Redacted_JA_23-3F5.pdf
PDF 689 KB Posted
- Attached to
- KLA/SPTS SiC Trench etch tool
- Solicitation number
- HQ072723R0015
- Issued by
-
Defense Microelectronics Activity
About this file
This file relates to a federal solicitation for a KLA/SPTS SiC trench etch tool. The solicitation number is HQ072723R0015 and is being issued by the Defense Microelectronics Activity. The solicitation is seeking offers for a silicon carbide trench etch tool to be used for research, development, test, and evaluation purposes. Responses are due by the date specified in the solicitation. The award is expected to be a fixed-price contract issued to a single vendor. Small businesses are encouraged to respond. The tool will support the development of silicon carbide technologies for various defense applications.
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Other files
| File | Type | Posted |
|---|---|---|
| Redacted_RFP_HQ072723R0015.pdf |
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