Statement of Work.docx
DOCX document 249 KB Posted
- Attached to
- 34ID Si (111) Crystal Optics
- Solicitation number
- 4-B138-Q-00519-00
- Issued by
-
Department of Energy Office of Science
About this file
This document is a Statement of Work for the fabrication of four polished silicon optical components from two precisely oriented silicon blanks supplied by Argonne National Laboratory (ANL). The SOW specifies the required technical specifications for the optics, including dimensions, surface roughness, and slope error tolerances. It outlines the proposed activities to process the blanks into the final optics, as well as the required deliverables, schedule, and special instructions. The SOW is associated with a federal contract opportunity issued by the Department of Energy Office of Science, Solicitation Number 4-B138-Q-00519-00, for the processing of the silicon (111) crystal optics. The optics are required to be delivered within 9 months of award, with a 12-month warranty. Payment terms are net 30 days upon delivery of the final optics.
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Other files
| File | Type | Posted |
|---|---|---|
| RFQ Crystal Optics.doc | DOC document | |
| Evaluation Criteria Crystal Optics.doc | DOC document | |
| Appendix A-71COM-13-FEB-2023 (002).pdf | ||
| APS Quality Assurance Requirements.pdf | ||
| Reps Certs ANL-70B.doc | DOC document | |
| Instructions to Offerors G2-131021.doc | DOC document | |
| Drawing 1001.pdf | ||
| Drawing 1002.pdf |
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Text version
APSU Project SOW Template [Type the date]
34-ID Optical Blanks
Table of Contents
| Scope of Work | 3 |
| Proposed Activities | 3 |
| Deliverables | 3 |
| Cost Estimate | 3 |
| Schedule | 4 |
| Special Instructions | 4 |
| Protection of Materials and Equipment During Shipment | 5 |
| Quality Assurance Requirements | 5 |
| List of Attachments | 5 |
| Revision |
| Date |
| Reason |
| 0 |
| 3/12/2024 |
| Original |
Scope of Work -Receive ANL-supplied two (2) single-crystal silicon rectangular blanks that are precisely oriented and finely ground on the (111) plane. Dimensions for each part are as follows:
102x70x101mm 145x70x30mm Dimensions and identification written on optical surface.
-Process to a flat polish one (111, as marked) surface on each blank for use as a combination multilayer optical surface and crystal diffraction surface.
-"cut out" and machine four (4) optics from the two blanks of dimensions (135mm Length x 25mm Width x 25mm Thick, and 90mm Length x 25mm Width x 95mm Thick( see figs. 1 and 2 below, ANL-154-11-1002 and ANL-154-11-1001) -Drill holes (only for qty two (2) of ANL-154-11-1002) -Isotropically etch all surfaces except the polished surface -All sides chamfered ~0.5mm except ONE short edge (25mm) on all (4) parts, instead chamfer ONE short edge (25mm) minimum to avoid chip propagation -non-optical side opposite minimum chamfer edge to be engraved with a part marking for each optic (1001-1), (1001-2), (1002-1), and (1002-2)
Final optics technical specifications and drawings:
Fig. 1. ANL-153-11-1001 envelope dimensions in mm (qty 2 required). Red line indicates minimum chamfer edge.
Fig 2. ANL-153-11-1002 envelope dimensions in mm (qty 2 required). Red line indicates minimum chamfer edge.
-Maintain polished optical surface plane coplanarity to original ground-oriented surface to within +/-0.01 degrees -non-optical surface etching should be minimal to maintain ~0.03mm flatness -Polished Zone (PZ) part 154-11-1001: 90mm Length x 25mm Width minus edge bevels -Clear Aperture (CA) part 154-11-1001: 80mm (Best-Effort of 90mm) Length x 15mm (20mm Best-Effort) Width, centered -Polished Zone (PZ) part ANL-154-11-1002: 135mm Length x 25mm Width minus edge bevels -Clear Aperture (CA) part 154-11-1002: 90mm Length x 15mm (20mm Best-Effort) Width, centered
| -Tangential Slope Error: 0.20μr RMS on CA with >10km radius removed at 2mm spatial resolution with optical metrology. Measured with surface under test placed perpendicular to ground to eliminate gravity sag. |
| -Sagittal Slope Error: No specification |
| -Roughness: Shall be 1Å RMS or below, as measured at three evenly distributed points along the tangential centerline on CA, with 1micrometer or below spatial resolution optical metrology |
Proposed Activities
Control depth of each grit size used in the process to minimize subsurface damage.
Deliverables
1. Qty (4) polished optics meeting the technical requirements above
2. Metrology report for each optic.
Schedule Delivery of optics within 9 months ARO.
Special Instructions
-Monthly progress reports emailed to the technical representative by the 7th of each month.
The vendor does not have to adhere to EVMS policies, with performance based on meeting schedule and technical specifications as described.
Payment net 30 days upon delivery to ANL of final optics, in U.S. Dollars
12-month warranty.
Protection of Materials and Equipment During Shipment
Ship optics in appropriately cushioned, contaminant free casing.
Quality Assurance Requirements
-A metrology report shall be generated and delivered with the optics containing optically measured figure, optically measured roughness, and envelope dimensions for all four (4) delivered optics with specifications as described above.
List of Attachments
ANL-407C
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