Attachment (B) Specifications.pdf
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- Attached to
- SXN Zone Plates and Spatial Resolution Standards
- Solicitation number
- RFQ_463440
- Issued by
-
Department of Energy Office of Science
About this file
This Request for Quote (RFQ) 0000463440 solicits high-quality Zone Plates and X-ray spatial resolution test standards from a contractor, specifically requesting three precise scientific components from XRnanotech or an exact equivalent: 1) A Fresnel Zone Plate (FZP250um-30nm-Ni) with a 250 µm diameter and 2000 eV energy range, 2) Another Fresnel Zone Plate (FZP320um-15-Ir) with a 320 µm diameter and 1000 eV energy range, and 3) A Hybrid Ultra-High Resolution X-ray Sample with 10 nm feature sizes.
The items must be fabricated to exact specifications, including precise substrate parameters like SiN membrane thickness, frame dimensions, and on-chip central stop characteristics. Delivery requirements mandate that items arrive at Brookhaven National Laboratory (BNL) defect-free, with a comprehensive delivery report including scanning electron microscope images to verify lithographic critical dimensions and tolerances. The components are guaranteed to meet technical specifications and can be replaced or exchanged within 12 months after delivery, with test target parameters including contrast materials of Iridium and Gold and design layouts featuring nested L-shape structures and Siemens Star test patterns.
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Text version
04/17/2025
RFQ 0000463440 – SXN Zone Plate and spatial resolution standard.
The Contractor shall supply high quality Zone Plates and X-ray spatial resolution test standard capable of meeting the following specifications:
1. Fresnel Zone Plate FZP & On-chip Central Stop (model: FZP250um-30nm-Ni)” from XRnanotech or exact equivalent
a. Energy Range [eV]: 2000
b. Diameter [um]: 250
c. Outermost Zone Width [nm]: 30
d. Design: Binary
e. Contrast Material: Ni, 634 nm
f. Substrate Specifications
i. Frame Area [mm x mm]: 5 x 5
ii. Membrane Material: SiN
iii. Membrane Thickness [nm]: 250
iv. Membrane Area [mm x mm]: 2 x 2
g. On-Chip Central Stop
i. Material: Au
ii. Thickness [um]: 5
2. Fresnel Zone Plate FZP & On-chip Central Stop (model: FZP320um-15-Ir)” from
a. Energy Range [eV]: 1000
b. Diameter [um]: 320
c. Outermost Zone Width [nm]: 15
d. Design: Ir-line doubled
e. Contrast Material: Ir, 217 nm
f. Substrate Specifications
i. Frame Area [mm x mm]: 5 x 5
ii. Membrane Material: SiN
iii. Membrane Thickness [nm]: 250
iv. Membrane Area [mm x mm]: 2 x 2
a. On-Chip Central Stop
v. Material: Au
vi. Thickness [um]: 5
3. Hybrid Ultra-High Resolution X-ray Sample (10 nm) (model: HRTT10nm-Ir/Au)” from
a. Membrane Substrate Parameters
i. Si frame dimensions [mm x mm]: 5 x 5
ii. Membrane material: SiN
iii. Membrane dimensions [mm x mm]: 2 x 2
iv. Membrane thickness [nm]: 250
b. Test Target Parameters
i. Contrast Material: Iridium, Gold
ii. Smallest feature size [nm]: 10 (Ir), 50 (Au)
c. Design Layout
i. Nested L-shape structures & Siemens Star test patterns.
- The items shall be fabricated according to the above specification and shipped with a delivery report that includes scanning electron microscope images to qualify and very lithographic critical dimensions and tolerances.
- Height mapping data shall be included where it is possible to verify feature thickness.
- The items to arrive at BNL shall be free of defect and damage. The items shall be guaranteed to meet quoted and agreed technical specifications and may be replaced or exchanged within 12 months after delivery.
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