A.2 2026_SOW_XRR_703.pdf

This is a Statement of Work (SOW) for the procurement of an X-ray diffractometer system by Brookhaven National Laboratory. The project has a 9-month performance duration, with a Lead Principal Investigator of Nathalie Bouet (bouet@bnl.gov, 631-344-3564). The objective is to procure a complete experimental system capable of measuring the reflectivity and band-pass characteristics of high-resolution multilayers. The system must include an enclosure, chiller, copper X-ray tube, computer, control and analysis software, incident and diffracted beam optics, detector, and all associated installation, commissioning, training, and documentation.

The technical requirements specify a copper source with long-fine focus energy-selected to CuKα1 (8.048 keV), operating at maximum 3kW continuous power with 60kV and 80mA maximum settings. The system requires a θ-θ geometry high-resolution goniometer with angular range of -1.5°/3° to +45°/90°, smallest step size of 0.0001° or better, and reproducibility of ±0.0001° or better. The sample stage must accommodate at least a 100mm wafer with five motorized axes of motion. The detector must be a pixel array detector suitable for x-ray reflectivity and grazing incidence diffraction with 2.5° angular coverage minimum. Additional requirements include modular diffracted beam optics, computer-controlled absorber, enclosed beam path system with radiation safety interlocks, software with XRD analysis capabilities, and compliance with NFPA 70 electrical standards. The system must be installed in Building 703's Deposition Laboratory, which is 47' x 23'9" with 8'5" ceilings. Deliverables include Factory Acceptance Test Procedure (6 months ARO), Factory Acceptance Test report (before shipment), system delivery (8 months ARO), installation and commissioning (9 months ARO), Site Acceptance Test including NIST SRM 1976a (after installation), training, and final documentation. The vendor must provide a two-year warranty from final acceptance and supply training for BNL staff. Intellectual property rights are to be determined.