 The thermal ramp rate shall be respected for heating up and cooling down.

S09-05-000546 Thermocouple shall be used to control the temperature.

S09-05-000547 Two thermocouples per heating zone shall be used (zones will be defined in work instructions or with approval of the Technical rep).

S09-05-000548 Temperature history of each zone (with two thermocouple) shall be recorded.

S09-05-000549 The bakeout shall be coordinated with RGA.

S09-05-000550 The subcontractor shall provide a bakeout plan.

S09-05-000551 Bakeout data shall be recorded with template in §16.2.

S09-05-000552 Bakeout data shall be available for LBNL upon request.

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14.2 Residual Gas Analysis

S09-05-000553 A residual Gas analyzer scan shall be performed three (3) times during the bakeout.

S09-05-000554 The RGA shall be done prior initiating bakeout, during dwell time and at room temperature.

S09-05-000555 The RGA instrument shall have a detection limit of 5x10-12 torr.

S09-05-000556 Each scan shall be captured in analog mode from 1 to 100 AMU.

S09-05-000557 Each scan shall show the full range of the peaks in log scale.

S09-05-000558 Each scan shall be digitally archived and transmitted to the Technical Rep. for review.

S09-05-000559 RGA instrument and scan data shall be recorded with template in §16.3 and §16.4.

S09-05- 000560

The criteria for RGA acceptance shall be:

• With the chamber baked and at room temperature, all mass peaks higher than 44 shall be no more than 1/1,000th of total pressure.

• Partial pressure of Mass 18 shall be less than Mass 2.

• Partial pressure of Mass 69 shall be less than 1/2,000th of total pressure.

• Partial pressure of Mass 14 shall be less than Mass 18.

14.3 Outgassing measurement

ID NUM Specification

S09-05-000561 The outgassing measurement shall be performed with the method of rate of rise method.

S09-05-000562 The data shall be recorded with template in 16.5.

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14.4 Final Leak Test

S09-05-000563 A final leak test shall be performed after bakeout and RGA process.

S09-05-000564 The final leak test shall be at room temperature.

S09-05-000565 The rough pump shall be oil-free.

S09-05-000566 The turbo pump shall be oil-free.

S09-05-000567 The chamber shall be pump down below 1.0x10-4 Torr before leak checking.

S09-05-000568 The HMSLD (Leak detector) shall have an ultimate sensitivity of at least 5x10-12 torr-liters/sec.

S09-05-000569 Unless otherwise specified, the maximum allowable leak rate shall be 1x10-10 torr-liters/sec.

S09-05-000570 If a helium bagging leak check method is necessary, the leak rate shall be measured when immersed in a mixture of air and helium for at least 60 seconds.

S09-05-000571 If a helium bagging leak check method is necessary, the fraction of helium in this mix shall be at least 25%.

S09-05-000573 if a bagged enclosure cannot be done, leak detection shall be done in trace probe mode.

S09-05-000574 The data shall be recorded with template in §16.7.

14.5 Final Pressure Measurement

S09-05-000575 A final pressure measurement shall be performed prior to backfill.

S09-05-000576 The final pressure measurement shall be at room temperature.

S09-05-000577 The data shall be recorded with template in §16.7.

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14.6 HPN2 Backfill

S09-05- 000578 The chamber shall be shipped in vacuum sealed condition.

S09-05- 000579 The vacuum volume shall be at or near atmospheric pressure.

S09-05- 000580 The chamber shall be filled with HPN2.

S09-05- 000581 HPN2 port shall be sealed with a clean CF 16.

S09-05- 000582

The sealing shall be a metal gasket unless otherwise stated or agreed with the Technical Rep.

S09-05- 000583 The data shall be recorded with template in §16.8.

15 SHIPPING

ID NUM Specification

S09-05-000584 Chambers shipped with exposed knife edges shall be shipped with the flange faces covered in cleanroom foil and then covered with CF plastic caps.

S09-05-000585 The sealed chamber shall be properly bagged, secured and packaged to maintain cleanliness, and prevent damage and contamination during transit by commercial carriers.

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16 FACTORY ACCEPTANCE TEST VACUUM DATA TEMPLATES

16.1 Visual & Mechanical Inspection

Table 16-1: Visual & Mechanical Inspection

Criteria Comments Pass /Fail

LBNL Part number

LBNL Serial Number

LBNL Purchase order number

LBNL Part and serial number are inscribed on chamber (Y/N)

Trade name of cleaner(s) used for part and component cleaning

Flange knife-edges are completely smooth and interruption-free when examined by lightly running an ethanol-wetted rubber cleanroom gloved finger around them.

General appearance of untreated weld areas is bright, shiny, clean, and free of spotting

Cleanroom wipes wetted with electronic grade ethanol do not yield debris or particles, or discoloration of the wipes.

Internal welds are visually free of cracks, porosity and inclusions under bright light inspection.

Threaded holes inspected with an electronic grade alcohol-soaked cleanroom swab do not yield particles or discoloration.

All fasteners in contact with stainless steel are silver-plated.

Additional Comments

Inspector Name and Initials

Date and Time

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16.2 Bakeout Data

Table 16-2: Bakeout Data

Description Target Value Actual Value

Start Date and Time

Number of Bake Zones

Thermocouple locations adequate? (Y/N)

Target Temperature 170°C ± 20°C

Ramp Rate 25°C/hour

Dwell Time 72 hour

Maximum Pressure during bake (torr) 1x10-4

Target Temperatures within tolerance (Y/N)

Pressure at end of Dwell Time (torr]

Pressure after cool-down, <30°C

End Date and Time

Operator name and Initials

Table 16-3: Example histogram for a two-zone Bake

Date Time Temp 1 Temp 2 Pressure 1 Pressure 2

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16.3 RGA Instrument Data

Table 16-4: RGA Instrument Data

RGA Instrument Data

RGA Model

Detection Limit (torr)

Are there elastomers in UHV surfaces above turbo pump? (Y/N)

RGA is operated Electron Multiplier Mode? (Y/N)

16.4 RGA Scan Data

For each of the three scans the following data shall be recorded. Prior to the last scan, ensure the RGA filament has been degassed.

Table 16-5 : RGA scan data

RGA scan data

Description Value

Scan No. (1,2 or 3)

Date & Time

Chamber Temperature (°C)

Room Temperature (°C)

Electron Energy (V)

Ion Energy (eV)

Ion Current

Electron Emission Current (mA)

Total RGA Pressure (torr)

Gauge Pressure (torr)

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PP (Partial Pressure) of Mass 2 (torr)

PP Mass 14 - N (torr)

PP Mass 16 - O (torr)

PP Mass 18 - H2O (torr)

Highest Peak between Mass 45 and Mass 100 (torr)

Above < Total RGA Pressure / 1000 (Y/N)

PP Mass 69 - Fluorocarbon (torr)

Above < Total RGA Pressure / 2000 (Y/N)

PP Mass 18 < Mass 2 (Y/N)

PP Mass 14 < Mass 18 (Y/N)

Unit passes test criteria (Y/N)

Operator name and initials

16.5 Outgassing Data

Table 16-6 : Outgassing data

Description Values / Comments Initial Base Pressure (torr) Final Base Pressure (torr) Time Interval (HH:MM) Chamber Temperature °C Chamber Volume (liters) Model of Isolation Valve used Is Vacuum region free of Elastomers? If not, specify Operator name and initial

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16.6 Leak Test Results

Table 16-7: Leak test results

Description Value

Date & Time of test

HMSLD Manufacturer (Name)

Model Number

HMSLD Sensitivity (torr-liters/sec)

Is HMSLD Downstream of Turbo? (Y/N)

System Base Pressure (torr)

Ground Noise at test start (torr-liters/sec)

Was component bagged during gross leak check? (Y/N)

Approx. Percentage of He in Bag (%)

Maximum Measured Leak (torr-liters/sec)

Helium Soak Time (sec)

Maximum Allowed Leak Rate (torr-liters /sec)

5x10-10 torr/s

Is a discrete Helium reference leak attached to the system? (Y/N)

Year of last calibration of helium reference leak (YYYY)

Calibration value of helium reference leak (torr-liters /s)

Measured value of helium reference leak (torr-liters/sec)

Temperature of test Area (°C)

Operator name / initials

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16.7 Final Pressure Measurement

Table 16-8 : Final Pressure Measurement

Final Pressure Measurement

System Temperature (°C)

Measured Pressure (torr)

Type of Gauge

Combined speed of pumps (L/s)

16.8 HPN2 Backfill

Table 16-9 : HPN2 Backfill

HPN2 Backfill

Is the unit hermetically sealed? (Y/N)

Were UHV surfaces exposed to room air after Bake? (Y/N)

Was unit vented to HPN2? (Y/N)

Operator Name & initials

8.4 Additive Manufacturing