SOW-Final.docx

STATEMENT OF WORK

Title: Advanced Chemical Metrology for Semiconductor Cleaning Chemicals: Organic Contaminants, Native Particles and Precursors, and Rapid Particle and Impurity Characterization Lab: Material Measurement Laboratory/Chemical Sciences Division

BACKGROUND INFORMATION

Semiconductor manufacturing yield enhancement requires ongoing risk analysis of cleaning chemical purity wherein critical contaminants are already at levels difficult or impossible to detect, let alone identify and quantify. Next-generation chips will require even purer materials and advanced metrological capabilities for the detection, identification, and quantification of impurities in semiconductor cleaning chemicals, necessitating a practical roadmap for assessing material purity commensurate with the needs of the next generation in semiconductor manufacturing.

NIST requires an ultrapure water (UPW) system capable of producing Type 1 UPW from domestic tap water, including pretreatment options for conditioning of influent to the UPW system to prolong system lifetime. The UPW system will be one in a larger system designed to measure the efficiency of a laboratory-scale ultrafiltration (UF) system configured for the quantitative determination of UF efficiency for particles with sizes spanning ≈ 1 nm to ≈ 50 nm and a range of chemistries and morphologies (e.g., spherical, rod, etc.). The UPW system will be used to deliver UPW to: 1) a pair of nanoparticle nebulizers that require upwards of 200 mL min-1 each at 30 psi to 70 psi, 2) a scanning threshold particle counter that requires upwards of 280 mL min-1 at 30 psi to 70 psi, and 3) particle removal technologies for testing. All components will be used in a standard indoor chemistry laboratory with temperatures between 18 °C and 24 °C and relative humidities between 20 % and 80 % (non-condensing) and standard 120 V 20 A/30A power.

Purpose: This system will provide UPW for both the particle removal technologies under test and the analytical instrumentation used to test said technologies.

SCOPE

The Contractor shall deliver a quantity of one (1) UPW System and one (1) Pretreatment System inclusive of FOB Destination delivery terms (OR equivalent INCOTERM such as DDP) and 12-month warranty.

MINIMUM REQUIREMENTS

The Contractor shall submit a firm fixed price quotation which offers a supply/system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: UPW System Description: Generates Type 1 UPW.

Quantity: One (1) A. Technical Specifications

a. Laboratory-scale system

b. Capable of producing Type 1 UPW from conditioned domestic tap water.

c. Effluent resistance ≥ 18.2 MΩ cm, < 3 ppb Total Organic Carbon (TOC)

d. Sustained dispense rate of > 1.5 L min-1 at 30 psi to 70 psi for up to 8 h (booster pump to sustain pressure is acceptable).

e. Ultrafilter

f. ≤ 100 kDa point-of-use filter

g. UV/TOC lamp

h. TOC monitor

i. 120 VAC

Line Item 0002: Pretreatment system Description: Generates conditioned water from tap water for use by the UPW system.

Quantity: One (1) A. Technical Specifications

a. Prepares influent for UPW system to meet desired specifications for sustained life of UPW system.

b. 120 VAC

Line Item 0003: 1-year service agreement Description: Service Plan Quantity: One (1)

1. Service plan requirements for pretreatment system

a. Semiannual

· Replace 0.5 μm and 1 μm prefilters

· Replace carbon cartridge

2. Service plan requirements for UPW System

a. Semiannual:

· Service with evaluation report

· Replace ultrahigh purity conditioning packs

· Replace ultrapure polishing cartridge

· Replace UV TOC bulb

b. Annual

· Replace 0.2 μm capsule filter

DELIVERABLES

DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 (Receiving) C/O TBD Building 221, Room A117 Gaithersburg, MD 20899

INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. UPW system will be tested and must pass the onboard, continuous, TOC, and resistivity measurements.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST TPOC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within fourteen (14) days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 30 days after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD Building 221.

WARRANTY

The contractor shall warranty the entire system in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include goods to be free from defects in workmanship and material.

PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule in accordance with the Invoicing Clause in the contract and/or as otherwise noted in this document, upon receipt of a proper invoice.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

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