Attachment 1_PVD Shield and Chamber Parts.xlsx

XLSX spreadsheet 42 MB Posted

Attached to
Physical Vapor Deposition (PVD) Laser Cleaning Services
Solicitation number
2031ZA26Q00088
Issued by

About this file

This is a parts list and specification document for Physical Vapor Deposition (PVD) machine components related to solicitation 2031ZA26Q00088 issued by the Department of the Treasury Bureau of Engraving and Printing. The document provides a detailed inventory of shield and chamber parts required for BEP's IPC 1100 PVD machines, which are used in the production of high-quality chrome coatings for intaglio plates. The spreadsheet itemizes 39 distinct component types with specifications including quantity, surface area measurements in square centimeters, and material composition.

The parts are predominantly manufactured from AISI 304 stainless steel, with several components also specified in standard stainless steel. Components include upper and lower chamber shields, viewport shields, cryogenic trap shields, cathode shields, shutter panels, heater plates, anodic and cathodic plates, and various structural elements such as rotary table covers and chamber door sections. The combined total surface area for all components is 262,712 square centimeters (approximately 3,393.5 square feet), with removable covers alone accounting for 205,536 square centimeters. The document provides visual references through accompanying images indexed to specific component numbers, enabling precise identification and fabrication specifications for potential contractors providing laser cleaning services or component replacement for these critical PVD processing systems.

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Sheet1

#DESCRIPTIONQtySurface area Total in cm sqMATERIALImage
1UPPER LEFT CHAMBER SHIELD 2655 cm sq12655AISI 304
2UPPER RIGHT CHAMBER SHIELD 2655 cm sq12655AISI 304
3VIEWPORT SIDE UPPER SHIELD 720 cm sq1720AISI 304
4VIEWPORT SIDE LOWER SHIELD 630 cm sq1630AISI 304
5VIEWPORT SIDE FRONT SHIELD 1703 cm sq11703AISI 304
6VIEWPORT SIDE REAR SHIELD 1703 cm sq11703AISI 304
7LOWER CHAMBER SHIELD 1620 cm sq23240AISI 304
8CRYOGENIC TRAP SHIELD 6705 cm sq16705AISI 304
9PUMPING SHIELD 91 cm sq191AISI 304
10SHUTTER VIEWPORT 47 cm sq147AISI 304
11SIDE CATHODE SHIELD TW 3600 cm sq621600AISI 304
12SIDE CATHODE SHIELD TW 3600 cm sq621600AISI 304
13TOP SHIELD TW 4012 cm sq14012AISI 304
14BOTTOM SHIELD TW 3090 cm sq13090AISI 304
15SIDE CATHODE SHIELD TW 3600 cm sq621600AISI 304
16SIDE CATHODE SHIELD TW 3600 cm sq621600AISI 304
17UPPER CATHODE SHIELD TW 182 cm sq61092AISI 304
18LOWER CATHODE SHIELD TW 182 cm sq61092AISI 304
19SHUTTER PANEL 2235 cm sq613410AISI 304
20ROTARY TABLE COVER 270 cm sq1270AISI 304
21SATELLITE COVER 44 cm sq144AISI 304
22INTERMEDIATE RING 98 cm sq198AISI 304
23END RING 98 cm sq2196AISI 304
24Upper Drum Rods, BIAS POWER COLLAR 1540 cm sq1218480AISI 304
25aLower Drum Rods, BIAS POWER COLLAR 723 cm sq64338AISI 304
25bSupport Foot 44 cm sq6264AISI 304
26LEFT CHAMBER HEATER PLATE 3013 cm sq13013AISI 304
27RIGHT CHAMBER HEATER PLATE 3013 cm sq13013AISI 304
28PLATE CONNECTING PLATESAISI 304
29HEATER LOCKING COMB 80 cm sq80AISI 304
30PLATE FRAME 520 cm sq63120AISI 304
31PLATE FRAME BRACKET 136 cm sq121632AISI 304
32Cathodic Arc Side Shield 3013 cm sq618078AISI 304
33Upper/lower Anodic plate 105 cm sq4420stainless steel
34Side Anotic Plate 80 cm sq241600stainless steel
35Rotary Table Cover, Holed 44 cm sq6264

36 Rotary Table Cover, non-holed 51 cm sq 6 306

37 Anode wall for source PP1251200 S03768 CHAMBER PST3158 3000 cm sq 4 12000

38 Single Big Tapered Cover 3013 cm sq 2 6062

39 Single Big Non tapered Cover 3013 cm sq 1 3013

Removable cover total area in cm sq 205536 Removable cover total area in sq ft 2655

Chamber door floor 4719 cm sq29438
Chamber door celing 4719 cmsq29438
Chamber door walls 6084 cm sq212168
Mid chamber floor 5734 cm sq15734
Mid chamber celing 5734 cm sq15734
Chamber walls 7332 cm sq214664
Chamber total surface area in cm sq57176Chamber total surface area in sq ft738.5
Combined total of all surface area in cm sq262712Combined total of all surface area in sq ft3393.5

5,6 15, 16 17, 18 image1.png image10.jpeg image11.jpeg image12.jpeg image2.png image3.png image4.png image5.png image6.png image7.png image8.jpeg image9.jpeg

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