SOW_WDS-SEM-20260120-1.pdf

ARGONNE NATIONAL LABORATORY

NANOSCIENCE AND TECHNOLOGY DIVISION

STATEMENT OF WORK

On the Acquisition of a Scanning Electron Microscope (SEM) equipped with wavelength dispersive spectrometer (WDS)

01/20/2026

1. Background

The Division of NanoScience and Technology (NST) at Argonne National Laboratory has been conducting a recapitalization plan to update aging equipment. Two of the instruments in need of updating are scanning electron microscopes that are more than 20 years old. The Quanta SEM, (installed February 2005) is equipped with a Cathodoluminescence (CL) spectrometer (added in

2023), and the Hitachi SEM (installed February 2000) is fitted with an Energy Dispersive

Spectrometer (EDS) (installed in 2017). The CL and EDS spectrometers will be migrated to the new SEM platform. Additionally, a new Wavelength Dispersive Spectrometer (WDS) will be acquired, enhancing the system’s analytical capabilities.

The scanning electron microscopes in NST are heavily used for characterization and analysis of samples across many research areas. In addition, this upgraded SEM will be uniquely configured with the combined CL and WDS capabilities—features essential to the lab’s newly established focus on critical mineral research. With sub-nanometer spatial resolution—ten times higher than the existing instruments—the new SEM offers significantly improved imaging performance. Furthermore, the WDS detector enables elemental detection limits down to the

100ppm level, providing exceptional sensitivity for detailed compositional analysis. The Ultra-

Fast beam blanker (pulse length as FWHM should be less than 600ps) is also strongly desired to realize the time resolved capabilities.

We will acquire a new scanning electron microscope, chosen from one of the world-renowned SEM manufacturers.

2. Scope

With the new FE-SEM, NST users and scientists will be able to perform cutting-edge research in many important areas across physical science, chemical science and engineering, and materials sciences. Users will benefit from the unique integration of CL and WDS on a single platform—a capability that is rare among user facilities and particularly valuable for research in geosciences, photonic materials, quantum systems, and critical minerals. The ability to simultaneously probe optical properties and trace elemental composition at the nanoscale will open new experimental avenues, allowing users to address complex scientific questions that were previously beyond reach with the existing instrumentation. The 100 ppm detection limit offered by WDS is especially critical for studies involving low-abundance elements in, catalysts, and geological samples, where precise quantification is essential.

This SEM will provide materials characterization for a considerable number of users from inside and outside Argonne.

3. Objectives/acceptance criteria

The SEM will significantly improve NST’s analytical capability with scanning electron microscopy.

The SEM must have the following capabilities, features and specs:

• Resolution below 1 nm.

• Significantly expanded range of beam current. a few picoamperes to a few tens of nanoamperes.

• Field emission gun

• Retractable directional backscatter electron detector (DBS)

• Deceleration mode to enable imaging of insulating/beam-sensitive samples.

• Retractable scanning transmission electron microscopy (STEM) detector

• Heating stage and controller (room temperature to 1000 degree in Celsius)

• Cryogenic stage and controller (room temperature to -180 degree in Celsius)

• Electrical feedthrough for probing specimen

• Migration of Delmic Sparc Cathodoluminescence (CL) spectrometer (SN is

202325001) on the Quanta SEM to the new SEM.

• Migration of Bruker Quantax EDS spectrometer (Bruker Quantax, serial number 12397) on the Hitachi SEM to the new SEM and integrate with the new WDS detector.

Strongly desired option: Ultra-Fast Beam Blanker

• Vendor shall propose an optional ultra-fast beam blanker suitable for time-resolved operation with pulse width (FWHM) ≤600 ps.

The results from these studies shall contribute to significant scientific breakthroughs and will lead to reputable journal publications.

4. Proposal Structure Requirement

Vendor shall provide two priced configurations:

1. Base System (no ultra-fast beam blanker)

2. Base System + Optional Ultra-Fast Beam Blanker (meeting the requirement above)

5. Tasks

The SEM vendor shall provide us with a completely new SEM that meets every specification indicated in the quote and contract. The SEM vendor shall offer a warranty of at least 1 year for all their products and components. The vendor shall come into the Laboratory to perform installation and testing, in their first visit, and any subsequent repairing and maintenance works, during the period of warranty. A key person from the vendor will be designated. This person must be able to perform the effort without direct Laboratory supervision.

As part of the installation, The Delmic Sparc Cathodoluminescence (CL) spectrometer (SN is 202325001) on the Quanta SEM and the Bruker Quantax EDS spectrometer (Bruker Quantax, serial number 12397) on the Hitachi SEM shall be relocated by the vendor to the new SEM. The existing Bruker EDS will also be integrated with the new WDS.

The work also includes

• Removal of old microscopes (Hitachi 4700 and FEI Quanta).

6. Delivery

The SEM vendor shall deliver an integrated SEM system consisting of a scanning electron microscope with computer hardware and software for control, detectors, scanning system, vacuum system, water chiller, sample loader and control system, any other accessories written in the quote and contract.

The delivery shall happen by mid of June 2026 to Building 212 of Argonne National Laboratory.

Yuzi Liu is the technical representative at Argonne. The installation should be completed within 2 months after delivery.

7. Place of Performance

The SEM will be placed, installed, and tested in room DL-120 in D-wing of Building 212.

8. Period of Performance

The initial installation and testing will take about 2 months. If the system develops any problems within the 1-year instrument warranty, the service engineer shall come to Argonne to provide necessary service and bring the system back to its original specifications without service cost.