Attachment 1 SOW.pdf

TEMPLATE

STATEMENT OF WORK

Title: Environmental Test Chamber Lab: Materials Measurement Laboratory/Applied Chemicals and Materials Division (647)

I. BACKGROUND INFORMATION

As part of the CHIPS Act, researchers at the National Institute of Standards and Technology (NIST) are engaged in metrology research and development to promote innovation and industrial competitiveness in U.S. semiconductor device manufacturing.

NIST has identified seven Grand Challenges in metrology research and development that require critical attention. As part of efforts to advance metrology tools and measurement science for Metrology for Materials Purity, Properties, and Provenance (Grand Challenge 1), NIST requires instruments for measurement of semiconductor microelectronic devices and their constituent materials.

Pursuant to the CHIPS mission, the Grand Challenge 1 Program’s strategy is to develop measurement technologies, properties data, and standards focused on defect and contaminant identification to support uniform materials quality and traceability across the supply chain. One specific effort within this program performs research and development to enable evaluation of two-dimensional and wide bandgap materials to further device reliability. This work is led by NIST’s Applied Chemicals and Materials Division, which characterizes the properties and structures of industrially important materials.

As part of this program to characterize two-dimensional and wide bandgap materials, NIST requires an environmental test chamber to perform reliability tests on next generation electronics.

II. PURPOSE

This environmental test chamber will allow for the testing of electronic devices and test structures made of GaN and 2D materials. This equipment adds the ability to do reliability testing to failure conditions. Addressing reliability of devices will allow for higher manufacturability and reliability in these innovative next generation electronics.

The work under this contract is to supply a standalone environmental test chamber for testing electronics devices. This test chamber needs to have the capability to adjust temperature and humidity within the chamber. An electronics controller allows for the control of the conditions within the chamber, while feedthroughs in the chamber allow for control of electronics boards inside the chamber. The chamber should have a broad range of temperatures and full range of humidity. The Contractor shall the test chamber, water recirculation system, gas purge system and control electronics inclusive of FOB Destination delivery, installation, warranty, and option line items.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

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The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Temperature Humidity Environmental Test Chamber Quantity: 1

A. Technical Specifications

a. >1.5 Cu Ft Workspace

b. Temperature -35°C to +175°C with control tolerance of ±0.5°C and uniformity of ±1°C.

c. Humidity 10% to 95% RH.

d. GN2 Purge System Included

e. Four Event Relays Included

f. Electronic Touch Screen Controller

g. High/Low Limit Control and Alarm

h. Viewing Window & Interior Light

i. 4 in Access Ports on Left & Right Side

j. Non-CFC Cascade Refrigeration

k. 120V Input - Plugs Into Any 20 Amp Outlet

l. 3 Year Parts, 1 Year Labor Warranty

Line Item 0002:

Description: Water Recirculation System Quantity: 1

A. Technical Specifications

a. Compatible with environmental test chamber to provide a source of water

b. Closed loop system

c. Utilizes tap water

d. Contains all pumps and connectors necessary for connecting to environmental test chamber

e. 3 year supply of water filters

IV. SCHEDULE OF DELIVERABLES

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 Environmental

Test Chamber 1 6 weeks NIST Boulder

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2 Water Recirculation System

1 6 weeks NIST Boulder

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 30 days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

PLACE OF PERFORMANCE

All work, including installation, site acceptance, and training, shall be performed at NIST (325 Broadway, Boulder CO 80305) in either Building 2. The government will provide access to the Building for the contractor for the entire period of performance of this contract. The day-to-day supervision and direct control over the work performed by the on-site contractor personnel shall be the sole responsibility of the contractor.

Regular Business Hours (usually pertains if work is being performed onsite at NIST; otherwise, delete if not needed).

Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Mountain Time, excluding Federal holidays and NIST closures.

PERIOD OF PERFORMANCE

Up to 15 weeks from the date of award, not including warranty or extended service agreement options. This does not include warranty.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Attn: Elisabeth Mansfield 325 Broadway Boulder, CO 80305

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VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 30 days after delivery. Contractor shall provide complete instructions to uncrate/unpack, install, setup and operate the chamber. The contractor shall include any components and/or accessories required to operate the chamber (i.e. component connections, cables, power connections, controller firmware setup, OEM manual, etc.)

Onsite installation and demonstration shall be done at NIST, Boulder, CO – Building 2.

All installation requirements are identified below:

A. Contractor shall provide all personnel necessary for installation A. Contractor shall provide all tools necessary for installation

VII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. At the NIST site, NIST staff will test temperature and humidity performance. The data shall be required to demonstrate conformance with the performance specifications defined herein.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 60 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

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VIII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 Year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4.

Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

a. 3 Year Parts, 1 Year Labor Warranty

IX. PAYMENT SCHEDULE

Define how the contractor will be paid if more information besides what is included in the payment clause is needed. If firm-fixed-price construction, for example, it may warrant further definition.

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

X. REQUIREMENTS FOR CONTRACTOR PERSONNEL (Remove if not applicable) Identify all qualifications that the Contractor and/or their personnel working on this contract must possess.

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

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Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued.

The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.