ANL-70 Request for Quotation.doc

ANL-70 (February 22, 2013)

UCHICAGO ARGONNE, LLC

OPERATOR OF

ARGONNE NATIONAL LABORATORY

BLDG. 201 OCF, 9700 S. Cass Ave., Lemont, IL 60439

(CONTRACT NO. DE-AC02-06CH11357)

REQUEST FOR QUOTATION

NOTICE:

1. The right is reserved to accept or reject quotations on each item separately unless your quotation states otherwise.

2. The right is reserved to accept minor deviations from specifications herein listed or referenced.

3. Firm prices are requested. If other than firm prices are quoted, conditions of escalation are to be stated.

4. If material is packaged in returnable containers the amount of deposit, if any, is to be stated together with instructions for returning.

5. Terms and Conditions referenced below will apply to any resulting Purchase Order.

THE ENCLOSED BOOKLET OF Argonne Representations and Certifications FORMDROPDOWN is included as part of this request and must be completed, signed and returned with your quotation. Please furnish quotation to supply the materials and/or services indicated on page two and three. Please send any inquiries to Molly Murtaugh at mmurtaugh@anl.gov.

This solicitation will be evaluated based on LOWEST PRICE, TECHNICAL ACCEPTABILITY. Please provide and confirm your best and final offer in the proposal response.

Country of Origin should be consistent with the definition stated in FAR 52.225-1 for Buy American-Supplies, in which “the cost of its components mined, produced, or manufactured in the United States exceeds 60 percent of the cost of all its components, except that the percentage will be 65 percent for items delivered in calendar years 2024 through 2028 and 75 percent for items delivered starting in calendar year 2029. Components of foreign origin of the same class or kind as those that the agency determines are not mined, produced, or manufactured in sufficient and reasonably available commercial quantities of a satisfactory quality are treated as domestic. Components of unknown origin are treated as foreign.”

Any resulting Purchase Order will be subject to the Argonne Terms and Conditions attached hereto and made part of hereof and will be exempt from Illinois Occupation and Use Taxes and from Manufacturers and Retailers Excise Taxes.

We quote you F.O.B. Destination. Shipment can be made in weeks from receipt of order. Country of Origin:________________

NAICS:

*If Shipment will not be made via FedEX, UPS, or USPS, Please provide estimate of weight and volume _________________________________________ cft

COMPLETE AND RETURN ONE COPY

PLEASE MARK “NO BID” IF YOU CANNOT QUOTE

AUTHORIZED SIGNATURE

Fiji G2 Base System,

- 4 Precursor lines, 4 Plasma lines, 4 Precursor cylinders

- Standard chuck and 200mm Reaction chamber

- Plasma generator

- Molded, closed loop, precursor heating jackets (not required for water)

- User computer with Windows 10 or higher OS

- Field retrofit capability for full range of options

Includes services:

- Access to ALD recipe database

- Precursor advice

- Science Team Support

- Software maintenance releases

Excludes:

- Precursor chemicals (Customer consumable supply)

- 100m3/h dry, forevacuum pump

Additional Precursor Lines (2), - Maximum of 6 precursor ports on system, - Includes additional heater jackets and 50mL cylinders

Additional Plasma Gas Lines (2)

100m3/h Edwards dry pumping kit

Low Vapor Pressure Deposition (LVPD) Option - No Cylinder. - For low vapor pressure precursors > 0.01 Torr

Liquid Precursor Cylinder (150ml) (1) for LVPD Kit

Sapphire tube Kit for Hw Rich Plasmas

Reactor Analysis Ports Upgrade, Ports for Ellipsometry, RGA and QCM.

Automated loadlock with independent pumping system.

Kal-rez seal kit and welded substrate chuck upgrade for in-situ cleaning.

On-site system commissioning and Training

Crating and domestic shipping (CIP Destination)

Applicable Documentation:

The following applicable documentation is attached hereto and made a part hereof:

1. Appendix “A” Argonne Terms and Conditions for Commercial Items and Services, ANL-71-COM, dated 2/13/2023 (REVIEW)

2. Moderate Risk Work by Contractors on the Argonne Site – Supplemental Conditions, ANL-366M, dated 09/01/2023 (REVIEW)

3. Pre-Award Information and Representations and Certifications, ANL-70B, dated 04/12/2022 (SIGN AND RETURN)

Please note, inapplicable clauses are self-deleting.

All quotations shall be responsive to the terms and conditions made a part of this solicitation. Any exceptions taken shall be detailed and refer to specific Articles of the Applicable Documentation.

Contractor’s work on the Argonne site is subject to compliance with the ES&H requirements identified in item 2.

The contractor’s installation/service personnel are responsible for the removal and off-site disposal of any debris resulting in the performance of this work.

Offeror is requested to furnish the following to support the offered price:

a. A published pricelist.

b. If a published pricelist is not available, please furnish a copy of an invoice to another Customer (Customer name can be removed) for the same or similar products/services as being requested by Argonne.

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