Attachment 1 SOW.pdf

STATEMENT OF WORK

Title: Gas Chromatograph with Flame Ionization Detector and Pulsed Discharge Helium

Ionization Detector Lab: Material Measurement Laboratory

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.ௗ

As part of CHIPS Grand Challenge 1: Metrology for Materials Purity, Properties, and Provenance, we will create measurement technology, reference data and materials to perform trace impurity gas analysis at new levels of precision. Success will enable next-generation diagnostics to reliably identify impurities in process gases at sub-parts-per-billion (<1 ppb) levels. Results will drive partners to develop industry-ready reference materials, point-of-use diagnostics and models to achieve breakthroughs in critical tooling like extreme ultra-violet lithography. Our diagnostics and metrology-grade data will enhance quality systems by establishing a framework for impurity fingerprinting with traceability to new gas primary standards, reference materials and documentary standards.

II. PURPOSE

The Gas Sensing Metrology Group (GSMG) of the Chemical Sciences Division (CSD) will develop primary standards and reference materials for “zero gas” semiconductor and electronics-grade gases. Development of such standards will require specialized instrumentation to properly separate, identify, and quantify trace impurities at sub-parts-per-billion levels.

One of the instruments needed is a gas chromatograph fitted with a flame ionization detector and a pulsed discharge helium ionization detector (GC-FID/PDHID), to enable improved separation and detection for a broad range of trace gas impurities.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Gas Chromatograph with a Flame Ionization Detector and Pulsed Discharge Helium Ionization Detector (GC-FID/PDHID)

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Quantity: One (1) A. Technical Specifications

a. System

i. The Gas Chromatograph shall be configured for the analysis of gases delivered through a regulator from a gas cylinder.

ii. The Gas Chromatograph shall have a Flame Ionization Detector (FID) and a Pulsed Discharge Helium Ionization Detector (PDHID).

iii. The Gas Chromatograph shall have 6-port gas sampling valve (GSV) with the ability to heat valve to 75 °C and support a gas sample loop of up to 10 mL volume within the heated zone.

iv. The Gas Chromatograph shall have a 10 mL sample loop installed at delivery.

v. The Gas Chromatograph shall have a pneumatically actuated heart cut valve to divert balance gas to vent.

vi. The GC shall be equipped with helium mass spectrometer leak-tested valves as needed for PDHID.

vii. The GC shall be equipped with helium purifiers needed for primary and secondary helium purification as needed for PDHID.

viii. The Gas Chromatograph shall have an injector with the ability to support the use of packed columns.

ix. The Gas Chromatograph shall have a flow control system capable of supporting the use of packed columns.

x. The Gas Chromatograph shall have a flow control system capable of diverting the sample flow from the GSV to vent prior to injection [according to software-controlled timetable] to ensure that the sample volume is constant [e.g., 3-way solenoid valve].

xi. The Gas Chromatograph will be equipped with a micro-electrically actuated, 12-position stream select valve that is managed through the respective instrument software and that allows unselected streams to be dead headed.

xii. The Gas Chromatograph shall have a GC oven box with temperature program capability.

xiii. The Gas Chromatograph shall have a GC oven liquid nitrogen cooling capability.

xiv. The Gas Chromatograph shall have a Remote start and stop capability through contact closure (relay). End of run signal out capability (digital out).

b. Software

i. The Gas Chromatograph shall have software to control all GC functions, collect chromatographic data, perform data analysis and export selected data to an excel spreadsheet with a permanent software license (at delivery).

ii. The Gas Chromatograph shall have software documentation that will document how a user computer program written in Visual Basic Version 6.0 can gain access to analytical data after a run has terminated, and for the user program to inform the GC control software

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iii. The Gas Chromatograph shall have software capable of controlling a 12-port gas sampling valve mounted atop the instrument allowing for controlled sample injection.

c. Manual

i. The Gas Chromatograph shall have an operations and maintenance manual. The manual can be in the form of a digital and/or hard copy.

IV. SCHEDULE OF DELIVERABLES

Deliverable Number Description Quantity Due Date

Place of Delivery

1 Gas Chromatograph One (1)

Within 90 days after award

NIST Gaithersburg

2 Operations and maintenance manual

One (1)

Within 90 days after award

NIST Gaithersburg (or electronic delivery if digital format)

3 Installation Once Within 10 days after receipt of instrument

NIST Gaithersburg

4 Training Once Within 10 days after installation

NIST Gaithersburg

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 10 days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.).

PLACE OF PERFORMANCE

The Contractor shall provide instrument delivery, installation, and training at the National Institute of Standards and Technology, 100 Bureau Dr., Gaithersburg, MD 20899, Building 227.

Regular Business Hours Regular business hours are Monday through Friday, (8:30 am to 5:00 pm) Eastern Time, excluding Federal holidays and NIST closures.

PERIOD OF PERFORMANCE

Instrument delivery shall occur within 90 days after date of award. Installation shall occur within 10 days after receipt of instrument, unless laboratory upgrades/repairs prohibit installation. In the case of such repairs, instrument installation will be scheduled once laboratory conditions are suitable. Training shall occur within 10 days of installation.

V. DELIVERY TERMS

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Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 POC Christina Cecelski, Building 227

VI. INSTALLATION

The Contractor shall install the instrument at the National Institute of Standards and Technology, 100 Bureau Dr., Gaithersburg, MD 20899, Building 227, Attn: Mrs. Christina Cecelski. Installation shall include, at a minimum, uncrating/unpacking of all equipment, set-up and hook-up of all equipment, start-up, demonstration of specifications, and removal of all trash. Instrument shall operate to manufacturer’s specifications upon installation. Installation shall take place during normal business hours, between 8:30 am and 5:00 pm Eastern Time, Monday through Friday except Federal Holidays, and shall be coordinated with the NIST Technical Point of Contact (TPOC). Installation shall occur within 10 days after receipt of instrument.

VII. TRAINING

The Contractor shall provide at least 2 hours of training at NIST for up to two (2) NIST personnel covering normal operation, troubleshooting, and routine maintenance. Training shall be provided during normal business hours, between 8:30am and 5:00pm Eastern Time, Monday through Friday, except Federal Holidays, and shall be coordinated with the NIST Technical Point of Contact (TPOC) to ensure maximum availability of NIST personnel. Training shall occur within 10 days of installation.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

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The Contractor shall be responsible for demonstrating that all requirements are met. The Contractor shall also be responsible for providing evidence showing compliance with the requirements of the specifications sheet and installation test below [the customer will provide the test gases and packed column]:

Performance Tests:

1. After installation in our laboratory, the instrument shall show:

i. a response repeatability (relative standard deviation) for 10 runs of 1 ppm methane in nitrogen or air of (minimum) 0.2 % relative area counts or less for the FID, and

ii. a representative chromatogram demonstrating detection of trace impurities in nitrogen or air for the PDHID.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 10 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY

The Contractor shall provide, at a minimum, a one-year warranty for the equipment. The warranty shall cover all parts, labor and travel. The warranty shall commence upon successful completion of delivery, installation, training and demonstration of all required specifications.

X. REQUIREMENTS FOR CONTRACTOR PERSONNEL

Identify all qualifications that the Contractor and/or their personnel working on this contract must possess.

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Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations (http://www-i.nist.gov/mml/safety/policies/ index.htm). Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.