SOW - Glovebox - G5-171039.docx.docx

APPENDIX B – Statement of Work

Project No.

Period of Performance

Version status

Description This contract will furnish, deliver, install, and commission a sputtering system fully integrated into an argon-glovebox for the inert-atmosphere deposition of air-sensitive thin films. The turnkey scope includes utility hookups, factory and site acceptance testing, operator training, and one year of warranty maintenance support, enabling in-glovebox fabrication of thin-film lithium- and/or sodium-metal batteries for electrochemical testing and advanced characterization via electron microscopy.

APPENDIX B – Statement of Work

SOW for <Name of Project> Page 1 of 2

Contents

APPENDIX B – SOW for <Project Title> Page 3 of 5

Background

· Laboratory requirement: The system must interface with the following owner-provided utilities in Bldg 242, Rm F025:

· Main power: 208 V, 50 A, 3-phase

· Gas lines: Ar, O₂, N₂, H₂

· Compressed air (6–7 kg/cm²)

· Process cooling water (1–2 kg/cm²)

· Project rationale: Prof. Shirley Meng’s group at ANL requires a glovebox-integrated DC/RF sputtering system for in-glovebox deposition of air-sensitive solid electrolytes to support thin-film metal battery R&D. Solid electrolyte films must be handled in inert atmosphere (O₂/H₂O ≤ 0.01 ppm) to ensure its quality. Following deposition, samples will be transferred via inert-transfer cart into the CNM plasma-focused ion beam or adjacent Spectra Ultra X TEM for in-depth microstructural and chemical analysis, leveraging existing infrastructure and accelerating ongoing solid-state battery projects.

· Regulatory authority: All electrical and electronic components must be certified by a Nationally Recognized Testing Laboratory (e.g., UL-listed) and comply with Argonne’s Electrical Safety Program, which enforces DOE 10 C.F.R. 851, NFPA 70E, and NEC standards for safe operation of the equipment.

Scope Under this contract, the Contractor shall furnish, deliver, install, and commission a turnkey, glovebox-integrated DC/RF sputtering system for LiPON thin-film deposition. The contractor shall coordinate site preparations, connect all utilities, perform installation and calibration, train end-users, and execute acceptance tests demonstrating all performance requirements. The Contractor will perform preventative maintenance and necessary repairs throughout the one-year warranty period.

Objectives

· Deliver a fully integrated DC/RF sputtering module within an inert-atmosphere glovebox to enable precise, reproducible deposition of solid electrolyte thin films (such as LiPON) with ≤ 5 % thickness non-uniformity over 4″ substrates.

· Commission the system to operate safely and reliably under 208 V/50 A/3-phase service with integrated Ar, O₂, N₂, H₂ gas handling, compressed air, and process cooling water.

· Train Argonne staff to autonomously run deposition recipes, perform routine maintenance, and troubleshoot standard issues.

· Provide preventative maintenance and support during the one-year warranty to ensure continuous operation.

End-Use of Results:

The end product, being the sputtering deposition system integrated with glovebox, will be used to deposit high quality solid electrolyte (e.g., LiPON) films, which will serve as solid electrolytes in thin-film metal batteries. The thin-film metal batteries will then be used to perform electrochemical testing as well as microstructural characterization using electron microscopy. Given the high standards of this research project, it requires a highly customized system—combining glovebox integration, multiple gas species handling, and precision DC/RF power supplies—that meets stringent inert-environment and deposition-uniformity requirements.

Tasks Design Review & Factory Acceptance Testing (FAT):

- Review final system drawings and process recipes.

- Witness FAT at Contractor’s facility, including verification of:

• Ultimate chamber vacuum ≤ 9 × 10⁻⁸ Torr

• RF power delivery (300 W & 600 W at 13.56 MHz) and DC supply (1 kW) functionality

• Mass‐flow controller accuracy for Ar/O₂/N₂ (100/50/50 sccm) and H₂ hookup Site Preparation Coordination:

- Coordinate with owner to confirm floor loading, space layout, and utility rough‐ins in Bldg 242, Rm F025 per room drawing.

- Verify availability of: 208 V/50 A/3-phase power; Ar, O₂, N₂, H₂ gas lines; compressed air (6–7 kg/cm²); process cooling water (1–2 kg/cm²); vacuum exhaust.

Delivery & Unloading:

- Ship the complete system to Argonne via Contractor’s preferred carrier.

- Unload, locate, and gross-level the system footprint per layout drawing.

Installation & Utility Hookup:

- Anchor the base frame and integrate the glovebox flange interface.

- Connect and leak-test all utilities: electrical, gas, compressed air, cooling water, and exhaust.

Startup, Calibration & Software Configuration:

- Perform pump-down and leak-check to achieve ≤ 9 × 10⁻⁸ Torr within 8 hours.

- Calibrate MFCs and power supplies; load and verify recipes for standard deposition process.

- Validate glovebox atmosphere control (O₂/H₂O ≤ 0.01 ppm).

Site Acceptance Testing (SAT):

- Execute silicon deposition at 1 kW DC on a 4″ wafer and demonstrate ± 5 % thickness uniformity (measured by thickness mapping).

Training & Documentation:

- Provide on-site training sessions for Argonne operators, covering routine operation, maintenance, and safety.

- Deliver operation & maintenance manuals, as-built drawings, PLC recipes, and SAT data package.

Warranty Maintenance Support:

- Perform preventative maintenance and corrective repairs as needed during the one-year warranty period per the quote’s warranty terms.

- Provide remote technical support and software/firmware updates throughout warranty.

Deliverables, Timing, Location, and Documentation Deliverables

· Glovebox-integrated sputtering system delivered to Argonne

· Factory Acceptance Test (FAT) report, including vacuum and power-supply performance data

· Operation & Maintenance (O&M) manuals, as-built drawings, and PLC recipe files

· Site Acceptance Test (SAT) report, including deposited silicon thickness uniformity maps.

· Training records, including attendance sheets and summary of topics covered

· Warranty service log, documenting any preventative-maintenance or corrective actions performed during Year 1 Timing All dates are measured from date of contract award:

· Equipment delivery to Bldg 242, Rm F025: within 180 days

· Installation & SAT completion: within 210 days

· On-site training sessions: within 220 days

· Warranty service support: ongoing, Months 7–18 Location

· Delivery, installation, SAT, and training: Argonne National Laboratory, Bldg 242, Room F025

Quality Assurance

Quality Program:

The Contractor shall maintain and implement a documented, NRTL-certified quality program (e.g., ISO 9001 or equivalent) that covers design, fabrication, installation, testing, and service activities for the RVSG-2000L system.

Project Quality Plan & Objectives:

Achieve all performance objectives:

• Ultimate vacuum ≤ 9 × 10⁻⁸ Torr after 8 hours pump-down

• LiPON film thickness non-uniformity ≤ ± 5 % across 4″ wafers

• Glovebox atmosphere control (O₂/H₂O ≤ 0.01 ppm)

Inspection & Surveillance Requirements:

Sight Acceptance Testing (SAT) Oversight: Argonne representative shall witness all SAT activities and have the right to inspect welds, vacuum seals, MFC installations, and power-supply calibrations.

– On-Site Installation Inspections: Argonne representative may perform periodic inspections during utility hookups, leak-checks, and functional testing to verify compliance with project specifications.

Non-Conformance & Deviations:

– Contractor must document any deviations from quoted performance or contract requirements in a Non-Conformance Report (NCR).

– NCR shall describe the nature of the non-conformance, root-cause analysis, corrective actions, and schedule for resolution.

Government-Owned Property No government-furnished property is required.

Security Contractor personnel must adhere to Argonne National Laboratory security requirements, including:

- Obtaining and displaying valid Argonne gate passes or badges at all times while on-site.

- Coordinating with the Argonne Representative to arrange site access.

- Being escorted by Argonne staff when entering restricted laboratory areas.

Place of Performance The system will be fabricated, assembled, and factory acceptance tested at the Contractor’s manufacturing facility. Following successful FAT, the complete system will be shipped to Argonne National Laboratory, Bldg 242, Room F025, for installation, commissioning, and site acceptance testing.

Period of Performance All system fabrication and factory acceptance testing shall be completed within 5 months of contract award. The fully assembled system shall be delivered to Argonne National Laboratory within 6 months of contract award. Site commissioning, acceptance testing, and operator training shall be completed within 7 months of contract award.

Attachments

· Attachment 1: Room F025 floor-plan drawings image1.jpeg