Statement of Work_Draft.pdf

STATEMENT OF WORK

Title: Electrical Performance Monitoring System

I. BACKGROUND INFORMATION

The National Institute of Standards and Technology (NIST) Infrastructure and Materials Group within the Engineering Laboratory is seeking an electrical analyzer and current-stress system to conduct in-situ electrical performance monitoring of advanced packaging interposer test vehicles during multi-stress accelerated reliability testing. This work is in support of the CHIPS Metrology program, specifically Grand Challenge 3, Project 10 - Reliability Testing and Modeling for Advanced Packaging.

The CHIPS Metrology program develops and advances cutting edge metrology capabilities for members of the US semiconductor manufacturing ecosystem. This NIST conducted research program works with device manufacturers, tool vendors, materials suppliers, and other organizations to address critical metrology gaps to spur innovation within seven grand challenge areas. For more information on CHIPS Metrology, please visit https://www.nist.gov/chips/research-development-programs/metrology-program.

II. PURPOSE

The purpose of this requirement is to acquire an electrical performance monitoring system capable of generating time-resolved data necessary to populate an open-source physical property database. This system will support NIST research related to reliability of advanced packaging in heterogeneously integrated semiconductor devices. This capability directly supports the CHIPS R&D Metrology Program’s Grand Challenge focused on long-term aging studies of integrating components in advanced packaging. By providing the semiconductor industry with an accurate material property database of polymeric packaging components throughout long-term aging and a new, more accurate reliability model, long-term reliability design efficiency (both time and cost savings) will be greatly improved.

Objective: This project requires a specialized system to provide controlled, accurate current for multiple test vehicles for in-situ resistance measurements during multi-stress accelerated aging tests. The system shall enable detection of failure initiation and collection of real-time degradation data necessary to characterize aging behavior in heterogeneously integrated devices. By supporting the capture of real-time resistance change data, the project aims to improve the accuracy of lifetime prediction models and support the objectives of the CHIPS Metrology Program Grand Challenge 3.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a commercially available electrical performance monitoring system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components is not acceptable. All line https://www.nist.gov/chips/research-development-programs/metrology-program

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Line Item 0001:

Description: Electrical Performance Monitoring System Quantity: 1

A. Technical Specifications

a. Configuration

i. Complete modular DC current-stress/electrical analyzer system suitable for rack or bench operation.

ii. Minimum of 8 independently programmable DC source output channels

1. Each output channel shall be independently programmable for current, voltage, compliance limits, output state, and fault response.

2. This can include multiple multi-channel mainframes (not to exceed 4).

3. Each channel shall support constant-current and constant-voltage operation

iii. System must be suitable for continuous, long-duration operation with test vehicles.

iv. Must include all required mainframes, source modules, standard power cords, control interfaces, factory calibration, software licenses needed for operation, and standard documentation.

b. Applied current capability

i. Minimum DC current capability per channel: 0 A to at least +3 A continuous.

ii. System must support stable constant-current operation.

iii. Current programming accuracy shall be <= 0.05 % of setpoint plus <= 500 uA. Specify current accuracy.

iv. Specify current programming resolution and accuracy.

v. System must support continuous DC current stressing for electromigration studies and allow automated current ramping or step changes through software control.

c. Applied potential, power, and sensing capability

i. Minimum voltage compliance capability of 50 V per channel

ii. Minimum output power capability of 100 W per channel

iii. Each channel must support four-wire remote sense for low-resistance test structures.

iv. Specify voltage programming resolution and accuracy.

d. In-situ monitoring and external measurement integration

i. System must support integration with an existing switch/multiplexer-based digital data acquisition system for time-resolved voltage, resistance, current-shunt, and temperature monitoring.

ii. System must support use of user-provided external 4-terminal precision current shunts in series with each independently stressed daisy-chain channel for independent actual-current verification.

e. Samples

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i. System will be used to measure electronic performance of solder joints (ubump (45 um diameter), TSV, C4 bump (100 um diameter)) used in 2.5D semiconductor devices.

ii. Samples will be located in external environmental chambers or laboratory ovens with chamber feedthroughs.

iii. Maximum intended current density is approximately 2.0 x 104 A/cm2

f. Safety, isolation, and protection

i. Each channel must provide hardware output disconnect relays or equivalent hardware isolation of force and sense leads during output-off, fault, or emergency shutdown conditions.

ii. A failure or shutdown on one channel must not require shutdown of all other independent channels during a multi-channel test unless commanded by the user or required by a safety interlock.

g. Software

i. Multiuser system

ii. Software must support long-duration automated current-stress test setup, channel control, voltage/current readback, limit configuration, fault logging, and time-stamped data export.

h. Data storage

i. Provide details of data storage capability and file output.

IV. SCHEDULE OF DELIVERABLES

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 Electrical

Performance Monitoring System

No later than 5 months after receipt of order.

NIST (Gaithersburg)

V. DELIVERY TERMS

Delivery shall be F.O.B. Destination (or equivalent Incoterms, such as Delivered Duty Paid (DDP)) and shall be made in accordance with the delivery schedule specified in this Statement of Work. The Contractor shall be responsible for packaging, handling, shipping, transportation, and delivery of all items to the delivery location specified in the contract. The Contractor shall bear the risk of loss or damage to the supplies until they are delivered and accepted by the Government.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O/ Ashlee Aiello/ Building 226

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VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance provisions of FAR 52.212-4, the Government reserves the right to inspect and test the delivered system to verify compliance with the requirements of this Statement of Work. Any testing performed by the Government will be conducted in the environment in which the system is intended to operate. The Contractor may be present during such testing at its own expense.

Performance Test

1. Verify that the system powers on, initializes properly, and operates in accordance with the manufacturer's published specifications and the requirements of this Statement of Work.

The Government may waive all or part of the performance testing at its discretion.

A visual inspection of the delivered equipment will be performed by the NIST Technical Point of Contact (TPOC) to identify any visible defects, shipping damage, or other nonconformities.

The Government reserves the right to inspect and test the delivered equipment to verify compliance with the requirements of this Statement of Work and the Contractor's quoted specifications. Inspection and testing may include verification that all required hardware, software, accessories, documentation, and licenses have been delivered and that the equipment operates in accordance with the manufacturer's published specifications.

The Government may reject any supplies that are damaged, defective, or otherwise fail to conform to contract requirements. The Contractor shall repair or replace any rejected supplies at no additional cost to the Government in accordance with the terms and conditions of the contract.

Unless otherwise specified, the Government will inspect and accept or reject the equipment within thirty (30) calendar days after delivery. Acceptance shall occur upon the Government's determination that the equipment conforms to the requirements of the contract.

VII. WARRANTY

The Contractor shall provide a warranty for the entire system for a minimum period of twelve

(12) months after Government acceptance. The warranty shall be provided in accordance with FAR 52.212-4 and shall begin on the date of Government acceptance.

At a minimum, the warranty shall cover defects in materials and workmanship that adversely affect the performance, operation, or functionality of the system under normal use. Warranty coverage shall include repair or replacement of defective components at no additional cost to the Government.

The warranty shall, at a minimum, include:

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1. Defects in materials or workmanship, including structural, operational, or functional defects that prevent the system from performing in accordance with the manufacturer's published specifications and the requirements of this contract.

VIII. PAYMENT SCHEDULE

The Contractor shall submit one invoice for the full amount as detailed in resultant purchase order, after delivery, installation and Government acceptance. Payment will be issued in accordance with the Prompt Payment Act upon submission of a proper invoice

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.