A.2 Statement of Work.pdf

Brookhaven National Laboratory Number: NSLSII-23ID2-SOW-SPC-003

Brookhaven Science Associates Version: 1

National Synchrotron Light Source II (NSLS-II) Effective: 16APR2025

23-ID-2 (IOS) INSPIRE Spectrometer Vertical Focusing Mirror Statement of Work and Technical Specification

QA Category: A-2

Document Reviewed and Approved By:

Prepared by Approval Joseph Dvorak NSLS-II Optical Design Scientist

ESH Approval Robert Lee NSLS-II ESH Manager

Approved By Ira Waluyo NSLS-II IOS Lead Beamline Scientist

Approved By Paul Zschack PSROD Director, Spectroscopy Interim Program Manager

Approved By Steve Moss NSLS-II Authorization Basis Manager

Approved By Lindsay Garske NSLS-II Quality Assurance Engineer

Approved By Stephen Sherwood NSLS-II Liaison Engineer

Reviewers (Listed in SharePoint Properties. Will not be approving through SharePoint workflow.)

Reviewed By Adrian Hunt IOS Beamline Scientist

Reviewed By Mourad Idir NSLS-II Optics and Metrology Group Leader

Reviewed By Lacy Jones NSLS-II Operations Engineer

This information is controlled by the U.S. Department of Commerce Export Administration Regulations 15 CFR Parts 730-774 as EAR99 Technology.

ii National Synchrotron Light Source II

Version 1 ii Brookhaven National Laboratory

VERSION HISTORY LOG

VERSION DESCRIPTION DATE AUTHOR

1 First Issue 16APR2025 J. Dvorak

NSLSII-23ID2-SOW-SPC-003: 23-ID-2 (IOS) INSPIRE Spectrometer Vertical Focusing Mirror Statement of Work and Technical Specification

NSLS-II iii 16APR2025

Contents 1 Introduction and Overview

1.1 Background

1.2 Scope

2 References 3 Requirements

3.1 Contractor Responsibilities and Manufacturing Requirements

3.1.1 Technical Performance

3.1.2 Acceptance Test Procedure

3.1.3 Factory Acceptance Testing

3.2 Management

3.2.1 Manufacturing/Inspection/Test Plan

3.2.2 Progress Teleconference

3.2.3 Performance Reporting

3.3 Documentation and Data Management

3.3.1 General Documentation Requirements

3.3.2 End Item Documentation

3.4 Configuration Management

3.5 Warranty

3.6 Packaging

4 Quality Assurance

4.1 Quality Assurance Requirements

4.2 Material Review Board (MRB) Authority

4.3 QA Flow-Down

5 Schedule/milestones 6 Deliverables 7 Value Engineering 8 Technical Specifications

8.1 Definitions of Optical Parameters

8.2 Scope of Supply

8.3 Substrate Specifications

8.4 Mirror Optical Surface Specifications

8.5 Testing Requirements

iv National Synchrotron Light Source II

Version 1 iv Brookhaven National Laboratory

ACRONYMS:

ATP Acceptance Test Procedure BNL Brookhaven National Laboratory BSA Brookhaven Science Associates ESH Environment, Safety, and Health FAT Factory Acceptance Test GeV Giga Electron Volts INSPIRE Inelastic Scattering, Photoemission and

Infrared Endstation IOS In situ and Operando Soft X-ray Spectroscopy

MRB Material Review Board NSLS-II National Synchrotron Light Source II QA Quality Assurance RMS Root Mean Square SOW Statement of Work SPC Technical Specification UHV Ultra-High Vacuum VFM Vertical Focusing Mirror

Brookhaven National Laboratory Number: NSLSII-23ID2-SOW-SPC-003

Brookhaven Science Associates Version: 1

National Synchrotron Light Source II (NSLS-II) Effective: 16APR2025

NSLS-II 1 16APR2025

1 INTRODUCTION AND OVERVIEW

1.1 Background

NSLS-II is a synchrotron light source that has a highly optimized 3 GeV electron storage ring, full-energy injector, experimental beamlines and optics, and appropriate support equipment. The INSPIRE Spectrometer Vertical Focusing Mirror (VFM) for the IOS beamline described in this document will be hereafter referred to as “the Equipment”. The specifications are for a single custom mirror, commonly referred to in the literature as a ‘diaboloid’, for a new energy loss spectrometer for the IOS beamline.

1.2 Scope

This Statement of Work (SOW) and Technical Specification (SPC), hereinafter called “the SOW/SPC”, is the basis for the procurement of the Equipment, which will be used on the IOS beamline at National Synchrotron Light Source II (NSLS-II) at Brookhaven National Laboratory (BNL). This SOW/SPC outlines the Contractor’s responsibilities and obligations necessary for completing the requirements as set forth herein.

2 REFERENCES

The following documents are an integral part of this SOW/SPC; the applicable revision level will be the latest that is in effect at the time of award:

Document Number Document Title

LT-ENG-RSI-SR-VA-002 Requirements for Design and Fabrication of Components for NSLS-II UHV Systems BNL-QA-101 BNL Supplier Quality Assurance Requirements MIL-PRF-13830B Performance Specification, Optical Components for Fire Control Instruments PD-IOS-MIR-0005 INSPIRE Spectrometer Vertical Focusing Mirror Drawing

3 REQUIREMENTS

In accordance with the applicable specifications, referenced documents, and instructions as defined in this SOW/SPC, the Contractor shall be responsible for the purchase of all materials, manufacturing, testing, and delivery of the Equipment.

3.1 Contractor Responsibilities and Manufacturing Requirements

3.1.1 Technical Performance

In accordance with the SOW/SPC document and all referenced documents, the Contractor shall manufacture the Equipment. The Contractor shall test the Equipment at the Contractor’s facility, then deliver the Equipment to BNL. It is the Contractor’s responsibility to ensure that the Equipment complies with all requirements in the SOW/SPC.

National Synchrotron Light Source II

Version 1 2 Brookhaven National Laboratory

3.1.2 Acceptance Test Procedure

The Contractor shall provide an ATP that is in accordance with this SOW/SPC and all reference documents noted herein. The ATP must be reviewed and approved by BSA prior to use. The Contractor shall submit an ATP to BSA for approval describing each test or measurement to be implemented. Drawings and equipment required for adequate inspection and test shall be listed in the ATP.

The ATP shall ensure that all test requirements as defined in the SOW/SPC are achieved.

3.1.3 Factory Acceptance Testing

The Equipment shall be tested by the Contractor at the Contractor’s facility, the Contractor’s subcontractor’s facility, or a pre-approved BSA facility prior to shipment, in accordance with the ATP.

BSA reserves the right to perform in-process inspections at the Contractor’s facility. The Contractor shall notify BSA a minimum of 30 working days prior to the start of final inspection and testing. The BSA inspection shall in no way relieve the Contractor of responsibility for ensuring the quality of the mirrors.

The Contractor shall maintain documentation for all metrology and processes during fabrication and characterization of the Equipment. The responsibility for performing and documenting all specified tests and metrology shall rest with the Contractor unless noted otherwise.

The Contractor shall submit the Factory Acceptance Test Report of metrology results and associated raw data to BSA for review and approval by BSA in writing prior to shipment of the equipment. The Acceptance Test Report shall include machine-readable raw data sets for all metrology performed. Data sets shall be in plain ASCII text, or another widely used format of mutual agreement. The Contractor shall describe the file formats and supply necessary constants and parameters to permit independent data analysis of the raw data. If possible, a full map of the clear aperture shall be provided.

3.2 Management

3.2.1 Manufacturing/Inspection/Test Plan

Within two (2) weeks after award of contract, the Contractor shall deliver a Manufacturing/Inspection/Test plan that includes a milestone schedule defining the design validation, manufacturing, and testing in sufficient detail to allow regularly scheduled progress monitoring. The manufacturing plan shall identify the manufacturing processes required to complete all efforts identified in this SOW/SPC. The Contractor shall supply a Gantt chart indicating the estimated time and duration to achieve major milestones in the mirror fabrication, e.g. procuring material, polishing, metrology, final inspection, acceptance test date and delivery.

The chart shall be submitted electronically using Microsoft project or excel. The plan shall be submitted for review and be approved in writing by BSA.

3.2.2 Progress Teleconference

Within two (2) weeks after award of contract, monthly technical and progress teleconferences and/or meetings between the Contractor and BSA shall be held at a mutually scheduled time. The discussions shall include the Contractor’s progress, technical and contractual questions, analyses, value engineering, troubleshooting, material status, resources, and manufacturing issues.

NSLSII-23ID2-SOW-SPC-003: 23-ID-2 (IOS) INSPIRE Spectrometer Vertical Focusing Mirror Statement of Work and Technical Specification

NSLS-II 3 16APR2025

3.2.3 Performance Reporting

Throughout the life of the contract, the Contractor shall supply a written report by the fifth of every month to the BSA technical representative and contractual representative that clearly details progress through the prior month with respect to the Manufacturing/Inspection/Test plan. This shall include milestone charts, detailed progress, open items, problems, recommended solutions, and risk mitigation.

3.3 Documentation and Data Management

3.3.1 General Documentation Requirements

All documentation provided by the Contractor shall be in English.

The Contractor shall provide an electronic copy (in Microsoft Office format with formal controlled copies in PDF format) of all documentation identified in this SOW/SPC, unless otherwise noted.

3.3.2 End Item Documentation

The Contractor shall provide the End Item documentation package in accordance with the schedule set forth in this SOW/SPC. The End Item documentation package for the Equipment shall consist of the following documentation:

Completed travelers

Manufacturing/Inspection/Test data for inspections performed at incoming inspection and during manufacture and for the final manufactured mirror

Material certification for the mirror coating, including material purity

3.4 Configuration Management

The Contractor shall establish and maintain a configuration control system to assure that all End Items are of the proper configuration, and that all approved configuration changes are incorporated at the specified effectivity points. Records verifying the configuration of each item shall be maintained for a minimum of five (5) years from the date of acceptance of the Equipment by BSA.

3.5 Warranty

The Contractor shall provide a warranty for the Equipment, against failure and defects for a period of two

(2) years from final acceptance at BNL.

3.6 Packaging

3.6.1 The Contractor shall be responsible for design and fabrication of the mirror shipping container(s).

3.6.2 The Equipment will be used in an ultra-high vacuum (UHV) environment and shall be UHV clean. The specifications for vacuum compliance are in BSA document LT-ENG-RSI-SR-VA- 002, Design and Fabrication of Components for NSLS-II UHV Systems.

3.6.3 Talcum powder-free, clean room gloves shall always be used when handling the Equipment.

3.6.4 Oil, fingerprints, dust, and other contaminants shall be kept off the Equipment.

3.6.5 In preparation for shipping, the Equipment shall be sealed for protection against weather elements, dust, and damage to projections, shock loads, impacts, and rubbing. The Equipment shall be properly braced and cushioned within its own packing so that it will not shift during handling and shipment. A dust-free interior-most enclosure shall be used. Hermetically sealed packaging shall be used during shipping to protect the Equipment from dust and contamination.

Version 1 4 Brookhaven National Laboratory

3.6.6 Durable materials, such as clean wood, bubble wrap, or similar non-contaminating materials, are to be used to support and protect the components from one another during transit and storage.

Peanut-type material shall not be used for packaging.

3.6.7 Each packing shall be fitted with ShockWatch and TiltWatch sensors or an equivalent approved by BSA.

3.6.8 The container shall be appropriately labeled with the listing of contents, destination, gross weight, location of center of gravity, purchase order number, and contact information.

4 QUALITY ASSURANCE

The Contractor shall maintain and apply an effective QA program for the design, manufacture, and testing of all systems and equipment provided. The system shall comply with the requirements of the ISO-9001 Standard, Quality Management System Requirements. The Contractor shall supply the necessary documentation to demonstrate compliance. Pre-award and post-award surveys may be required and shall be supported.

4.1 Quality Assurance Requirements

As set forth in BSA Form BNL-QA-101, Brookhaven National Laboratory Supplier Quality Assurance Requirements, as amended herein, forms a part of this statement of work. Specifically, this includes the following sections: 1.0, 2.0, 3.0, 3.1, 3.1.2, 3.2 to 3.22, 4.0, 4.1, 4.2, 4.3, 4.4 as modified below, 4.4.1, 4.4.2, 4.4.3, 4.6 as modified below 4.7, 4.7.1, 4.7.3, 4.10, 4.10.1, 4.10.3, 4.11, 4.12, 4.13, 4.16, 4.19, 4.21, and

4.39. With each Component delivered, the Contractor shall supply to BSA a Certificate of Conformance, in accordance with section 4.16 of BNL-QA-101.

Clause 4.4: Manufacturing/Inspection/Test Plan, is modified as follows: 2 weeks after award the supplier shall submit for the Buyer’s approval a Manufacturing/Inspection/Test Plan for the item(s) to be produced.

Clause 4.6: Test and Inspection Procedure, is modified as follows: 2 weeks after award the supplier shall submit for Buyer’s approval the Test and Inspection Procedure for the item(s) to be produced.

4.2 Material Review Board (MRB) Authority

Unless, and until, Material Review Board (MRB) authority has been requested and received, the Contractor shall be restricted to dispositions of rework, scrap, and return-to-vendor; i.e., the Contractor shall not use nonconforming materials via unique or standard repair processes, nor via use-as-is-dispositions.

The Contractor shall not delegate MRB authority to suppliers without the prior knowledge and written approval of BSA.

BSA may delegate MRB Authority to the Contractor, when requested by the Contractor. Such request shall be accompanied by:

1. The Contractor’s procedure for the identification, evaluation, disposition, and control of non-conformances

2. The resumes of personnel to be assigned as MRB members

All non-conformances requiring MRB action shall be documented and sent to the BSA technical representative within five (5) working days of the decision.

4.3 QA Flow-Down

The Contractor shall ensure a proper and complete flow-down of all applicable QA requirements, as described in section 4.1 herein, to its suppliers and sub-tier suppliers.

NSLSII-23ID2-SOW-SPC-003: 23-ID-2 (IOS) INSPIRE Spectrometer Vertical Focusing Mirror Statement of Work and Technical Specification

NSLS-II 5 16APR2025

5 SCHEDULE/MILESTONES

The following schedule is for planning purposes only. Schedule requirements as set forth in the contract will take precedence.

SCHEDULE IN MONTHS AFTER AWARD OF CONTRACT

Receipt of Equipment at BNL 12

6 DELIVERABLES

The Contractor shall supply the following:

Item Deliverable Due Approval Required

1 Manufacturing/Inspection/Test Plan 2 weeks after award of contract Yes 2 Technical & Progress Teleconference 2 weeks after award/every month thereafter No 3 Performance Reports 5th of each month Yes 4 Acceptance Test Procedure 2 weeks after award of contract Yes 5 Delivery of Factory Acceptance Test Report and test certificates 7 days after completion of FAT and prior to shipment of equipment to BNL

Yes

6 Delivery of Equipment at BNL As set forth in contract Yes 7 End Item documentation package With the Equipment delivery Yes

7 VALUE ENGINEERING

The Contractor is encouraged to make recommendations for changes that might lead to an improvement in performance, reliability, quality, safety, or reduction in cost. Simplicity in operation, ease of maintenance, and an improvement in the performance and reliability of the specific functions, beyond the requirements of this specification, are objectives which shall be considered in the production of each component type. Where it appears a substantial improvement in simplicity of design, performance, ease of maintenance or reliability will result from the use of materials, parts, and processes other than those specified, it is desirable that their use be investigated.

When investigations point to advantages that may be realized, the recommendation for change shall be presented to BSA for review and, if approved, authorized in writing.

Version 1 6 Brookhaven National Laboratory

8 TECHNICAL SPECIFICATIONS

A pictorial definition of relevant terminology is given in Figure 1.

Figure 1- Pictorial definition of terminology. Note that this schematic is not meant to imply a given deflection direction or optical figure.

8.1 Definitions of Optical Parameters

8.1.1 Deviations from the theoretical or ideal profile of an optical surface can be designated as roughness or figure error according to the length scale.

8.1.2 Figure errors: Figure error (also termed height error) is defined as the difference between the specified three-dimensional surface figure and the actual surface figure under operational conditions (e.g. mounted and in the correct deflecting geometry, etc.).

• The slope error is defined as the value of the gradient of the shape error along a specified direction and over a specified region of the optical surface.

• The RMS slope error is defined as the RMS deviation from the nominally defined figure for spatial wavelengths ranging from 1 mm to the length of the clear aperture.

8.1.3 Surface roughness: Surface roughness is defined as the root mean square (RMS) of the surface amplitudes with spatial wavelengths between 1 μm and 1 mm.

• The 2-dimensional surface micro-roughness shall be measured, using a suitable instrument, at a representative grid of points across the length and width of each optic.

NSLSII-23ID2-SOW-SPC-003: 23-ID-2 (IOS) INSPIRE Spectrometer Vertical Focusing Mirror Statement of Work and Technical Specification

NSLS-II 7 16APR2025

• The precise position of each measurement location shall not be chosen to minimize micro-roughness or surface defects.

8.1.4 Optical figure (shape) parameters: The definitions of the parameters used to describe the ideal optical figure of the surface are shown in Figure 2.

Figure 2 - Schematic of the optical parameters for the vertical focusing mirror. p is the distance from the source to the mirror pole. qt is the distance from the mirror pole to the tangential line focus. qs is the distance from the mirror pole to the sagittal line focus. θ is the grazing angle of incidence at the mirror pole. The mirror pole is taken to be at the center of the mirror’s optical clear aperture.

8.2 Scope of Supply

The scope of supply shall include:

• Design, fabrication and testing of the VFM mirror according to the specifications given below.

• Test polishing coupons set.

8.3 Substrate Specifications

8.3.1 The substrates shall be fabricated with features, dimensions, and tolerances specified in drawing PD-

IOS-MIR-0005.

• The manufacturer shall determine the necessary margin surrounding the optical clear aperture, and the final substrate dimensions shall be approved by BSA in writing.

8.3.2 The mirror substrate material shall be single-crystal silicon or high purity fused silica glass.

• If single-crystal silicon, the resistivity shall be < 20 ohm-cm with the <100> direction oriented along the length of the mirror and the (100) plane parallel to the optical surface, as defined in Figure 1.

• The substrate shall additionally be free from defects such as dislocations, cracks, etc.

8.3.3 The mirror optical surface shall have no striae under visible examination.

Version 1 8 Brookhaven National Laboratory

• The mirror optical surface shall meet a scratch/dig requirement of 10/5 per MIL-PRF-13830B.

8.3.4 The mirror non-optical surface areas shall be finished using a controlled grinding process followed by wet-chemical etching to remove residual sub-surface damage and leave the non-optical surface areas in a stress-free condition.

• Substrate dimensions apply to the substrate following the wet-chemical etching.

8.3.5 Workmanship shall be consistent with the quality necessary for stable operation of sensitive optical devices under long-term exposure to an X-ray, ultrahigh vacuum (UHV) environment similar to that found in synchrotron radiation user facilities.

• Proper UHV handling practice is required in accordance with BSA document

LT-ENG-RSI-SR-VA-002.

• Each mirror shall be cleaned at the Contractor’s facility in a manner that is consistent with the figure and roughness requirements specified in this SOW/SPC.

8.4 Mirror Optical Surface Specifications

8.4.1 The mirror substrates shall be manufactured according to the specifications reported below. The figure of the optical surface of the mirror is a custom diaboloid with the following specifications:

Mirror Technical Parameters Parameter Value Notes p 1750 mm Source distance qt 6250 mm Tangential focus distance qs 10,000 mm Sagittal focus distance θ 2 degrees Grazing incidence angle

Optical clear aperture As shown in PD-IOS-MIR-0005 Coating 50 nm ± 5% Au, with 5 nm Cr adhesion layer allowed.

Tangential slope error < 0.5 urad RMS Measured over a spatial wavelength range of 1-2 mm to the tangential length of the optical clear area

Sagittal slope error < 3 urad RMS Measured over a spatial wavelength range of 1-2 mm to the sagittal width of the optical clear area

Residual height error < 3 nm RMS Measured over a spatial wavelength range of 1-2 mm to the length/width of the optical clear area

Surface roughness < 1.0 nm RMS Measured over a 100 um to 1 mm spatial wavelength range Surface roughness < 0.3 nm RMS Measured over a 1 to 100 um spatial wavelength range

8.4.2 The aforementioned height and slope errors shall be determined after subtraction of best-fit ellipse reference surfaces from the clear aperture zone.

8.4.3 The Au coating shall extend at least 3 mm beyond the optically clear area.

NSLSII-23ID2-SOW-SPC-003: 23-ID-2 (IOS) INSPIRE Spectrometer Vertical Focusing Mirror Statement of Work and Technical Specification

NSLS-II 9 16APR2025

8.4.4 The mathematical description of the custom diaboloid surface is described in the following Python code. The parameters p, qt, qs, and theta are described in Figure 2 and the values listed in the table containing the mirror technical parameters. x and y are the sagittal and tangential coordinates respectively, and z is the surface height.

8.4.5 Due to the unique nature of this surface, the Contractor shall provide BSA with the calculated surface profile on a 1 mm or smaller mesh size for approval prior to polishing the figure.

def surface_z(x, y, p, qt, qs, theta):

sin = np.sin(theta) cos = np.cos(theta) a = (qs - qt)/qs b = (qs - qt)/qs**2 c = 0.5*(1/(qt-qs)) g = (a+b*y)

# A

A = -4*(c**2*g**4*x**4 + 2*c*(p+qt)*g**2*x**2 + (p+qt)**2-(p-qt)**2*sin**2)

# B

B = 4*sin*(

+ c**2*(p+qt)*g**4*x**4

+ (2*c*(p+qt)**2*g**2 + (p-qt)*(g**2-2*g))*x**2

+ 2*(p+qt)*(2*p*qt-(p-qt)*cos*y)

# C

Tx8 = c**4*g**8*x**8

Tx6 = 2*c**2*g**4*( 2*c*(p+qt)*g**2 - g**2 + 2*g - 2 )*x**6

Tx4 = g**2*(

+ 4*c**2*g**2*( (p**2+3*p*qt+qt**2) - (p-qt)*cos*y - y**2 )

- 4*c*(p+qt)*(g**2 - 2*g + 2)

+ g**2 - 4*g + 4

)*x**4

Tx2 = -4*(p+qt)*(

+ (2*c*(p-qt)*g**2 + g**2 - 2*g)*cos*y

+ 2*c*g**2*(y**2-p*qt)

+ (p*g*(g-2) + (p+qt))

)*x**2

Tx0 = -4*sin**2*(p+qt)**2*y**2

C = Tx8 + Tx6 + Tx4 + Tx2 + Tx0 z = 0.5*(1/A)*(-B + np.sqrt(B*B - 4*A*C)) return z

Version 1 10 Brookhaven National Laboratory

8.5 Testing Requirements

8.5.1 Roughness and shape profile

• The figure error, surface micro-roughness of each substrate shall be measured and reported.

• Raw data shall be provided.

• Verification of the mirror figure will take place at BNL using the NSLS-II metrology tools.

• Figure/slope measurement shall be measured along the lines illustrated in Figure 3.

• Roughness shall be measured at all the intersection points between the sagittal and tangential traces using a micro interferometer or other method reviewed and approved by BSA.

Figure 3 - Diagram showing the location of the tangential and sagittal metrology traces. Roughness measurements shall be performed at all the intersections of the metrology traces.

8.5.2 The Contractor shall submit an Inspection Test Report of metrology results and associated raw data with each mirror at the time of delivery.

• The Inspection Test Report shall include machine-readable raw data sets for all metrology performed.

• Data sets shall be in plain ASCII text, or another format subject to BSA review and approval.

• The Contractor shall describe the file formats and supply necessary constants and parameters to permit independent data analysis of the raw data.

• If possible, a full map of the clear aperture shall be provided.

8.5.3 The Contractor shall provide two silicon wafer test polishing coupons coated with the same process that will be applied to the mirrors, for qualification reflective coating deposition process by BSA.

• The exact shape and dimensions (including thickness) of the coupons are at the discretion of the Contractor, subject to review and approval by BSA.

• These test coupons shall be prepared and separately delivered to BNL as soon as feasible and prior to BSA qualification of the reflective coating deposition process.