Attachment 1 - Specifications.pdf

Requirements / Specification Document

TITLE: Thermo-Reflectance Probe Station

Requesting Laboratory / Division / Group:

Communications Technology Laboratory Radio Frequency Technology Division Guided Wave Metrology Group (672.01)

General Statement of Need:

A semi-automatic microwave probe station is required to upgrade an existing thermo-reflectance measurement system to enable automated measurements of the temperature distribution of semiconductor devices and circuits under operating conditions. The system must be compatible with existing brand name Microsanj thermos-reflectance hardware and software systems. This will enable a new NIST capability needed for current projects to enable measurements of the temperature dependence of chip-scale devices and circuits under pulsed and continuous wave radio-frequency stimulus, while the device is operating.

This information is critical for validating finite-element models of standard microwave calibration standards under variable temperature conditions.

Item Specifications and Quantities:

Item 1: Thermo-reflectance Microwave Probe Station

Quantity: 1

Specifications: 1.1

1.1.1

1.1.2

1.1.3

1.1.4 1.1.5 1.2 1.2.1 1.2.2

200mm semi-automated probe station, compatible with brand name Microsanj EZ-500 thermo-reflectance instrumentation and optics Enables probing of up to 200mm wafers, and probing at temperatures below zero Celsius without condensation or ice formation Vacuum system for use with different wafer sizes, from 200mm diameter down to 10mm x 10mm Automated chuck positioning with at least 210 x 490 mm XY motion and 30mm chuck z-direction motion Integrated vibration isolation table with active load leveling Stable microscope bridge mount 200mm thermal chuck system Temperature-controlled over the range +20 to +200C

1.3

1.4

1.5 1.5.1

1.5.2 1.5.3

1.5.4 1.5.5

1.6 1.7 1.8

1.9

1.10

1.11

1.12 1.13 1.14

Vacuum areas for single ICs down to 5mm x 5mm and for 100mm, 150mm, and 200mm wafers Two ceramic auxiliary chucks, for calibration substates up to 20mm x 20mm Programmable microscope with 50mm x 50mm x140mm XYZ programmable movement Digital zoom microscope with large field of view High-resolution CCD camera: at least 6.55MP and 40x zoom factor, USB3 communication 5X objective lens for 3.94mm x 3.94mm field of view Embedded dedicated brand name Microsanj thermal imaging camera, 2.3MP Sliding, dual-objective nosepiece to hold two objectives Multi-wavelength beam combiners for LED collimator sources 5X long working distance objective, working distance 45mm Motion controller for up to four probe micropositioners Two automated micropositioners for probe arm control in east-west postions, bolt down, 13mm travel in XYZ, including manual XYZ control Two probe arms for east-west orientation; compatible with standard microwave wafer probes; includes probe planarity adjustment; including RF cable guides Instrument shelf located directly behind probe station for installing vector network analyzer close to wafer probes Integrated software for motion control of chuck, microscope, wafer probes with automation for wafer probing GPIB interface for external computer control Installation and training on-site Shipping to site

[List any additional item(s) or service requirements using the same format.]

Procurement Support Information and Ancillary Services:

[Provide input for each section Below or Mark Not Applicable (N/A)]

Section Requirements/Specifications

Planning Considerations

☒ N/A

☐ List any visits required to allow potential vendors to see site specific constraints.

[Explain Requirements.]

☐ US citizen required on-site (foreign nationals require pre-registration 30 days prior to visit.)

☐ Vendor Representative On-Site more than three (3) days.

☐ Other Considerations:

[List other considerations to ensure an accurate quote.]

Shipping & Delivery

☐ N/A

Shipping Address:

☒ NIST-Boulder ATTN: James C. Booth Mail Stop: 672.01 325 Broadway Boulder, CO 80305

☐ NIST-Gaithersburg

ATTN:

Mail Stop:

100 Bureau Dr Gaithersburg MD 20899

☐ [Alternate Shipping Address]

Shipping Criteria:

☐ Partial Delivery Acceptable

☐ [Enter Shipping and Delivery information by item.]

☒ Direct Delivery to OU Building Required

[Explain Need for Requirement] Building /Room Number: 81/1E113

☒ Building has Loading Dock Containerization Preference: [Enter Container Type]

Other Requirements:

[List Any Other Requirement] Delivery Date Criteria:

☒ Delivery Shall Be Competed No Later Than:

3/31/2026 ☐ Delivery Shall Be Made No Earlier Than:

Click or tap to enter a date.

☐ Scheduled Deliveries:

Item Number Due Date

☐ Other:

[List Other Shipping, Delivery or Special Requirements.]

Electronic Media

☐ N/A [Enter Electronic Media Requirements by Item.]

☐ Software

☒ Electronic Manuals

☐ License Key

☐ Other:

[List Any Other Electronic Media Requirements]

☐ US Government Email Address for Software Delivery:

[Enter Address]

Installation

[Enter Installation Requirements by Item]

☐ Vendor Technician on Site

☐ Rigging

☒ Uncrating / Unpackaging

☐ Removal of Packaging Material

☒ Equipment Set Up

☐ Start-Up Services

☐ Turnkey Installation

☐ Other:

[Enter Details]

NOTE: SME shall be the coordination POC.

Facility / Utility Considerations

☐ N/A

[List Site Specific Utility Considerations by Item]

☐ OFPM Work Order Numbers

[List Work Order Numbers]

☒ Power Available

Voltage: [Enter voltage] (V)

Maximum Current: [Enter max current draw] (A)

Phase: [Choose Phase]

Frequency: [Typically 60Hz] (Hz)

NEMA Plug Type: [Enter Plug Type] (i.e.: NEMA L5-20P)

Environment: [Choose Environment]

Other Power Considerations:

[List Any Other Power Considerations.]

☒ Utility Connections:

Compressed air

☐ Other Considerations:

[List Other Considerations to Ensure an Accurate Quote.]

Inspection and Acceptance

☐ N/A

[Inspection Requirements Per Item (Who, When, What, Where)]

☒ On-Site

☐ Acceptance Not Expected to Exceed 7 Business Days

☒ Acceptance Expected to Exceed 7 Business Days:

[Duration]

☐ Inspection and Acceptance Plan:

[Explanation]

[Enter Other Requirements]

Training

Training Requirements (Who, When, What, Where)

☒ Number of Trainees: Up to 3

☒ On-Site

☐ Off-Site Location: [Enter Location(s)]

Is Trainee Travel Required: [Choose Answer]

Scope of Training ☐ Operation ☐ Maintenance ☐ Troubleshooting

☐ Safety ☐ Other

[Enter Other Scope of Training Requirements]

☐ Training Materials to be Provided by Government:

[Describe Materials]

☐ Training Materials to be Provided by Vendor:

[Describe Materials]

☐ Other

[Enter Other Training Requirements]

NOTE: SME shall be coordination POC.

Warranty

Base Manufacturer Warranty is acceptable

Warranty Length: [i.e. 3 - Years]

What is included?

☐ Labor ☐ Parts ☐ Travel

☐ Cost and Liability for Returns

☐ Other [Enter Other Requirements]

☐ 1 Option Period

☐ 2 Option Periods

☐ 3 Option Periods

☐ 4 Option Periods (Maximum)

Calibration

☒ N/A

[Describe Calibration Requirements Per Item] Calibration Plan Length: [i.e. 3 - Years] What is Included?

☐ Labor ☐ Spare Parts ☐ Consumables

☐ Travel ☐ Cost and Liability for Shipment

☐ Software Updates ☐ Manuals

☐ Other

☐ Requirements:

[Enter Requirements] (i.e.: On-Site Within 72 hours, etc.)

☐ 1 Option Period Length: [i.e. 1 – Year / 6 - Months]

☐ 2 Option Periods

Maintenance

[Describe Maintenance Requirements Per Item] Maintenance Plan Length: [i.e. 3 - Years] What is Included?

☐ Labor ☐ Spare Parts ☐ Consumables

☐ Travel ☐ Cost and Liability for Shipment

☐ Software Updates ☐ Manuals

☐ Other

[Enter Other Requirements] ☐ Requirements:

[Enter Requirements] (i.e.: On-Site Within 72 hours, etc.)

☐ 1 Option Period Length: [i.e. 1 – Year / 6 - Months]

☐ 2 Option Periods

Government Furnished Material / Equipment

☒ N/A

List Any Government Furnished Material / Equipment Per Item]

☐ Samples for Testing

☐ Equipment which will leave Government Site

Description:

Serial Number:

NIST Property Number:

[Enter Description] [Enter Serial Number] [Enter NIST Property Number]

☐ Other: [Enter Other Details]

Travel

[Describe any Travel Requirements Per Item]

☐ Explain:

[Enter Justification / Requirement]

NOTE TO VENDOR: To the maximum extent possible, include travel requirement estimates as part of pertinent sections above (Installation, Maintenance, Repair, etc.). Otherwise, Travel will be a separate line item, reimbursable per the Federal Travel Regulation.