ACQ0039313_Statement Of Work_20260429.pdf

STATEMENT OF WORK

Title: Large aperture high-vacuum compatible rotary stage Lab: PML, NDCD 683.13

I. BACKGROUND INFORMATION

The National Institute of Standards & Technology (NIST), Physical Measurement Laboratory (PML), Nanoscale Device Characterization Division (NDCD) develops and advances the measurement and knowledge infrastructure to characterize nano- and atom-scale engineered materials and solid-state devices for innovation in information processing, sensing, and future quantum technologies. The NDCD’s technical activities span atom scale devices, nanoscale spectroscopy, advanced electronics, nanoscale processes and measurements, and alternative computing. This acquisition will allow the NDCD to expand its measurement capabilities using EUV diffractometry and EUV spectroscopic ellipsometry. The problem being solved by these EUV techniques is the non-destructive measurement of nanoscale patterned features in support of the American semiconductor industry.

To meet mission requirements, the NDCD needs to acquire a large aperture high-vacuum compatible rotary stage, which will allow computerized control of a rotation axis within a vacuum chamber. The stage will allow the precise positioning of instrumentation about a key rotary axis; this stage is an integral component for a new experimental apparatus that will harness short extreme-ultraviolet (EUV) light for the non-destructive measurement of the smallest features of computer chips, their transistors. The application of the required stage is in the accurate reconstruction of dimensional information from the nondestructive reflection and diffraction off a sample under test using polarized light.

The overview of the experiment is the following: The EUV light source emits in a fixed direction through a polarization module. The light reflects off the sample at a variable angle (theta) due to a rotary stage in the sample positioning stack. With a fixed source and rotating sample, this large aperture high-vacuum compatible rotary stage must enable the in-vacuum placement of the polarization module and the detector module precisely to an angular position (2 theta) to capture and analyze the reflection and diffraction.

The objective of the required stage is the repeatable measurement of reflection (and diffraction) from the sample under test with precise control of the angular positioning of the (2 theta) angle. Precise control and foreknowledge of the experimental conditions are required to best convert measurements of the reflection and diffraction into dimensional information with uncertainties.

II. PURPOSE

NDCD is using extreme-ultraviolet (EUV) wavelengths, 10x shorter than those used by the industry today, and current optical approaches using visible and UV wavelengths

2 | P a g e cannot adequately measure future semiconductor transistors. Our CHIPS project is building this EUV instrumentation, requiring the acquisition of an industrial high-vacuum rotary stage that will bear the load of detection equipment in vacuum with precise positioning, thus optimizing experimental conditions and reducing sources of uncertainties in these dimensional measurements.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Large aperture high-vacuum compatible rotary stage Quantity: 1

A. Technical Specifications

a. The stage shall be compatible with a high vacuum system, defined here as having a base pressure below 10^(-6) Torr.

b. The stage shall have vacuum-compatible cabling at least 60 cm (24 inches) long (extension cabling OK) with connector(s) compatible with the vacuum feedthrough (see Line Item 0003).

c. The stage shall have an encoder.

d. The stage shall be cleaned and bagged for high-vacuum service.

e. Large aperture:

i. Clear aperture minimum diameter: 135 mm

ii. Clear aperture maximum diameter: 200 mm

f. Total range minimum: -180° to 180° rotation

g. Repeatability, minimum: 0.003 deg

h. Accuracy, minimum: 0.004 deg

i. Axial load capacity, minimum: 35 kg

Line Item 0002:

Description: Motion Controller, Power Supply, and software Quantity: 1

A. Technical Specifications

a. Suitable for software-controlled operation of Line Item 0001.

b. Operates in atmosphere.

c. Includes Windows compatible GUI software and LabView Virtual

Instruments (SDK) for end user integration.

d. Controller to computer communication done via USB, GPIB or serial connection(s).

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e. 120 VAC, 60 Hz operated Power supply included.

f. Includes power and control cabling for atmosphere side of Line Item 0003.

Minimum length: 3 m

g. Required communication cable(s) included.

Line Item 0003:

Description: Vacuum feedthrough Quantity: 1

A. Technical Specifications

a. DN100 CF (6-inch ConFlat) flange with electrical feedthroughs to accommodate motion control, power, and encoder feedback.

b. Suitable for connection of Line Item 0001 to Line Item 0002.

c. Condition and packaging: Feedthrough must be cleaned and bagged for high-vacuum service.

Line Item 0004:

Description: Engineering services prior to manufacturing Quantity: 1

A. Technical Specifications

a. Vendor shall provide to NIST mechanical (CAD) drawings of the stage for

NIST approval prior to manufacture.

OPTION Line Item 0005:

Description: Base pressure below 10^(-8) Torr Quantity: 1

A. Technical Specifications

a. For this option, the stage shall have a stricter vacuum requirement than listed in Line Item 0001 A.a., such that the stage shall be compatible with a vacuum system with a base pressure below 10^(-8) Torr.

b. Vendor shall indicate net increase or decrease in cost from this option.

OPTION Line Item 0006:

Description: Base pressure below 10^(-9) Torr Quantity: 1

B. Technical Specifications

c. For this option, the stage shall have a stricter vacuum requirement than listed in Line Item 0001 A.a., such that the stage shall be compatible with a vacuum system with a base pressure below 10^(-9) Torr.

d. Vendor shall indicate net increase or decrease in cost from this option.

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For evaluation purposes, special consideration will be given to a vendor who can provide Documentation in their submittal of the vacuum procedures, materials, and commercial greases that will be used.

IV. SCHEDULE OF DELIVERABLES

Deliverable Number Description Qty Due Date

Place of Delivery

1 Large aperture high-vacuum compatible rotary stage

1 18 weeks after approval of deliverable 1

NIST Gaithersburg

2 Motion Controller, Power Supply, and software

1 18 weeks after approval of Deliverable 1

NIST Gaithersburg

3 Vacuum feedthrough 1 18 weeks after approval of deliverable 1

NIST Gaithersburg

4 Engineering services prior to manufacturing

1 2 weeks ARO NIST Gaithersburg

5 OPTION: base pressure below 10^(-8) Torr

1 18 weeks after approval of deliverable 1

NIST

Gaithersburg

6 OPTION:

Base pressure below 10^(-9) Torr

1 18 weeks after approval of deliverable 1

NIST

Gaithersburg

7 Transportation fees and other related costs if applicable at time of delivery NTE

1 NTE NIST Gaithersburg

Standards of Acceptance: The NIST TPOC shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 2 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

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Post award, NIST will review the mechanical drawings prior to manufacturing (Engineering services prior to manufacturing). NIST’s review shall be no longer than 7 business days providing a written response back to the contractor with comments, and 7 business days after that by when the contractor must submit a revised deliverable that addresses the written comments. The contractor will be at risk if manufacturing occurs prior to this final review of the mechanical drawings post award.

PERIOD OF PERFORMANCE

Contractor shall ship all items no later than 18 weeks acceptance of order.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology

Shipping and Receiving

100 Bureau Drive, Building 301

Gaithersburg, MD 20899

C/O TBD, 217/E116

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Performance Tests:

a. NIST will power up the rotation stage using the included hardware and software. Operation must be confirmed. Acceptance will be granted if all components are operational.

NIST may choose at its discretion to forego this part of acceptance testing.

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A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within (insert working days it will take to inspect, accept, or reject) of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following: All products are warranted to be free from defects for a period of one (1) year.

VIII. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the TPOC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the

RFQ for consideration.

IX. CYBERSECURITY PRIVACY REQUIREMENTS

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NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards

(e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to

NIST special publication control set SP 800-171.

Minimally Acceptable Controls

• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

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