Statement of Work.docx

STATEMENT OF WORK

X-ray Photoelectron Spectroscopy (XPS) System

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps, the U.S. Department of Commerce, National Institute of Standards and Technology (NIST) will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing. NIST’s CHIPS Metrology program is tasked with assisting industry by creating new measurement capabilities that enable the development of next generation devices and help manufacturers with metrology solutions that improve the yield of manufacturing processes.

NIST’s Material Measurement Laboratory’s Materials Measurement Science Division, in conjunction with the Material Science & Engineering Division and Physical Measurement Laboratory’s Nanoscale Device Characterization Division, requires a system for X-ray Photoelectron Spectroscopy along with numerous additional tools to support research related to the CHIPS Metrology Program. This tool will be employed to support priorities in the CHIPS Metrology program including: evaluate surface composition, chemical composition, and buried interfaces (depths up to 30 nm) as it relates to needed standard materials in the Nanometer-scale Planar Reference Materials project; probing the chemical properties of the films, surfaces, and interfaces as a function of processing in the Metrology of Materials, Surfaces and Processes for Hybrid-advanced Packaging program as well as understanding materials electronic (band) structure; and to better understand the surface chemistry metrology related to the Electrodeposition for Interconnect Materials and Packaging project, as well as many other projects.

To advance and enhance NIST capabilities, small area XPS imaging and Hard X-ray Photoelectron Spectroscopy (HAXPES) capabilities are required in the new system. The HAXPES capability requires a hard x-ray photon source of at least 5.4 keV so that buried, bonded interfaces of 20 nm and greater can be probed and analyzed. Small area spectroscopy with high signal to noise ratios as well as XPS imaging is also required. Ion milling capabilities that include minimally destructive cleaning through use of gas cluster ion beam (GCIB) is required to quantify the elemental composition and minimally modify the chemical composition of the surface. Further capabilities to evaluate the electronic structure and modify the surface composition, in-situ, are also required. This purchase will bolster NIST’s existing capabilities and support continued efforts in surface chemical analysis related to the CHIPS Metrology program as well as in future projects and programs.

II. PURPOSE

The contractor is responsible for delivering, installing and validating performance on a new X-ray photoelectron spectroscopy (XPS) system, providing training on the system, providing a standard commercial warranty on all hardware and software components, and providing standard, commercially available maintenance and support services for Contract Line Item Number (CLIN) 0001.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all minimum specifications identified below. All items must be new. The contractor may not provide “gray market” components. All CLIN’s shall be shipped in the original equipment manufacturer’s packaging and include all original documentation and software, when applicable.

CLIN 0001:

Description: X-ray Photoelectron Spectroscopy (XPS) System Quantity: 1

1. The contractor shall provide, install, and train NIST staff on a system that includes:

1.1. An Ultra High Vacuum (UHV) System

1.1.1. The contractor shall provide a UHV analysis chamber capable of attaching all components listed in sections 1.4-1.10, 1.12 to conduct all measurements performed on a common stage described in 1.3. It shall also have the following components/equipped:

1.1.1.1. Dedicated vacuum pumping system capable of achieving a base pressure in the UHV System (P1.1 base) of < 2 x 10-7 Pa.

1.1.1.2. Leaded glass on any available observation windows

1.1.1.3. One or more vacuum gauges to monitor the chamber pressure, from atmospheric pressure down to <<1 x 10-7 Pascal (Pa).

1.1.1.4. Be equipped for bakeout to be controlled from software interface.

1.1.1.5. All required pneumatic and mechanical valves required to isolate the system from external conditions.

1.2. Sample Entry / Manipulation / Automation / Visualization

1.2.1. The contractor shall provide at a sample load-lock, or sample entry chamber(s) capable of pumping down sample holders from atmospheric to P1.2 base < 2 x 10-6 Pa prior to introduction to the UHV analysis chamber. This shall include the following:

1.2.1.1. Automatic valves to separate the load lock from the UHV analysis chamber

1.2.1.2. A door to be opened/closed capable of rapidly loading sample holders.

1.2.1.3. Dedicated vacuum pumps necessary to achieve high vacuum Pbase <2 x 10-6 Pa) before entering the main chamber

1.2.1.4. A mounting block designed to retain sample holders while being pumped down

1.2.1.5. All necessary tools to properly load samples into the load lock for pump down.

1.2.1.6. One or more vacuum gauges to monitor the chamber pressure, from atmospheric pressure down to <<1 x 10-6 Pa.

1.2.2. The contractor shall provide all needed vacuum compatible components needed to visually observe or provide live optical images/video of the sample within the load lock and as it pumps down and transfers to the main chamber.

1.2.3. The contractor shall provide a system that automatically transfers the sample holders, once pumped down to a base pressure, to the main chamber.

1.3. Sample Stage/Specimen holders/in-situ specimen holder storage.

1.3.1. The contractor shall provide a sample stage fully controllable through the software with capabilities for translation (x, y) and height (z) where the z-axis relates to the vector of photoelectron acceptance into the analyzer. The stage shall also have a rotational axis of movement.

1.3.1.1. The contractor shall also ensure that angle resolved measurements may be performed.

1.3.2. The contractor shall provide all sample holders necessary to ensure that all operations of the instrument are possible and to meet the scientific needs. This includes, but is not limited to:

1.3.2.1. At least five specimen holders, 80 mm x 80 mm.

1.3.2.2. At least two smaller specimen holders (40 mm x 40 mm)

1.3.2.3. Any special specimen holders necessary to enable angle resolved XPS

1.3.2.4. Any special specimen holders necessary to enable depth profiling with rotation

1.3.2.5. Three large specimen holders to be used in conjunction with the auxiliary chamber/transfer vessels outlined in section 1.14.

1.3.3. The contractor shall ensure that at least three specimen holders may be stored in the UHV chamber outlined in section 1.1 while another specimen holder is on the stage

1.4. Primary X-ray source for traditional XPS

1.4.1. The contractor shall provide a monochromatic aluminum (Al) K-alpha X-ray source with a tunable spot-size diameter (commonly referred to as microfocused). This shall include an x-ray source, a monochromator, and any other components necessary to achieve this end. Further requirements include:

1.4.1.1. The monochromated Al K-alpha x-ray source spot size shall be tunable down to a spot diameter (d) of d < 100 micrometers. In the presence of the Contracting Officer’s Representative (COR) or designee at NIST, the contractor shall use standard protocols as noted in Section VIII to verify that this requirement is satisfied.

1.4.1.1.1. Note: Quotation evaluation credit may be given for monochromated Al K-alpha x-ray source spot diameters of d < 5 micrometers

1.4.1.2. The monochromated Al K-alpha x-ray source spot shall be able to raster across larger areas (100’s of micrometers – millimeter(s))

1.4.1.3. The monochromated Al K-alpha x-ray source anode shall have at least four positions from which to generate x-rays from on any given anode. These shall be in preprogrammed spots with all relevant geometries and alignments optimized for each spot.

1.4.1.4. Transfer between spots on an anode or from another anode shall be automatically done by selecting an option through the software.

1.5. HAXPES x-ray source requirements

1.5.1. The contractor shall provide a monochromatic chromium (Cr) K-alpha x-ray source with a tunable spot-size diameter or a monochromated x-ray source characterized by energies > 5.4 keV with a tunable spot-size diameter, henceforth referred to as the “HAXPES source”. This shall include an x-ray source, a monochromator and any other components necessary to achieve this end. Further requirements include:

1.5.1.1. The HAXPES source spot size shall be tunable down to < 100 micrometer diameter spot. In the presence of the COR or designee at NIST, the contractor shall use standard protocols as noted in Section VIII to verify that this requirement is satisfied.

1.5.1.1.1. Note: Quotation evaluation credit may be be given for a HAXPES source spot diameters of d < 15 micrometers

1.5.1.2. The HAXPES source spot shall be able to raster across larger areas (100’s of micrometers – millimeter(s))

1.5.1.3. The HAXPES source anode shall have at multiple positions from which to generate x-rays from on any given anode. These shall be in preprogrammed spots with all relevant geometries and alignments optimized for each spot.

1.5.1.4. Transfer to between spots on an anode or from another anode shall be automatically done by selecting an option through the software.

1.6. Lens/Analyzer/detector specifications using monochromated Al K-alpha X-rays.

1.6.1. The acceptance angle shall be nominally wide to ensure maximized signal.

1.6.1.1. In the case of Angle resolved XPS, the contractor shall provide an additional narrow acceptance angle aperture (±5°) that is controlled through the software.

1.6.2. The contractor shall provide a lens/analyzer system capable of analyzing electrons from 0 eV - >5500 eV kinetic energy. Furthermore:

1.6.2.1. A hemispherical analyzer shall be employed in fixed analyzer transmission, with a minimum pass energy range of 10 eV - 160 eV

1.6.2.2. In the presence of the COR or designee at NIST, the contractor shall use standard protocols as noted in Section VIII to verify that the following requirement is satisfied: Energy resolution must minimally to achieve the following: FWHMAg 3d5 < 0.48 eV. (FWHMAg 3d5: the Full Width at Half Maximum of the background subtracted Ag 3d5 feature collected from a clean, 100% silver sample).

1.6.3. The contractor shall provide a detector with high-sensitivity. For moderate energy resolution (FWHMAg3d5 < 0.6 eV), this shall be defined as the Ag3d5 peak > 2,000,000 Counts per second (CPS)

1.6.4. Small spot spectroscopy

1.6.4.1. In the presence of the COR or designee at NIST, the contractor shall use standard protocols as noted in Section VIII to verify that this requirement is satisfied: Small spot XPS shall be demonstrated at a spot size of < 100 micrometers.

1.6.4.1.1. Note: Quotation evaluation credit may be given for small spot XPS < 10 micrometers

1.6.4.2. In the presence of the COR or designee at NIST, the contractor shall use standard protocols as noted in Section VIII to verify that this requirement is satisfied: The contractor shall demonstrate that the requirements in 1.6.1 and 1.6.2 are met for spectra acquired at < 100 micrometer spot sizes.

1.6.4.2.1. Note: Quotation evaluation credit may be given for small spot XPS < 10 micrometers that meet requirements in 1.6.1 and 1.6.2

1.6.4.3. The sensitivity, when acquiring small spot spectra at moderate energy resolution (FWHMAg3d5 < 0.6 eV) shall be defined as the Ag3d5 peak > 200,000 CPS

1.7. Energy resolution and detector sensitivity for using monochromated HAXPES source

1.7.1. In the presence of the COR or designee at NIST, the contractor shall use standard protocols as noted in Section VIII to verify that this requirement is satisfied by CLIN 0001: An ultimate energy resolution demonstrated by FWHM Ag 3d5 < 0.85 eV on a clean silver sample as noted in section VIII.

1.7.2. The sensitivity, when large area spectra at low energy resolution (FWHMAg3d5 < 1.0 eV) shall be defined as the Ag3d5 peak > 6,000 CPS

1.8. Imaging XPS

1.8.1. Imaging shall be provided with a spatial resolution of < 100 micrometers

1.8.1.1. Quotation evaluation credit may be given for spatial resolutions of < 5 micrometers.

1.8.2. Stitched imaging functionality.

1.9. Charge neutralization

1.9.1. The contractor shall provide charge neutralization for use on semi conducting and non-conducting specimens. The charge neutralization shall consist of a low energy (approximately 1 eV) electron flood source and low energy argon ions (<10 eV).

1.9.2. It shall be possible to run the neutralizer with or without the argon ions.

1.10. Ion gun requirements

1.10.1. The contractor shall provide a tool attached to the XPS with the following capabilities for ion milling:

1.10.1.1. Monotonic Argon Ion milling up to 5 kV for surface cleaning or depth profiling

1.10.1.2. Gas cluster ion beam (GCIB) capabilities for gentle surface cleaning and limited depth profiling.

1.10.2. The ion milling tool, ion gun, shall be differentially pumped using a dedicated vacuum pumping system. The differential pumping shall be separated by a valve to be closed when not utilized.

1.10.3. The contractor shall provide a tool for measuring cluster size when employing the GCIB capabilities.

1.11. Ultraviolet Photoelectron Spectroscopy (UPS)

1.11.1. The contractor shall provide a light source capable of generating both He I and He II wavelengths.

1.11.2. The contractor shall include a computer controlled pneumatic filter with an aperture for limiting flux of UV light.

1.12. Low Energy Inverse Photoemission Spectroscopy (LEIPS)

1.12.1. Shall include a low energy electron source with tunable electron kinetic energy

1.12.2. Low energy electron source shall be minimally tunable between 0 eV and 4 eV;

1.12.3. Shall include a photon detector

1.12.4. Optical filters for the photon detector shall include 214 nm, 260 nm, 280 nm, 340 nm,

1.12.5. Overall LEIPS system shall have minimum energy resolution of 0.5 eV or better

1.13. Interlocks and x-ray shielding

1.13.1. The contractor shall provide interlocks to ensure that the entire system is protected from improper use which would risk the safety of the system and/or the user. This shall include but not be limited to pressure differential interlocks, electrical interlocks, water flow interlocks, and valve configuration interlocks.

1.13.1.1. Any/all password protected interlock overrides shall be provided to the COR by the contractor upon completion of installation and training.

1.14. Auxiliary chambers/transfer vessels

1.14.1. The contractor shall provide two transfer vessels, each individually capable of transferring the samples from high vacuum conditions to laboratories. This shall include:

1.14.1.1. Three 60 mm diameter sample holders compatible with the transfer vessel

1.14.1.2. The transfer vessel shall be useable in both high vacuum environments as well as other environments (e.g. glove boxes)

1.14.2. The contractor shall provide an independently pumped, auxiliary chamber attached to the main. It shall include the following:

1.14.2.1. A valve to separate the auxiliary chamber from the UHV analysis chamber.

1.14.2.2. A transfer mechanism to take specimen holders from the auxiliary chamber past the valve and into the analysis chamber.

1.14.2.3. All modifications to the ensure that the UHV analysis chamber can receive specimen holders from the Auxiliary chamber. Once in the UHV analysis chamber, the specimen holder must be compatible with the software-controlled automation.

1.14.2.4. Vacuum pumps necessary to achieve a P1.14 base < 2 x 10-6 Pa.

1.14.2.5. Vacuum gauge(s) necessary to monitor from atmospheric pressure to << 10-6 Pa.

1.14.2.6. In addition to all required ports 1.14.2.1 – 1.14.2.6, there shall be:

1.14.2.6.1. A conflat (CF) 2 ¾” vacuum port to attach to a NIST supplied, vacuum processing system (e.g. Plasma)

1.14.2.6.2. A mounting apparatus to allow the entry of samples both from the transfer vessel and more traditional sample loading.

1.14.2.6.3. At least one window to be able to observe the movement of the sample within the auxiliary chamber, either visually or by optical camera.

1.15. Pump specifications –oil vs scroll/dry pumps

1.15.1. Pumping shall be achieved using pumps capable of achieving a base pressure of 10-7 Pa within the XPS analysis chamber

1.15.2. UHV analysis Chamber: dry scroll pump

1.15.3. Ion gun differential pumping: dry scroll pump

1.15.4. Load lock: dry scroll pump and turbomolecular pump

1.15.5. Auxiliary chamber: dry/scroll pumps

1.16. Closed loop chiller

1.16.1. The contractor shall provide one closed loop, air cooled, water chiller that supplies all water cooling necessary to run the equipment at or beyond the required water pressures.

1.16.2. The contractor shall provide all necessary filters and deionizing cartridges required to operate the chiller for 1 year.

1.17. Hardware/Software/IT requirements/Electronics

1.17.1. The contractor shall provide all electronics necessary to operate the XPS system and all attached tools and chambers

1.17.2. The contractor shall provide all hardware necessary to interface with the XPS system and all attached tools and load lock chamber with a Windows based computer. The computer shall be capable of connection via ethernet.

1.17.3. The contractor shall provide all software necessary to operate the computer, the XPS system as well as attached tools, and to transfer data files from proprietary contractor file format to files useable by third party software (e.g., .vms, .csv, .txt). This shall also include:

1.17.3.1. Software capable of automatically correcting for changes in x-ray beam position (on the order of 10’s of micrometers) over hours of unattended data collection.

1.17.3.2. Software capable of data reduction; 2 software licenses are required.

1.17.3.3. Software capable of estimation of thin film stacks; 2 licenses required.

1.17.3.4. The contractor shall provide updates to the software if/as they become available during the warranty period (assuming such updates are included in the warranty).

1.18. Data/calibrations/sensitivity factors

1.18.1. The contractor shall ensure that all collected XPS and HAXPES data is either saved in a .vms file format or be convertible/exported to the .vms file type by contractor supplied software.

1.18.2. The contractor shall ensure that all necessary calibrations and corrections are available for use by NIST staff. This shall include:

1.18.2.1. Experimentally derived transmission function (TF) data for the entire analyzer range that may be exported for use in 3rd party software.

1.18.2.2. Separate sets of relative sensitivity factors (rsf) calculated for the monochromatic Al and monochromatic Cr x-ray sources specific to the instrument supplied. The actual rsf value for a given element/line/x-ray source combination shall be made available in either tabular format or when using the contractor supplied software described in 1.17.3.

1.18.2.3. The contractor shall provide access to all data collected to calibrate/validate the function of the XPS system and all of its attached measurement tools

1.18.3. The contractor shall provide a tool with automatic tuning for the X-ray source, energy analyzer, and ion gun for optimizing performance

1.19. Training and Standard Commercial Warranty (See Sections VII Training and IX Warranty below).

CLIN 0002:

Description: 1st year of service contract for XPS system Quantity: 1

1. Contractor shall provide services starting 1 year after acceptance of the instrument and continue for 1 full year.

1.1. The services shall include standard commercial maintenance and support that are provided in the marketplace for CLIN 0001 that include, but are not limited to:

1.1.1. Replacement or repair of all hardware components

1.1.2. Replacement of all failed consumables (e.g. filaments, multipliers, anodes, etc)

1.1.3. Replacement or repair of all vacuum components (e.g. vacuum pumps, gauges, chambers, etc)

1.1.4. Replacement or repair of all electronics control boxes used to power and control Line Item 0001

1.1.5. Replacement or repair of all computer systems and software associated with Line Item 0001

1.2. The service contract shall include unlimited on-site emergency visits to support Line Item 0001.

1.2.1. The time to respond to an emergency shall be 1 business day from notification.

1.2.2. The time to appear on-site 2 business days

1.3. The service contract shall include at least one preventative maintenance visit.

CLIN 0003:

Description: Uninterruptible Power Supply Quantity: 1

1. The Contractor shall provide and uninterruptible power supply and battery backup for CLIN 0001. Installation will be conducted separately by NIST.

1.1. The battery backup shall meet the following mimimum specifications:

1.1.1. Battery storage sufficient to power the XPS for at least 60 minutes after power loss at maximum expected load.

1.1.2. Bypass included to separate UPS from battery backup during bakeouts while still providing correct power for the XPS system.

1.2. Standard Commercial Warranty

1.2.1. The contractor shall provide a standard commercial warranty and any related documentation for CLIN 0003 to include but not limited to:

1.2.1.1. Ensure that the battery backup that has at least a 1 year manufacturer’s warranty.

1.2.1.2. If the warranty is from a third party, then the vendor will ensure that all manuals, paperwork, and documentation is provided to NIST upon the battery backup’s delivery.

Option CLIN 1001:

Description: Optional for AES, SED, and REELS Components Quantity: 1 (May be unilaterally exercised by the contracting officer within 11 weeks of contractor acceptance of purchase order).

A. The contractor shall provide an option to enable scanning Auger electron spectroscopy (AES), imaging and related measurements in a manner compatible with CLIN 0001. This shall include the addition of:

1. Electron beam focusable to d<100 nm spot size.

2. Electron beam energy up to 10 kV

3. Any new or upgraded analyzers/detectors required to enable scanning AES and imaging.

4. Any new or upgraded analyzers/detectors necessary to enable secondary electron detection and imaging (SED/SEI).

5. Any new or upgraded analyzers/detectors necessary to enable Reflected Electron Energy Loss Spectroscopy (REELS)

6. Any new or upgraded electronics and hardware necessary to operate scanning AES and imaging; SED/SEI; and REELS on the XPS system.

7. Any new or upgraded software required to operate scanning AES and imaging; SED/SEI; and REELS on the XPS system.

Option CLIN 2001:

Description: Option for 2nd year of service contract for CLIN 0001 Quantity: 1 (May unilaterally be exercised by the contracting officer any time prior to expiration of CLIN 0002) A. Contractor shall provide services starting 2 years after acceptance of the instrument and continue for 1 full year.

B. The services shall include standard commercial maintenance and support that are provided in the marketplace for CLIN 0001 to include, but is not limited to:

a. Replacement or repair of all hardware components

b. Replacement of all failed consumables (e.g. filaments, multipliers, anodes, etc)

c. Replacement or repair of all vacuum components (e.g. vacuum pumps, gauges, chambers, etc)

d. Replacement or repair of all electronics control boxes used to power and control Line Item 0001

e. Replacement or repair of all computer systems and software associated with Line Item 0001 C. The service contract shall include unlimited on-site emergency visits to support Line Item 0001.

a. The time to respond to an emergency shall be 1 business day from notification.

b. The time to appear on-site 2 business days D. The service contract shall include at least one preventative maintenance visit.

Option Line Item 3001:

Description: Option for 3rd year of service contract for CLIN 0001 Quantity: 1 (May unilaterally be exercised by the contracting officer any time prior to expiration of CLIN 2001) A. Contractor shall provide services starting 3 years after acceptance of the instrument and continue for 1 full year.

B. The services shall include standard commercial maintenance and support that are provided in the marketplace for CLIN 0001 to include, but are not limited to:

a. Replacement or repair of all hardware components

b. Replacement of all failed consumables (e.g. filaments, multipliers, anodes, etc)

c. Replacement or repair of all vacuum components (e.g. vacuum pumps, gauges, chambers, etc)

d. Replacement or repair of all electronics control boxes used to power and control Line Item 0001

e. Replacement or repair of all computer systems and software associated with Line Item 0001 C. The service contract shall include unlimited on-site emergency visits to support Line Item 0001.

a. The time to respond to an emergency shall be 1 business day from notification.

b. The time to appear on-site 2 business days D. The service contract shall include at least one preventative maintenance visit.

Option Line Item 4001:

Description: Option 4th year of service contract for CLIN 0001 Quantity: 1 (May unilaterally be exercised by the contracting officer any time prior to expiration of CLIN 3001) A. Contractor shall provide services starting 4 years after acceptance of the instrument and continue for 1 full year.

B. The services shall include standard commercial maintenance and support that are provided in the marketplace for CLIN 0001to include, but is not limited to:

a. Replacement or repair of all hardware components

b. Replacement of all failed consumables (e.g. filaments, multipliers, anodes, etc)

c. Replacement or repair of all vacuum components (e.g. vacuum pumps, gauges, chambers, etc)

d. Replacement or repair of all electronics control boxes used to power and control Line Item 0001

e. Replacement or repair of all computer systems and software associated with Line Item 0001 C. The service contract shall include unlimited on-site emergency visits to support Line Item 0001.

a. The time to respond to an emergency shall be 1 business day from notification.

b. The time to appear on-site 2 business days D. The service contract shall include at least one preventative maintenance visit.

Option Line Item 5001:

Description: Option 5th year of service contract for CLIN 0001 Quantity: 1 (May unilaterally be exercised by the contracting officer any time prior to expiration of CLIN 4001) A. Contractor shall provide services starting 5 years after acceptance of the instrument and continue for 1 full year.

B. The services shall include standard commercial maintenance and support that are provided in the marketplace for CLIN 0001 to include, but is not limited to:

a. Replacement or repair of all hardware components

b. Replacement of all failed consumables (e.g. filaments, multipliers, anodes, etc)

c. Replacement or repair of all vacuum components (e.g. vacuum pumps, gauges, chambers, etc)

d. Replacement or repair of all electronics control boxes used to power and control Line Item 0001

e. Replacement or repair of all computer systems and software associated with Line Item 0001 C. The service contract shall include unlimited on-site emergency visits to support Line Item 0001.

a. The time to respond to an emergency shall be 1 business day from notification.

b. The time to appear on-site 2 business days D. The service contract shall include at least one preventative maintenance visit.

IV. SCHEDULE OF CONTRACTOR DELIVERABLES

Place of Delivery

Standards of Acceptance: The NIST COR or their designee shall inspect all the above deliverables and respond with an indication of acceptance or request for revision email to the Contractor within 10 days of NIST receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

PLACE OF PERFORMANCE

The services shall be performed at NIST Gaithersburg during regular business hours. Regular business hours are Monday through Friday 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and on days of NIST closure.

PERIOD OF PERFORMANCE

The contractor shall deliver and install CLIN 0001 and CLIN 0003 within 46 weeks after contractor acceptance of the purchase order. The contractor shall provide formal analytical training within 6 months of NIST acceptance of CLIN 0001 and CLIN 0003. There shall be a standard commercial warranty that begins on the date of NIST acceptance of CLIN 0001 and CLIN 0003. See option CLIN’s for other potential services and periods of performance.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all CLIN’s to:

U.S. Department of Commerce National Institute of Standards and Technology Attn: Justin Gorham, Building 223 100 Bureau Drive, Building 217/E102 Gaithersburg, MD 20899

VI. INSTALLATION

To ensure the site is properly prepared, the contractor shall inspect the intended installation site no later than 8 weeks after contractor acceptance of the purchase order to evaluate the laboratory space for environmental and other conditions to ensure suitability for CLIN 0001, CLIN 0003 and option CLIN 1001. This laboratory inspection shall include, but not be limited to loading dock and laboratory entrances, electrical sources, gas supplies (air, N2, Ar, He, etc), vibrations, and magnetic fields.

The system shall be installed by the Contractor and meet contract specifications no later than 6 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the delivered system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at Building 217 on the NIST campus in Gaithersburg, Maryland.

VII. TRAINING REQUIREMENTS

Upon completion of installation of CLIN 0001 and CLIN 0003, the contractor shall coordinate and schedule with the COR or their desginee, within 6 months of installation and provide formal, analytical training by a contractor scientist for up to eight NIST staff in analytical operation of the tool. The training shall be in person at NIST Gaithersburg. The contractor shall provide training to at least 1 user at NIST as a requirement on completion of installation on basic, safe operation of CLIN 0001 and CLIN 0003. Subsequently, the contractor shall conduct an analytical training session for up to eight users at NIST on more in-depth use of the CLIN 0001 and CLIN 0003. The training shall provide a 3 day demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The analytical training on the use of CLIN 0001 must be scheduled at least 2 weeks in advance by the contractor by a US citizen. If the training is to be provided by a person without US citizenship, the contractor shall provide at least 6 weeks advance written notice to the COR or designee. The training shall be completed in person at NIST Monday – Friday during the operating hours of 8 am to 5 pm Eastern Time immediately after installation and demonstration of specifications and must be completed no later than 180 days after installation. Further training requirements are identified below:

a. After the COR accepts CLIN 0001 and CLIN 0003 upon successful completion of site acceptance test, the contractor shall train users on the operation and maintenance of the system.

b. The contractor shall provide the initial installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and wall penetrations for the system at the time of award.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in FAR clause 52.212-4, NIST reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated.

Contractor Performance Tests/Contractor Demonstration for CLIN 0001:

1. Demonstrate base pressure of the following chambers

1. Main Analysis chamber less than 2 x 10-7 Pascal (Pa)

2. Auxiliary Chamber equal/less than 2 x 10-6 Pa

3. Introduction/load lock equal/less than 2 x 10-6 Pa

2. Micro focused monochromatic Aluminum K-alpha X-ray source

1. Demonstrate the smallest spot size for a monochromatic Al K-alpha x-ray source as quoted in contractor instrument specification. Provide actual measured size and supporting spectral data.

2. Demonstrate 100 micrometers spot size for a monochromatic Al K-alpha x-ray source without rastering. Provide actual measured size and image/spectral data.

3. Demonstrate automated anode positions and demonstrate that the spec in 2.1. and 2.2. of section VIII can be achieved after moving anode positions through automated procedures.

3. Micro focused monochromatic HAXPES source

1. Demonstrate the smallest spot size for HAXPES source as quoted in contractor instrument specification. Provide actual measured size and image/spectral data.

2. Demonstrate a < 100 micrometer spot size for the HAXPES source described in section 1.5 of CLIN 0001 in section II a monochromatic Cr K-alpha x-ray source. Provide actual measured size and image/spectral data.

3. Demonstrate a 100 micrometers (+/- 10%) spot size for a monochromatic Al K-alpha x-ray source without rastering. Provide actual measured size and image/spectra data.

4. Demonstrate automated anode positions and demonstrate that the spec in 3.1. and 3.2. of section VIII can be achieved after moving anode positions through automated procedures.

4. XPS/HAXPES Energy Resolution

1. Demonstrate, using a monochromatic Al K-alpha x-ray source (spot <10 micrometers), that the full width half maximum of the Ag 3d5 is less than or equal to 0.48 eV (FWHMAg 3d5 < 0.48 eV) using a clean silver foil sample.

a) Note: Quotation evaluation credit may be given for instruments demonstrating this energy resolution at < 10 micrometers spot sizes.

2. Demonstrate, using a monochromatic Cr K-alpha x-ray source, that FWHMAg 3d5 < 0.48 eV using a clean silver foil sample.

5. XPS/HAXPES Detector sensitivity

1. Using a monochromatic Al K-alpha x-ray source on a silver foil sample, demonstrate a Ag3d5 peak > 2,000,000 CPS with FWHMAg3d5 < 0.6 eV

2. Using a monochromatic Cr K-alpha x-ray source (100 micrometer spot) on a silver foil sample, demonstrate a Ag3d5 peak > 10,000 CPS with FWHMAg3d5 < 1.2 eV

6. XPS analyzer range

1. Demonstrate Ag 3d5 spectra at KE > 5047 eV (equivalent to BE = 368.2 eV) on Ag0 sample

7. HAXPES Depth of analysis.

1. Demonstrate ability to measure buried interfaces on a NIST provided approximately by measuring the Si 2p transition on (a) a 20 nm hafnium oxide on silicon sample, and (b) a 30 nm silicon dioxide layer on silicon sample.

2. Demonstrate ability to measure buried interfaces

8. Monotonic ion beam/GCIB Milling capabilities

1. Demonstrate spot size (diameter) of both monotonic ion beam and GCIB milling on tantalum oxide film or an equivalent sample

2. Demonstrate a 1 mm x 1 mm and largest raster size for the monotonic ion beam and GCIB milling through a thin film.

3. For GCIB only, demonstrate the ability to clean surface with minimal damage to the surface chemistry using an oxide surface (e.g. TiO2 on Ti; HfO2 on SiO2. Etc.)

9. UPS/LEIPS Energy Resolution

1. Demonstrate ignition of He I and He II excitation sources

2. Demonstrate energy resolution of UPS system of less than or equal to 100 meV

3. Demonstrate energy resolution of LEIPS system of less than or equal to 0.45 eV

10. Charge Neutralization

1. Using a cleaned polyethylene terephthalate film, neutralize and demonstrate the retention of energy resolution by measuring the Carbon 1s (C 1s) and demonstrating the ester (COO) features FWHM of < 0.85 eV

11. Data export

1. Demonstrate capability to export acquired data from contractor’s format to third party format (e.g., .vms files/CSV files) with the experimentally derived transmission function included or separately transferred.

2. Either provide a table of relative sensitivity factors designed for the XPS system described in section III, line item 0001 (1.18), or demonstrate how values for all RSFs may be read within the supplied software.

12. Calibration data files

1. Provide data files demonstrating that all components of the XPS system meets the contractor’s specification documents and those described in section VIII of this document.

NIST may choose, at its discretion, to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR or designee to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of inspected and accepted products shall transfer to NIST upon acceptance by the Government. The COR or designee will test, inspect, and accept or reject the equipment within 5 business days of the receipt of the equipment unless otherwise indicated above.

IX. WARRANTY

The contractor shall provide a standard commercial warranty the entire system for a period of a minimum of 12 months after acceptance of the equipment and shall be in accordance with terms in FAR 52.212-4. The warranty shall go into effect upon completion of installation, preliminary instruction of tool use, and acceptance criteria being met and signed off by the COR and at a minimum shall include the following:

The warranty shall cover all of the equipment, software, electronics, and other components described in section III, line item 0001 of this document, except for consumables along with section III, optional line item 1001 (if exercised).

X. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, after NIST acceptance of a given CLIN and thereafter upon contractor submission of a proper invoice.

1. 100% upon acceptance by the COR of a fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be considered, unless otherwise requested and approved in writing by the Contracting Officer prior to award. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XI. CYBERSECURITY PRIVACY REQUIREMENTS

NIST requires a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

· System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

· IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

· Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

· Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

· The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

· Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

· Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

· SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the contractor provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the contractor provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

XII. REQUIREMENTS FOR CONTRACTOR PERSONNEL

Safety: Each Contractor person must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus. Contractor personnel will be required to apply for a permanent associate badge through the NIST Associates Information System, or NAIS.

Identification Badges: Contractor personnel must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor personnel must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.

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