Attachment A.pdf
PDF 135 KB Posted
- Attached to
- Assorted Mass Flow Controllers
- Solicitation number
- RP481134
- Issued by
-
Department of Energy Office of Science
About this file
This document is a detailed bill of materials and product specification listing for EL-FLOW Prestige FG-201CS Mass Flow Controllers procured for federal contract purposes.
The procurement includes seven mass flow controller units with varying configurations across different fluids: one hydrogen controller (0.21814-20 sccm range), one helium controller (0.45643-50 sccm range), two carbon dioxide controllers (0.21648-20 sccm range), one nitrogen controller (0.83571-100 sccm range), one carbon dioxide controller (0.85404-100 sccm range), one helium controller (0.85969-100 sccm range), and one nitrogen controller with argon capability (0.83571-100 sccm range). All units feature stainless steel 316 construction with IP-40 ingress protection, Viton 51415 seals, FFKM plungers, and normally closed electric shut-off valves. Each controller operates with RS-232 digital control at 38400 baudrate, accepts +15-24 Vdc power supply, and has been calibrated with 3-point actual calibration certificates (0%, 50%, 100%). Inlet and outlet pressures are standardized at 60 psi (g) and 40 psi (g) respectively, with operating temperature at 72°F. All units are degreased for oxygen use per QA-P-038. Supporting materials include eight cable assemblies (DB9 shut-off valve cables, RS232 T-part DB9 MBC-II cables), eight PiPS-EL-DSUB adapters, and eight serial-to-USB adapters for system integration and connectivity.
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Other files
| File | Type | Posted |
|---|---|---|
| BSA_Commercial_Product_Rev24 - BHSO Approved.pdf | ||
| B.1_Draft_PO.pdf | ||
| A.1_Attachment1_SOW_481134.pdf |
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Text version
001/000 1 pc 7.10.232 EL-FLOW Prestige FG-201CS Mass Flow Controller
Model key : FG-201CS-AAD-11-V-DA-C5S Product series : EL-FLOW Prestige Ingress protection : IP-40 Material : Stainless steel 316 Multi Fluid Multi Range : Enabled Control function : Flow control Fluid : H2 (Hydrogen) Flow range : 0.21814...20 sccm Accuracy : ±0.5% Rd plus ±0.1% FS
(At calibration conditions) Calibration certificate : 3-point actual calibration (0%, 50%, 100%) Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Valve function : Normally Closed Orifice : 0.05 mm Temperature : 72 °F Seals : Viton 51415 Plunger : FFKM Shut-off valve type : Electric NC Shut-off valve seal : Viton 51415 Inlet connection : 1/8" OD compression Outlet connection : 1/8" OD compression Output signal : RS-232 0...100 % (0...5 Vdc) Setpoint : RS-232 0...100 % (0...5 Vdc) Control mode : Digital Instrument interface : RS-232
- Baudrate : 38400
- Parity : None
- Node address : 1 Customized I/O : Digital output, enabled by setpoint (for shut-off)
Pin 5 is pulled down to 0 Vdc at a controller setpoint, e.g. for shut-off valve activation
Power supply : +15...24 Vdc
QA-P-038: degreased for O2 use.
002/000 1 pc 7.10.232 EL-FLOW Prestige FG-201CS Mass Flow Controller
Model key : FG-201CS-AAD-11-V-DA-000 Product series : EL-FLOW Prestige Ingress protection : IP-40 Material : Stainless steel 316 Multi Fluid Multi Range : Enabled Control function : Flow control Active fluid : Fluid 1 Fluid : He (Helium) Flow range : 0.45643...50 sccm
Accuracy : ±0.5% Rd plus ±0.1% FS (At calibration conditions)
Calibration certificate : 3-point actual calibration (0%, 50%, 100%) Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Valve function : Normally Closed Orifice : 0.07 mm Temperature : 72 °F Seals : Viton 51415 Plunger : FFKM Shut-off valve type : Electric NC Shut-off valve seal : Viton 51415 Inlet connection : 1/8" OD compression Outlet connection : 1/8" OD compression Output signal : RS-232 0...100 % (0...5 Vdc) Setpoint : RS-232 0...100 % (0...5 Vdc) Control mode : Digital Instrument interface : RS-232
- Baudrate : 38400
- Parity : None
- Node address : 1 Power supply : +15...24 Vdc
QA-P-038: degreased for O2 use.
Additional calculated curve for Fluid 2
Fluid : Mix: 5.0% CO (Carbon monoxide) + 95.0% He (Helium) (volume % at 0 °C and 1013.25 hPa)
Flow range : 0.40887...50 sccm Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Temperature : 72 °F Calibration certificate : 3-point calibration (0%, 50%, 100%)
Additional calculated curve for Fluid 3
: Mix: 5.0% CO (Carbon monoxide) + 95.0% Air (volume % at 0 °C and 1013.25 hPa)
: 0.29404...48 sccm : 60 psi (g) : 40 psi (g) : 72 °F : 3-point calibration (0%, 50%, 100%)
Fluid
Flow range Inlet pressure (P1) Outlet pressure (P2) Temperature Calibration certificate
003/000 2 pcs 7.10.232 EL-FLOW Prestige FG-201CS Mass Flow Controller
Model key : FG-201CS-AAD-11-V-DA-C5S Product series : EL-FLOW Prestige Ingress protection : IP-40 Material : Stainless steel 316 Multi Fluid Multi Range : Enabled Control function : Flow control Active fluid : Fluid 1 Fluid : CO2 (Carbon dioxide) Flow range : 0.21648...20 sccm Accuracy : ±0.5% Rd plus ±0.1% FS
(At calibration conditions) Calibration certificate : 3-point actual calibration (0%, 50%, 100%) Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Valve function : Normally Closed
Orifice : 0.05 mm Temperature : 72 °F Seals : Viton 51415 Plunger : FFKM Shut-off valve type : Electric NC Shut-off valve seal : Viton 51415 Inlet connection : 1/8" OD compression Outlet connection : 1/8" OD compression Output signal : RS-232 0...100 % (0...5 Vdc) Setpoint : RS-232 0...100 % (0...5 Vdc) Control mode : Digital Instrument interface : RS-232
- Baudrate : 38400
- Parity : None
- Node address : 1 Customized I/O : Digital output, enabled by setpoint (for shut-off)
Pin 5 is pulled down to 0 Vdc at a controller setpoint, e.g. for shut-off valve activation
Power supply : +15...24 Vdc
QA-P-038: degreased for O2 use.
Additional calculated curve for Fluid 2
Fluid : CH4 (Methane) Flow range : 0.23204...20 sccm Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Temperature : 72 °F Calibration certificate : 3-point calibration (0%, 50%, 100%)
Additional calculated curve for Fluid 3
Fluid : C2H6 (Ethane) Flow range : 0.15008...20 sccm Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Temperature : 72 °F Calibration certificate : 3-point calibration (0%, 50%, 100%)
Additional calculated curve for Fluid 4
Fluid : C3H8 (Propane) Flow range : 0.10272...15.4 sccm Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Temperature : 72 °F Calibration certificate : 3-point calibration (0%, 50%, 100%)
Additional calculated curve for Fluid 5
Fluid : C2H4 (Ethylene) Flow range : 0.1823...20 sccm Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Temperature : 72 °F Calibration certificate : 3-point calibration (0%, 50%, 100%)
Additional calculated curve for Fluid 6
Fluid : C3H6 #2 (Propylene) Flow range : 0.11953...17.9 sccm Inlet pressure (P1) : 60 psi (g)
Temperature : 72 °F
Calibration certificate : 3-point calibration (0%, 50%, 100%)
004/000 1 pc 7.10.232 EL-FLOW Prestige FG-201CS Mass Flow Controller
Model key : FG-201CS-AAD-11-V-DA-C5S Product series : EL-FLOW Prestige Ingress protection : IP-40 Material : Stainless steel 316 Multi Fluid Multi Range : Enabled Control function : Flow control Active fluid : Fluid 1 Fluid : N2 (Nitrogen) Flow range : 0.83571...100 sccm Accuracy : ±0.5% Rd plus ±0.1% FS
(At calibration conditions) Calibration certificate : 3-point actual calibration (0%, 50%, 100%) Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Valve function : Normally Closed Orifice : 0.10 mm Temperature : 72 °F Seals : Viton 51415 Plunger : FFKM Shut-off valve type : Electric NC Shut-off valve seal : Viton 51415 Inlet connection : 1/8" OD compression Outlet connection : 1/8" OD compression Output signal : RS-232 0...100 % (0...5 Vdc) Setpoint : RS-232 0...100 % (0...5 Vdc) Control mode : Digital Instrument interface : RS-232
- Baudrate : 38400
- Parity : None
- Node address : 1 Customized I/O : Digital output, enabled by setpoint (for shut-off)
Pin 5 is pulled down to 0 Vdc at a controller setpoint, e.g. for shut-off valve activation
Power supply : +15...24 Vdc
QA-P-038: degreased for O2 use.
Additional calculated curve for Fluid 2
Fluid : Mix: 20.0% O2 (Oxygen) + 80.0% He (Helium) (volume % at 0 °C and 1013.25 hPa)
Flow range : 1.1007...100 sccm Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Temperature : 72 °F Calibration certificate : 3-point calibration (0%, 50%, 100%)
Additional calculated curve for Fluid 3
Fluid : Mix: 20.0% O2 (Oxygen) + 80.0% Air (volume % at 0 °C and 1013.25 hPa)
Flow range : 0.83926...100 sccm Inlet pressure (P1) : 60 psi (g)
Calibration certificate : 3-point calibration (0%, 50%, 100%)
005/000 1 pc 7.10.232 EL-FLOW Prestige FG-201CS Mass Flow Controller
Model key : FG-201CS-AAD-11-V-DA-C5S Product series : EL-FLOW Prestige Ingress protection : IP-40 Material : Stainless steel 316 Multi Fluid Multi Range : Enabled Control function : Flow control Fluid : CO2 (Carbon dioxide) Flow range : 0.85404...100 sccm Accuracy : ±0.5% Rd plus ±0.1% FS
(At calibration conditions) Calibration certificate : 3-point actual calibration (0%, 50%, 100%) Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Valve function : Normally Closed Orifice : 0.10 mm Temperature : 72 °F Seals : Viton 51415 Plunger : FFKM Shut-off valve type : Electric NC Shut-off valve seal : Viton 51415 Inlet connection : 1/8" OD compression Outlet connection : 1/8" OD compression Output signal : RS-232 0...100 % (0...5 Vdc) Setpoint : RS-232 0...100 % (0...5 Vdc) Control mode : Digital Instrument interface : RS-232
- Baudrate : 38400
- Parity : None
- Node address : 1 Customized I/O : Digital output, enabled by setpoint (for shut-off)
Pin 5 is pulled down to 0 Vdc at a controller setpoint, e.g. for shut-off valve activation
Power supply : +15...24 Vdc
QA-P-038: degreased for O2 use.
006/000 1 pc 7.10.232 EL-FLOW Prestige FG-201CS Mass Flow Controller
Model key : FG-201CS-AAD-11-V-DA-C5S Product series : EL-FLOW Prestige Ingress protection : IP-40 Material : Stainless steel 316 Multi Fluid Multi Range : Enabled Control function : Flow control Fluid : He (Helium) Flow range : 0.85969...100 sccm Accuracy : ±0.5% Rd plus ±0.1% FS
(At calibration conditions) Calibration certificate : 3-point actual calibration (0%, 50%, 100%) Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Valve function : Normally Closed Orifice : 0.05 mm
Seals : Viton 51415
Plunger : FFKM Shut-off valve type : Electric NC Shut-off valve seal : Viton 51415 Inlet connection : 1/8" OD compression Outlet connection : 1/8" OD compression Output signal : RS-232 0...100 % (0...5 Vdc) Setpoint : RS-232 0...100 % (0...5 Vdc) Control mode : Digital Instrument interface : RS-232
- Baudrate : 38400
- Parity : None
- Node address : 1 Customized I/O : Digital output, enabled by setpoint (for shut-off)
Pin 5 is pulled down to 0 Vdc at a controller setpoint, e.g. for shut-off valve activation
Power supply : +15...24 Vdc
QA-P-038: degreased for O2 use.
007/000 1 pc 7.10.232 EL-FLOW Prestige FG-201CS Mass Flow Controller
Model key : FG-201CS-AAD-11-V-DA-C5S Product series : EL-FLOW Prestige Ingress protection : IP-40 Material : Stainless steel 316 Multi Fluid Multi Range : Enabled Control function : Flow control Active fluid : Fluid 1 Fluid : N2 (Nitrogen) Flow range : 0.83571...100 sccm Accuracy : ±0.5% Rd plus ±0.1% FS
(At calibration conditions) Calibration certificate : 3-point actual calibration (0%, 50%, 100%) Inlet pressure (P1) : 60 psi (g) Outlet pressure (P2) : 40 psi (g) Valve function : Normally Closed Orifice : 0.10 mm Temperature : 72 °F Seals : Viton 51415 Plunger : FFKM Shut-off valve type : Electric NC Shut-off valve seal : Viton 51415 Inlet connection : 1/8" OD compression Outlet connection : 1/8" OD compression Output signal : RS-232 0...100 % (0...5 Vdc) Setpoint : RS-232 0...100 % (0...5 Vdc) Control mode : Digital Instrument interface : RS-232
- Baudrate : 38400
- Parity : None
- Node address : 1 Customized I/O : Digital output, enabled by setpoint (for shut-off)
Pin 5 is pulled down to 0 Vdc at a controller setpoint, e.g. for shut-off valve activation
Power supply : +15...24 Vdc
QA-P-038: degreased for O2 use.
Additional calculated curve for Fluid 2
Fluid : Ar (Argon)
: 1.161...100 sccm : 60 psi (g) : 40 psi (g) : 72 °F : 3-point calibration (0%, 50%, 100%)
Flow range Inlet pressure (P1) Outlet pressure (P2) Temperature Calibration certificate
009/000 8 pcs 7.03.572 cable T-part DB9 shut-off valv cable T-part DB9 shut-off val
010/000 8 pcs 7.03.366 cable RS232 T-part DB9 MBC-II cable RS232 Tpart DB9 MBC-II/3
011/000 8 pcs 7.03.888 PiPS-EL-DSUB
012/000 8 pcs 9.09.122 Serial to USB adapter Serial to USB adapter
File details come from the government source that posted it. Updated .