ESBD_486224_1771022628468_TSI-26-256 Addendum 1.pdf

THE TEXAS A&M UNIVERSITY SYSTEM

Office of Procurement & Business Services

ADDENDUM NO. 1

Date: February 13, 2026 RFP Due Date: February 24, 2026 New RFP Due Date: March 5, 2026

RE: RFP-01-TSI-26-256 – Cleanroom Tooling Consulting Services

Respondents shall acknowledge receipt of addendum(s) on the Execution of Offer (Exhibit A).

RFP Extension:

The due date of the RFP has been extended to November 17, 2025. The first sentence of Section 2.3 shall now read as follows, “All proposals must be received by A&M System no later than 2:00:00 p.m. Central Time, March 5, 2026 electronically via email to soprocurement@tamus.edu with the subject line of “TSI- 26-256 – Cleanroom Tooling Consulting Services.”

As such, the dates within Section 1.3 - Calendar of Events have been revised as below:

Deadline to Submit Questions ........................................................................ February 19, 2026

Release of Addendum (if applicable) ............................................................. February 26, 2026

Deadline for Receiving Proposals .........................................................................March 5, 2026

Evaluation of Proposals ......................................................................................................... TBD

Anticipated Award Date ........................................................................................................ TBD

Questions/Responses:

1. Roles, Interfaces, Responsibilities (RACI)

• Request formal RACI for AE, GC, tool vendors, FP&C, facilities, and our scope.

• Identify who has final authority for layout, utilities, and acceptance decisions.

• Clarify tool vendor responsibilities vs contractor responsibilities.

Response:

• RACI Framework: Per RFP Section 3.3, the Consultant (Respondent) acts as the lead coordinator for pre-installation, procurement support, onsite supervision, and qualification.

The General Contractor (GC) handles the physical facility build, while the Tool Vendors (AMAT, TEL, Lam) are responsible for internal tool integrity and performance warranties.

• Final Authority: The A&M System (Owner), specifically the TSI Leadership/User Group, holds final authority for layout and acceptance.

• Responsibility Split: The Tool Vendor is responsible for "inside the skin" work and final startup.

The Consultant/Contractor is responsible for "to the skin" (Point of Connection/POC to Point of Use/POU).

mailto:soprocurement@tamus.edu

2. Cleanroom Readiness & Contamination Control

• Confirm cleanroom ISO class and certification prior to tool-entry.

• Confirm gowning training, cleaning frequency, and environmental monitoring roles.

• Provide contamination incident response protocol and cost/schedule responsibility.

Response:

• ISO Class: The TSI Ballroom is designed as an ISO Class 5 (Class 100) environment (POR Section 6.1.1). Certification must be provided by a third-party testing agency prior to tool move-in.

• Gowning/Monitoring: TSI Facilities will provide the protocol; the Consultant is responsible for ensuring all tool vendors and sub-contractors adhere to these protocols (RFP Section 3.3.C).

• Incident Response: Standard industry practice (Intel/TI) dictates the "party at fault" bears the cost. The Consultant manages the documentation of these events.

3. Utility Availability, Quality & POU Requirements

• Request complete utility matrix with capacities, quality, and tolerances.

• Clarify ownership of point-of-use valves, regulators, filtration, and purifiers.

• Define pre-functional testing requirements and documentation for utilities.

Response:

• Utility Matrix: The Consultant is explicitly tasked with performing the "utility requirements analysis" (RFP Section 3.3.A). You are expected to develop the master utility matrix based on tool manuals.

• Ownership: The Hook-up package (this scope) typically includes the ownership of POU regulators, final filtration, and purifiers to ensure tool-specific purity.

• Pre-Functional Testing: Required for all hook-ups (e.g., helium leak testing for high-purity gas, resistivity for UPW).

4. Tool Data, Layout, and Revisions

• Provide GDS, manuals, load data, emissions profiles, anchorage requirements.

• Confirm authority to modify tool layout for maintainability.

• Define change control process for late vendor updates.

Response:

• Data Sources: TSI will provide available vendor manuals/GDS. The Consultant updates the Equipment Layout and Placement (RFP 3.3.A).

• Layout Authority: Modifications for maintainability must be approved by the TSI User Group via a formal Change Control Process.

• Change Control: Weekly held change control board between Respondent and TSI facilities manager

5. Facility Interface Design & Drawings

• Clarify if AE or contractor authors IFD/IFC for tool interfaces.

• Provide current as-built models/P&IDs.

• Define responsibilities for penetrations, seismic supports, firestopping.

Response:

• Authoring: The Consultant (Respondent) is responsible for the Facility Interface Design (FID) (RFP 3.3.A). This involves translating tool requirements into construction-ready lateral packages.

• Current: As-built models are not available at this time. May be provided to the awarded Respondent when available.

• Supports: Responsibilities include seismic bracing and penetration (coordinated with the A/E of record).

6. Schedule, Access & Logistics

• Confirm tool arrival windows, cleanroom turnover, utility readiness.

• Identify blackout periods, gowning capacity limits, and after-hours rules.

• Confirm rigging paths, temporary partitions, and storage availability.

Response:

• Turnover: Tool move-in begins post-Substantial Completion of the base building.

• Logistics: The POR identifies a dedicated Loading Dock and Equipment Entry path (POR Section 6.4.1) designed for large-scale semiconductor crates.

• Blackouts and Paths: To be determined with the awarded Respondent.

7. Safety, Permits, and EHS

• Define required permits (hot work, energized work, gas handling).

• Identify safety training requirements and lead times.

• Clarify gas/chemical leak check, purge protocols, and hazardous energy isolation.

Response:

• Permits: All work must comply with TAMU EHS standards. The Consultant manages tracking of hot work and energized electrical work (EEW) permits for tool vendors.

• Safety: Comply with industry standard safety protocol prior to beginning on site activity – not anticipated ahead of Q3’27

• Purge Protocols: High-purity gas lines require certified purge/weld maps before being connected to the tool.

8. IQ/OQ/PQ & Acceptance Criteria (Installation, Operation, and Performance Qualifications)

• Request approval process for IQ/OQ/PQ protocols.

• Define environmental and utility entry criteria before IQ.

Response:

• Role: The Consultant's role is to oversee, coordinate, witness, and review the IQ/OQ/PQ process (RFP Section 3.3.D).

• Execution: While tool vendors execute the "OQ," the Consultant ensures the utilities meet the "IQ" entry criteria.

9. Turnover Documentation

• Confirm required as-builts, O&M manuals, calibration certs, weld maps, test results.

• Specify file formats: PDF, DWG, Revit Version, COBie.

Response:

• Formats: Deliverables must be in PDF and Revit (Industry standard for A&M is Revit 2022 or newer).

• Requirements: Weld logs, pressure test certs, and updated P&IDs are mandatory for the final tool file.

10. Commercials, Warranty & Risk Allocation

• Confirm we are not liable for production loss or facility defects.

• Confirm warranty split between contractor and tool vendor.

• Provide change criteria for resequencing, vendor delays, and contamination events.

Response:

• Confirm we are not liable for production loss or facility defects:

o The Consultant is not liable for consequential damages, including production loss, loss of profit, or business interruption, as these are unquantifiable manufacturing risks. While the Consultant is not responsible for latent facility defects in the base building or MEP systems, they do accept professional liability for the accuracy of the Facility Interface Design (FID) and the quality of installation oversight. Liability is strictly limited to the cost of remediating installation errors to achieve "Tool Ready" status, expressly excluding any liability for wafer scrap or lost production time during such remediation.

• Confirm warranty split between contractor and tool vendor:

o The warranty split for the TSI project adheres to industry standards by utilizing a "Point of Use" (POU) demarcation line: the Installation Contractor provides a "to the skin" warranty covering the integrity and purity of utility laterals from the sub-fab to the tool, while the Tool Vendor (e.g., AMAT, TEL, Lam Research) maintains an "inside the skin" warranty for equipment functionality and process performance. As the Cleanroom Tooling Consultant, the Respondent manages this transition by overseeing the IQ/OQ/PQ process, ensuring that utility installations meet vendor specifications to prevent voiding warranties and validating that the equipment reaches final acceptance criteria.

• Provide change criteria for resequencing, vendor delays, and contamination events:

o Change criteria for resequencing are triggered when tool delivery shifts necessitate lateral utility modifications that increase trade labor or disrupt "Clean Build" protocols. Vendor delays trigger cost-allocation changes if the facility must maintain a "Ready State" (HVAC/HEPA/UPW) beyond a specified grace period, typically 5–10 days. Contamination events trigger immediate changes based on any deviation from ISO Class 5 (Class 100) certification, requiring specialized bio-decontamination and particle validation before work resumes. Under the TSI RFP, the Consultant documents these events to ensure that deviations in schedule or environment do not compromise the facility's success criteria of space flexibility and packing density.

11. Section 3.3A, Pre-Installation Planning: Please provide any existing documents such as: programming, design development or contract documents that could assist in the understanding of the state of MEP systems required to serve the tools.

Response: To be provided to the awarded Respondent when available.

12. Section 3.3A, Pre-Installation Planning: Does the TSI have a overall project schedule with required milestone dates?

Response: Not at this time – this needs to be defined once equipment list finalized and lead times confirmed. On-site activity not anticipated to start before Q3’27.

a. Are toolsets purchased and have delivery date been identified? Please provide a detailed overall schedule with milestones including but not limited to:

1. Toolsets purchased and associated targeted delivery date. Orders not yet placed – to be placed in H2’26.

2. Toolsets pending purchasing and associated targeted delivery dates. Orders not yet placed – to be placed in H2’26.

3. TSI’s targeted “acceptance” for tool move-in. Facility will be fully commissioned in January 2028 and move in activity can happen thereafter.

13. Section 3.3A, Pre-Installation Planning: Toolsets:

a. How many toolsets are to be included in this proposal? To be determined – range 15-30

b. What type of toolsets will be installed as part of this work scope? 300mm semiconductor process tools from industry standard makes such as TEL, Lam, Applied Materials etc.

c. Are any tools relocated from other facilities? If so, is the vendor facilitating installation?

Response:

Tool Count: The POR lists a wide array of tools across Lithography, Etch, Thin Films, and Metrology.

(Note: Specific tool counts are subject to the finalized "Project Equipment List"). Yes, there will be some reuse tools. OEM support will be contracted to support equipment install and bring up.

14. Section 3.3A, Pre-Installation Planning: If new tools are being purchased directly from the manufacturer, will the manufacturer be providing installation services?

Response: Yes

15. Section 3.3A, Pre-Installation Planning: It is anticipated that the owner has personnel and teams to perform any required process controls. Please confirm.

Response:

Confirmed. The TSI User Group, which includes the Technical Lab Manager and various Research Professors, is designated as the primary team responsible for process-specific controls and experimental oversight. The Respondent is expected to provide the technical framework and facility readiness (utility quality and environmental stability) that allows these owner teams to execute their process-specific functions effectively.

16. Section 3.3A, Pre-Installation Planning: Will the design team have access to individual tool owners/process engineers, who will be able to identify the chemistry and specific requirements for each tool?

Yes, as hired and onboarded subject to availability of hired personnel, the design team will have direct access to the TSI User Group and designated Principal Investigators (PIs). This interface is critical for the "Utility Requirements Analysis" required in Section 3.3A to accurately identify the high-purity chemistries, specialized gas flow rates, and specific emission profiles for each research tool.

17. Section 3.3A, Pre-Installation Planning: Do all required services exist in the building, i.e. gases, DI water, HPMs, PCW loops, Chemicals / CDU’s, etc.?

a. If not, what should be assumed for scope of these services?

b. Does the fabrication require any heavy metal processes? Are collection / treatment systems already designed?

c. To what extent will water reclamation and reuse be required? Is this part of our scope?

Response:

Existing Services: The POR (Section 5) confirms the building includes:

• Gases: N2, O2, Ar, H2, He, CDA, and Specialty Gas storage.

• Water: UPW (Ultra-Pure Water) and PCW (Process Cooling Water) loops.

• Exhaust: Acid, Solvent, and General exhaust systems.

18. Section 3.3C, Onsite Supervision of Installation Activities: Define the on-site supervisions requirements. Is this continuously during installation or on a weekly or biweekly basis, or other?

Response:

Industry standard for "Hook-up" is continuous onsite presence during active rigging and connection phases to manage critical safety and "Clean Build" compliance.

19. Section 3.3C, Onsite Supervision of Installation Activities: Confirm that the site supervision is for observation of installation activities performed by the tool vendors. The design team cannot direct contractor work as our insurance does not cover this work scope.

Response:

Confirmed. The Consultant provides technical oversight and observation. They do not direct trade labor but do have the authority to "Stop Work" for safety or protocol violations (e.g., vacuum breach or contamination).

20. Section 3.3C, Onsite Supervision of Installation Activities: Please confirm that this scope of work does not require construction work – in other words it is assumed the Owner will contract separately for construction work and associated safety responsibilities required to complete toolset installation.

Response:

Confirmed. This RFP is for professional consulting and management. Owner (A&M System) contracts separately for construction and safety certification.

21. Section 3.3D, Qualification of Installed Tools: Further define the IQ, OQ, and PQ requirements as noted in section 3.3 D. Our experience is that the IQ, OQ, and PQ requirements are typically performed by the tool manufacturers in conjunction with the owner based on the style and type of semiconductor being made. Please confirm that scope of this RFP is to manage the process and the tool team who performs the installation.

In the equipment validation process, Installation Qualification (IQ) ensures that essential utilities like gas, water, and power align with the tool manual specifications, followed by Operational Qualification (OQ) to verify power-on sequences and safety interlocks, and finally Performance Qualification (PQ) to validate specific recipes and wafer-state results. Throughout these phases, the Respondent acts as the Management Lead, responsible for coordinating the overall schedule, witnessing critical tests, and performing final documentation reviews, while the technical execution is handled by the Tool Vendors and the TSI User Group.

22. Section 4.2 D: Please confirm that facility system commissioning is not intended to be included in this scope of work? i.e. please confirm 3rd party facility systems commissioning. If so, please define the scope of commissioning services required.

Response:

Facility commissioning (HVAC, Life Safety, Base UPW) is excluded from this scope; it is handled by the base-building commissioning agent (CxA). The Consultant’s scope begins at the Point of Connection (POC) for tool-specific laterals.

23. Section 4.4 notes “Provide a cost proposal that includes all costs, rates and fees associated with the Services as described in Section 3”. Due to numerous questions related to Section 3, will you consider qualifications only for the first step submission?

Response:

No. In lieu of a total cost proposal for all services defined within Section 3, Respondents may provide a rate-card-based fee structure. The rate card shall include all identifiable and known costs associated with the scope and services required.

24. For the Pre-Installation Planning activities described in Section 3.3.A (utility requirements analysis, facility interface design, equipment layout and placement, and logistics planning), clarify whether the Respondent’s role is intended to support and coordinate with the project design team through technical review and recommendations, or to produce detailed design drawings and specifications?

Response:

Per the requirements of Section 3.3.A, the Respondent’s role is intended to be proactive and generative rather than strictly advisory. While the Respondent will coordinate closely with the base-building project design team (A/E of record) to ensure structural and utility capacity alignment, the Respondent is specifically responsible for producing the detailed Facility Interface Design (FID) drawings and specifications. This includes creating the 2D/3D "to the skin" installation packages for each tool—defining precise point-of-connection (POC) locations, lateral routing, and POU requirements—to ensure that trade contractors have actionable, construction-ready documentation for the equipment hook-up phase.

25. For the Qualification of Installed Tools activities described in Section 3.3.D, clarify whether the Respondent’s role is intended to oversee, coordinate, witness, and review Installation Qualification (IQ), Operational Qualification (OQ), and Performance Qualification (PQ) activities performed by tool vendors and end users, or to develop and execute the qualification protocols and tests directly?

Response:

The Respondent’s role for Section 3.3.D is intended to oversee, coordinate, witness, and review the IQ/OQ/PQ process to ensure compliance with the facility’s "to the skin" utility requirements and the TSI’s operational standards. While the Respondent will develop the master qualification framework and approval protocols to ensure consistency across different vendors (AMAT, TEL, Lam Research), the direct execution of internal tool tests and process-recipe runs is performed by the tool vendors (OQ) and the TSI end-users (PQ). The Respondent’s critical value lies in certifying that the "as-built" utility performance matches the tool’s requirements and providing the formal "Qualification Report" necessary for final tool acceptance.

26. Reference to Section 4.2 Technical Proposal (Items B & C): Facility and Cleanroom Readiness, provide the current target dates for:

• Building substantial completion

• Cleanroom completion and certification

• Utilities being fully available to support tool installation

This will help respondents align timelines and staffing with facility readiness.

Response:

For the Texas A&M Semiconductor Institute (TSI) project, the industry-standard response defines facility readiness through a sequential "Tool-Ready" (TR) milestone schedule. Building Substantial Completion is currently targeted for Q1 2028, covering the completion of the building envelope, primary MEP infrastructure, and life safety systems. This will be followed by Cleanroom Completion and Certification in Q1’28, which includes HEPA/ULPA filter installation, air balancing, and third-party ISO Class 5 (Class 100) certification under "at-rest" conditions. Utilities are expected to be fully available—the "Tool-Ready" state—by early Q1 2028, allowing the Consultant and trade contractors to begin lateral hook-ups from primary headers to the capital equipment. To remain aligned with these milestones, Respondents should propose a phased mobilization plan that begins with intensive pre-installation planning in Spring 2027 and transitions to full-time onsite supervision and qualification as the facility enters its operational window.

27. Reference to Section 4.2 Technical Proposal (Items B & C): Personnel Mobilization Timing

Based on the anticipated construction and cleanroom readiness, when does A&M expect consulting personnel to be required, particularly for:

• Pre-installation planning activities

• On-site supervision during tool installation

This will help align staffing plans with the expected project phases.

Response:

To align with industry standards for semiconductor fabrication (Intel/TI model) and this RFP (TSI-26- 256), personnel mobilization for the Texas A&M Semiconductor Institute is structured as a two-phase, "stair-step" progression designed to match the facility's transition from construction to operations.

The first phase, Pre-installation Planning, is slated to begin immediately upon contract award in Spring 2026, utilizing a lean technical team of Lead Planners and BIM Engineers to execute utility requirements analysis and Facility Interface Designs (FID) while base-building construction continues.

The second phase, On-site Supervision, requires a full-time mobilization of field managers and safety leads to coincide with the "Tool-Ready" milestone in late Q4 2026 or early Q1 2027. This phased approach ensures that high-level design and procurement activities are completed remotely or part-time during the early stages, followed by a robust onsite presence to manage the complex physical rigging and "to the skin" hook-up of capital equipment once the cleanroom achieves ISO Class 5 certification.

28. Reference to Section 4.2 Technical Proposal (Items B & C): Tool Installation Timing, Volume, and Pace

• Is there an anticipated start date for semiconductor tool move-in and installation activities?

• Additionally, is there an estimated total number of semiconductor tools expected under this engagement, and what is the expected average or peak number of tools per month for installation and qualification?

This information is needed to develop a realistic project plan and milestone schedule as requested in Section 4.2-C.

Response:

Building substantial completion and cleanroom certification are typically targeted for early Q1’28. The TSI Ballroom is designed for a phased installation. Initial waves focus on lithography and core metrology, followed by etch and deposition. Estimates for the total tool count range from 15-30 major toolsets over a 6–12-month continuous installation window.

29. Reference to Section 4.2 Technical Proposal (Items B & C): Phasing of Tool Installation. Is there a phased installation approach (for example, early tools followed by later installation waves), or a single continuous installation period?

Response:

Pre-installation planning begins immediately upon contract award (Spring 2026). Onsite supervision begins with the first tool move-in (Late 2026/Early 2027).

30. What is the approximate number of tools being installed? Over what time period?

Response:

The TSI Ballroom is designed for a phased installation. Initial waves focus on lithography and core metrology, followed by etch and deposition. Estimates for the total tool count range from 15-30 major toolsets over a 6–12-month continuous installation window.

31. What is the building structure (Fab and Subfab, Utility Level)?

Response:

Design: The TSI is a "Ballroom" style cleanroom with a Sub-fab or deep crawl space for utility routing (POR Section 3.3).

32. Will building plans be available at the start of the Pre-Installation Planning Phase?

Response:

Full architectural and MEP as-built models (Revit) will be available at the start of the Pre-Installation Planning Phase.

33. Are tool blocks available to use to prepare the Equipment Layout and Placement or will the responder be required to create them?

Response:

Tool Blocks: TSI will provide existing 2D/3D tool blocks for standard equipment. The Respondent is responsible for creating or modifying blocks for unique or custom research tools based on vendor manuals.

34. Will there be vendor drawings and data sheets available for the tools?

Standard vendor drawings and Facility Interface Data (FID) sheets will be provided for all major capital equipment purchases.

35. Does A&M System have a preferred method for tracking tool facility point of connection assignments?

Response:

A&M System utilizes an Integrated Utility Matrix (IUM) linked to the BIM (Revit) Model. This allows for real-time tracking of capacity, POC assignments, and spare utility ports.

36. Are advanced lithography (EUV) tools part of the project plan?

Response:

No ASML EUV Litho Tools are currently planned for the facility.

37. Is it adequate to provide an anticipated headcount profile and rates for the cost proposal?

Response:

Yes – rate card provision with headcount profile is acceptable.

38. What is the anticipated contracting strategy for the trade contractors performing the tool install?

Response:

The A&M System will hire the trade contractors for installation at a later date.

39. Is the A&M System open to a conversation about contracting methods to deliver overall best value for the program?

Response: Yes, A&M System is open to discussing various methods available with the awarded Respondent. Respondent may include information regarding this within the proposal response.

40. Will the Respondent be involved in the selection of the trade contractors?

Response:

While the Respondent will not hold the construction contracts, they will be involved in the technical evaluation and qualification of trade contractors to ensure they possess the necessary "Clean Build" experience.

41. Will representatives of the tool suppliers participate in the qualification of the equipment?

a) Are the tools being qualified to ensure operability/functionality and readiness for experimentation OR, are there unique to A&M process recipes that must be qualified?

b) Is the Respondent responsible for payment to tool suppliers for needed install and qualification support?

Response:

• Qualification is primarily for operability and functionality. Unique process recipe qualification is the responsibility of the TSI Process Engineers, supported by the awarded Respondent.

• The A&M System would expect the payment to tool suppliers to remain the responsibility of the A&M System. However, the A&M System is open to discussing other options with the awarded Respondent.

42. What is the current planned start date and/or clean room operational date?

a) Will the tools be installed current with the MEP and cleanroom fit-up, or in a fully construction complete and commissioned facility?

Response:

Respondent is responsible for a comprehensive utility gap analysis to identify discrepancies between tool-specific needs and existing base-facility capacities. While the Respondent is not responsible for expanding base facility system capacities (such as central plant chiller or UPW makeup unit upgrades), they are fully responsible for the detailed design and management of all tool-specific lateral additions.

This includes the routing of utilities from the primary Point of Connection (POC) to the equipment’s Point of Use (POU), as well as the integration of any necessary tool-specific gas cabinets or chemical delivery units not provided by the centralized facility infrastructure.

43. Will the Respondent be requested to provide utility gap analysis and design for additional lateral buildouts?

a) Is the respondent responsible for base facility system capacity additions, lateral additions, new chem & gas system installations, etc. if required beyond the initial capability of the facility?

Response:

In alignment with the Texas A&M Semiconductor Institute (TSI) Program of Requirements (POR) and industry-standard fabrication designs (Intel/TI model), the base facility is equipped with high-capacity primary utility headers. These include Process Cooling Water (PCW), Ultra-Pure Water (UPW), Compressed Dry Air (CDA), Process Vacuum (PV), and a comprehensive gas delivery network for Nitrogen (GN2), Oxygen (GO2), Argon (GAr), and Hydrogen (GH2), alongside specialized Acid, Solvent, and General exhaust systems. Per the POR, Life Safety Systems (including Gas Detection Systems (GDS), fire suppression, and emergency power) and Data/Telecom infrastructure (high-speed fiber and copper backbone) are provided as part of the base building infrastructure. The Respondent’s scope begins at the lateral tie-ins to these existing headers to deliver these services directly to the individual semiconductor toolsets.

44. What are the base utilities planned for the facility?

a) Are life safety and data systems being provided with the base facility?

Response:

Base utilities are commissioned and qualified by others as part of the primary facility construction and acceptance process. The base-building General Contractor and a third-party Commissioning Agent (CxA) are responsible for the installation, startup, and certification of primary systems—including the central plant, main headers for high-purity gases, UPW makeup, and PCW loops—prior to the "Tool- Ready" milestone. The Respondent’s scope under this RFP is limited to the Installation Qualification (IQ) of the tool-specific lateral "hook-up" from the Point of Connection (POC) to the tool's Point of Use (POU), ensuring that the final utility delivery meets the specific purity and flow tolerances required by the equipment manufacturer (e.g., AMAT, TEL, Lam Research) without re-qualifying the entire facility backbone.

45. Will the base utilities be commissioned and/or qualified by others or is there a base facility qualification scope required?

Response:

The Respondent’s scope under this RFP is limited to the Installation Qualification (IQ) of the tool-specific lateral "hook-up" from the Point of Connection (POC) to the tool's Point of Use (POU), ensuring that the final utility delivery meets the specific purity and flow tolerances required by the equipment manufacturer without re-qualifying the entire facility backbone.

46. Are structural pedestals for the tools required based on weight or vibration concerns?

Response:

Structural pedestals are required for both weight distribution and vibration isolation to bridge the gap between the cleanroom raised metal floor and the structural sub-fab slab. High-mass tools, such as ion implanters or chemical mechanical polishing (CMP) systems, require pedestals to transfer heavy point loads directly to the primary structure, preventing deformation of the cleanroom flooring.

Simultaneously, vibration-sensitive equipment, particularly advanced photolithography scanners (e.g., ASML or high-end Nikon tools) and electron microscopes, utilize specialized pedestals with dampening properties to decouple the tool from ambient floor vibrations and mechanical noise.

47. Will seismic restraint design be required?

Response:

The Respondent is responsible for ensuring that all "to the skin" hook-ups and tool-specific structural pedestals include engineered seismic bracing. This design must mitigate the risk of utility line rupture or tool displacement during a seismic event, protecting both the facility infrastructure and personnel.

The Respondent must coordinate these designs with the structural engineer of record to confirm that all seismic anchors and lateral supports meet the specific Seismic Design Category (SDC) assigned to the College Station site.

48. What is the required tool install package format, 2D AutoCad or BIM modeling, Revit?

Response: The Respondent is responsible for updating the integrated BIM model for the tool-specific laterals and utilities (RFP 3.3.A).

49. Is there an integrated BIM model the responder is required to update/maintain?

Response: Yes

50. Is the Respondent responsible for maintaining the utility model?

Response: Yes

51. Is the Respondent responsible for procurement, preparation, and management of test wafers required for tool qualification?

Response:

The Respondent is responsible for updating the integrated BIM model for the tool-specific laterals and utilities (RFP 3.3.A).

52. What are the key success criteria for the overall project? Space flexibility, packing density, overall lowest cost, etc?

Response:

• Safety: Zero incidents during complex tool rigging.

• Schedule: Meeting the first "Tool-Ready" (TR) dates for the research programs.

• Flexibility: Ensuring the layout allows for future tool upgrades.

• Packing Density: Ensuring space used as efficiently as possible.

END OF ADDENDUM NO. 1