Q and As 4.pdf

This document summarizes a solicitation for a high uniformity sputter deposition system. NASA Goddard Space Flight Center requires a system for sputter depositing thin metal films with stringent requirements for thickness uniformity, purity, electrical quality, and cleanliness. The system must maintain performance over many years with good throughput and minimal downtime. Offers are due no later than March 11, 2020. Technical capability, past performance, and price will be evaluated, with technical capability and past performance significantly more important than price. Offerors must demonstrate how specifications for thickness uniformity and vacuum pressure will be achieved and provide evidence of particulate contamination prevention.