02271_SOW.docx

STATEMENT OF WORK

NB686020-15-02271

PURPOSE: The NIST-Boulder Microfabrication Facility (BMF) provides access to microelectronic fabrication capabilities for the entire NIST-Boulder research community. One of the most critical fabrication tools in the BMF is the Wafer Stepper. The Wafer Stepper is the primary fabrication tool for patterning microelectronic circuits: it is used many times per day, and is essential to almost all users of the BMF. The Wafer Stepper is a very complex mechanical, optical and electronic instrument. The Wafer Stepper in the BMF was purchased in 2012, has had an extended service warranty to keep maintenance current, and its current service contract expires Aug. 18, 2015. For both safety and operational reasons, this tool requires routine monthly preventive maintenance service in accordance with the manufacturer’s specifications. In addition, should the tool experience any problems, it is vital that it be repaired as quickly as possible, since any "down time" will significantly impact the work in the BMF. Therefore, we require a standard Post Warranty Extended Service Contract on this tool, to cover both routine maintenance and emergency repair.

Requirements:

Post Warranty Extended Service Contract for NIST-Boulder ASML Model 5500/150 Wafer Stepper (Serial number 4956).

Duration: 1 year plus 2 option years, starting Aug. 18, 2015 through Aug. 17, 2018

Coverage: Full Service (detailed below) Labor and Parts (except for excluded parts listed below)

Response: 5 days per week, 8 hours per day (excluding holidays) Less than 24 hour response time. Guaranteed response time must be specified.

Detailed items to be covered:

a) Preventive Maintenance (PM) as per original manufacturer (ASML) specifications for this instrument.

b) Repair of equipment as needed to maintain operation and performance to manufacturer's specification. Repair includes parts and labor as required (excluding parts listed below).

c) Installation of software upgrades as required and provided by the manufacturer.

Excluded parts:

· Consumable parts and supplies (such as projection lamps, etc.)

· Projection Lens

· Light source

Proof of Experience, Availability and Access to Parts, and Technical Staff:

1. The Contractor shall provide contact information for at least 2 current customers receiving preventive maintenance on a similar ASML stepper, to serve as references and proof of experience.

2. The Contractor shall detail access to and typical delivery time for ASML parts required to maintain this instrument.

3. The Contractor shall provide the number and location of technical support staff that will be available to maintain this Stepper under this service contract.