Attachment (A) Statement of Work.pdf
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- Attached to
- SXN Zone Plates and Spatial Resolution Standards
- Solicitation number
- RFQ_463440
- Issued by
-
Department of Energy Office of Science
About this file
This Statement of Work (SOW) details Brookhaven National Laboratory's requirements for high-quality zone plates and spatial resolution standards for the 29-ID-1 SXN beamline at the National Synchrotron Light Source II (NSLS-II). The contractor must design, manufacture, assemble, and test three specific items: two different Fresnel Zone Plate (FZP) models with on-chip central stops (250um-30nm-Ni and 320um-15-IR) and one Hybrid Ultra-High Resolution X-ray Sample with 10nm features, all from XRnanotech or exact equivalents.
The deliverables must be fabricated to precise specifications, including specific membrane materials, dimensions, and contrast materials. The contractor is required to provide a delivery report with scanning electron microscope (SEM) images verifying critical dimensions, package each item separately, clean them for ultra-high vacuum use, and ensure they are free of defects. The items must be delivered within 12 weeks after contract award, come with a minimum one-year warranty, and meet all quality assurance requirements set by Brookhaven National Laboratory. The total quantity includes two of each FZP model and one hybrid sample, all to be shipped to BNL and guaranteed to meet technical specifications.
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Text version
Brookhaven National Laboratory Number: NSLSII-29ID1-SOW-SPC-002
Brookhaven Science Associates Version: 1
National Synchrotron Light Source II (NSLS-II) Effective: 20MAY2025
Version 1 1
29-ID-1 (SXN) beamline Zone Plate and Spatial Resolution Standard
Statement of Work and Technical Specification
QA Category: A4
Document Reviewed and Approved By:
Prepared by Approval Wen Hu NSLS-II Optical Design Scientist
Approved By Lindsay Garske NSLS-II Quality Assurance Engineer
This information is controlled by the U.S. Department of Commerce Export Administration Regulations 15 CFR Parts 730-774 as EAR99 Technology.
Version 1 2
VERSION HISTORY LOG
VERSION DESCRIPTION DATE AUTHOR
1 First Issue 20MAY2025 W. Hu
Version 1 3
Background/Statement of Work
The SXN beamline at NSLS-II requires high quality zone plates and spatial resolution standard. The Contractor shall be responsible for the design, manufacture, assembly, and testing of the equipment. The Contractor shall provide a test report, that includes scanning electron microscope (SEM) images to qualify and verify lithographic critical dimensions and tolerances, demonstrating that the items meet the specifications below prior to shipping of the equipment to BNL. The height mapping data shall be included, where it is possible, to verify feature thickness. Each item shall be packaged separately before shipping and cleaned for ultra-high vacuum (<1E-8 Torr) application. All items shall then be shipped to BNL and shall be free of defects and damage.
Scope of Supply
The Contractor shall provide Brookhaven National Laboratory (BNL) with high quality zone plates and spatial resolution standards that will be used at the 29-ID-1 SXN beamline at NSLS-II.
The detailed specifications include:
• Two (2) Fresnel Zone Plate FZP & On-chip Central Stop (model: FZP250um-30nm-Ni) from XRnanotech or exact equivalent
a. Center Energy [eV]: 2000
b. Diameter [um]: 250
c. Outermost Zone Width [nm]: 30
d. Design: Binary
e. Contrast Material: Ni, 634 nm
f. Substrate Specifications
i. Frame Area [mm x mm]: 5 x 5
ii. Membrane Material: SiN
iii. Membrane Thickness [nm]: 250
iv. Membrane Area [mm x mm]: 2 x 2
g. On-Chip Central Stop
i. Material: Au
ii. Thickness [um]: 5
• Two (2) Fresnel Zone Plate FZP & On-chip Central Stop (model: FZP320um-15-IR) from XRnanotech or exact equivalent
a. Center Energy [eV]: 1000
b. Diameter [um]: 320
c. Outermost Zone Width [nm]: 15
d. Design: IR-line doubled
e. Contrast Material: IR, 217 nm
f. Substrate Specifications
i. Frame Area [mm x mm]: 5 x 5
ii. Membrane Material: SiN
iii. Membrane Thickness [nm]: 250
iv. Membrane Area [mm x mm]: 2 x 2
g. On-Chip Central Stop
i. Material: Au
ii. Thickness [um]: 5
▪ One (1) Hybrid Ultra-High Resolution X-ray Sample (10 nm) (model: HRTT10nm-IR/Au) from XRnanotech or exact equivalent
a. Membrane Substrate Parameters
Version 1 4
i. Si frame dimensions [mm x mm]: 5 x 5
ii. Membrane material: SiN
iii. Membrane dimensions [mm x mm]: 2 x 2
iv. Membrane thickness [nm]: 250
b. Test Target Parameters
i. Contrast Material: Iridium, Gold
ii. Smallest feature size [nm]: 10 (IR), 50 (Au)
c. Design Layout
i. Nested L-shape structures & Siemens Star test patterns.
- The Contractor shall fabricate the items according to the above specification and provide a delivery report that includes SEM images to qualify and verify lithographic critical dimensions and tolerances.
- Each item shall be packaged separately before shipping and cleaned for usage in ultra-high vacuum chamber (<1E-8 Torr).
- Height mapping data shall be included where it is possible to verify feature thickness.
- The items to arrive at BNL shall be free of defect and damage. The items shall be guaranteed to meet technical specifications and can be replaced or exchanged within 12 months after delivery.
- Warranty shall be a minimum of one year.
- The Contractor shall ensure a proper and complete flow-down of all applicable QA requirements, as set forth in BSA form BNL-QA-101, Brookhaven National Laboratory Supplier Quality Assurance Requirements.
Deliverables
Describe each deliverable.
Deliverable Description Due Date (in # of days or weeks after contract award) Do not put a specific date in here.
Delivery of products at BNL All items shall be fabricated according to the specification and shipped free of defect and damage with a delivery report.
12 weeks after award of contract
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