Amend A002 SF 30 SB1341-10-RQ-0245Final.pdf

AMENDMENT OF SOLICITATION/MODIFICATION OF CONTRACT 1. CONTRACT ID CODE

PAGE

OF

2. AMENDMENT/MODIFICATION NO.

A002

3. EFFECTIVE DATE

19 AUG 2010

4. REQUISITION/PURCHASE REQ. NO.

N/A

5. PROJECT NO.(If applicable)

NA

6. ISSUED BY CODE 000SB 7. ADMINISTERED BY (If other than Item 6) CODE

NATIONAL INST OF STDS AND TECHNOLOGY

100 BUREAU DRIVE STOP 1640

BUILDING 301 ROOM B125

GAITHERSBURG, MD 20899-1640

8. NAME AND ADDRESS OF CONTRACTOR (No.. Street, county, State and Zip Code) (X) 9A. AMENDMENT OF SOLICITATION NO.

SB134110RQ0245

X

9B. DATED (SEE ITEM 11)

02 AUG 2010

10A. MODIFICATION OF CONTRACT/ORDER NO.

10B. DATED (SEE ITEM 13)

CODE FACILITY CODE

11. THIS ITEM ONLY APPLIES TO AMENDMENTS OF SOLICITATIONS

The above numbered solicitation is amended as set forth in item 14. The hour and date specified for receipt of offers X is extended is not ex-tended.

Offer must acknowledge receipt of this amendment prior to the hour and date specified in the solicitation or as amended, by one of the following methods:

(a) By completing Items 8 and 15 and returning, ___one (1)_____ copies of the amendment; (b) By acknowledging receipt of this amendment on each copy of the offer submitted; or (c) By separate letter or telegram which includes a reference to the solicitation and amendment number. FAILURE OF YOUR ACKNOWLEGDEMENT TO BE RECEIVED AT THE PLACE DESIGNEATED FOR THE RECEIPT OF OFFERS PRIOR TO THE HOUR AND DATE SPECIFIED MAY RESULT IN REJECTION OF YOU OFFER. If by virtue of this amendment you desire to change an offer already submitted, such change may be made by telegram or letter, provided each telegram or matter makes reference to the solicitation and this amendment, and is received prior to the opening hour and date specified.

12. Accounting and Appropriation Data (If Required)

13. THIS ITEM APPLIES ONLY TO MODIFICATIONS OF CONTRACTS/ORDERS,

IT MODIFICES THE CONTRACT/ORDER NO. AS DESCRIBED IN ITEM 14.

(x) A. THIS CHANGE ORDER IS ISSUED PURSUANT TO: (Specify authority) THE CHANGES SET FORTH IN ITEM 14 ARE MADE IN THE CONTRACT ORDER NO., IN ITEM 10A.

B. THE ABOVE NUMBERED CONTRACT/ORDER IS MODIFIED TO REFLECT THE ADMINISTRATIVE CHANGES (such as changes in paying office appropriation data, etc.) SET FORTH IN ITME 14 PURSUANT TO THE AUTHORITY OF FAR 43.103(b).

C. THIS SUPPLEMENT AGREEMENT IS ENTERED INTO PURSUANT TO AUTHORITY OF:

OTHER (Specify type of modification and authority)

E. IMPORTANT: Contractor is not is required to sign this document and return copies to the issuing office.

14. DESCRIPTION OF AMENDMENT/MODIFICATION

a. The purpose of this amendment is to answer questions submitted by potential offerors concerning the solicitation, revise Attachment 2 Bid Schedule, clarify the specifications and extend the response date for receipt of offers/quotations.

b. Attachment 2, Bid Schedule is hereby deleted and replaced with revised Attachment 2, Amendment A002 Bid Schedule.

Continued on Page 2 of 2

Except as provided herein, all terms and conditions of the document referenced in item 9A or 10A, as heretofore changed, remains unchanged and in full force and effect.

15A. NAME AND TITLE OF SIGNED (Type or print)

16A. NAME AND TITLE OF SIGNED (Type or print)

PATRICK STAINES

Contracting Officer

15B. CONTRACTOR/OFFEROR

(Signature of person authorized to sign)

15C. DATE SIGNED

16B. UNITED STATES OF AMERICA

(Signature of Contracting Officer)

16C. DATE SIGNED

Solicitation SB134110RQ0245 Amendment A002 SF 30 Continuation of Block 14 Narrative Page 2 of 2

c. The following revisions/clarifications are made to the specifications:

(1) Paragraphs 11, 12, 13, 14, 15, and 16 are applicable to Items 0001, 0002 and 0003.

(2) System II, Paragraph 6.c. Change “electron beam evaporation” to read “sputter deposition”.

(3) System II. Delete Paragraph 3.j. OPTION in its entirety and replace with the following:

3.j The system load lock shall have 2 additional general purpose 2.75 inch CF ports for future uses.

(4) System II, Paragraph 5. Add the following:

5 g. Deposition rate for Al of at least 1.0 nm/sec while maintaining a thickness uniformity of less than

+/- 2% over a 76.2 mm diameter wafer with a 3mm edge exclusion zone.

(5) System III, Paragraph 5. Add the following:

5.h. Deposition rate for Al of at least 0.3 nm/sec while maintaining a thickness uniformity of less than

+/- 5% over a 76.2 mm diameter wafer with a 5mm edge exclusion zone.

(6) System I, Paragraph 5. Add the following:

5.h. Deposition of aluminum thin film at a rate of at least 3nm/sec while maintaining a thickness uniformity of less than +/-5% over a 100 mm (4 inch) wafer with a 5 mm edge exclusion zone.

(7) Paragraph 13, Acceptance Testing, System II (Item No. 0002), Subparagraph d is revised to read “deposition rate for Al of at least 1.0 nm/sec while maintaining a thickness uniformity of less than +/- 2% over a 76.2 mm diameter wafer with a 3mm edge exclusion zone.

(8) Paragraph 13, Acceptance Testing, System III (Item No. 0003), Subparagraph d is revised to read

“deposition rate for Al of at least 0.3 nm/sec while maintaining a thickness uniformity of less than +/- 5% over a 76.2 mm diameter wafer with a 5mm edge exclusion zone.

d. The response date and time of Monday, 23 August 2010 at 12:00PM EST is hereby extended to Monday, 30 August 2010 at 12:00PM EST.

e. All other terms and conditions of solicitation SB134110RQ0245 remain unchanged.