KLA/spts SIC trench etch tool
Ended Definitive Contract Awarded Last action
- Contract number
- HQ072723C0008
- Awardee
-
KLA Corporation UEI MDYMRNJZ36U3
- Awarding agency
-
Defense Microelectronics Activity
Department of Defense
- Obligated
- $2,285,129
Award facts
- Opportunity
-
- KLA/SPTS SiC Trench etch tool Solicitation · HQ072723R0015 · Posted Aug 25, 2023
- Contract value 100% obligated
- $2,285,744.00 Current and potential, with all options
- Completion date 100% complete
- Current and potential, with all options
- Contracting staff
- NAICS code
- 333242 Semiconductor Machinery Manufacturing
- Set-aside
- No set-aside
- Competition
- 1 offer Only One Source
- Pricing
- Firm Fixed Price
- Place of performance
- McClellan Park, CA 95652, USA
Award details come from SAM.gov/FPDS.
Transactions
| Action | Obligated | Date |
|---|---|---|
| Supplemental Agreement for work within scope | $615 | |
| Original award | $2,285,129 |
About this award
The Defense Microelectronics Activity (DMEA) awarded a $2.285 million firm fixed-price definitive contract to KLA Corporation for the procurement and delivery of a silicon carbide trench etch tool. The award, issued on September 26, 2023, followed a competitive solicitation posted on August 25, 2023, with a September 4, 2023 deadline. The tool is designed to support advanced silicon carbide microelectronics development with capabilities for deep trench etching at depths of 5-10 microns, featuring high selectivity and anisotropy required for next-generation silicon carbide device fabrication. Performance will be conducted at the DMEA facility located in McClellan Park, California, with an ultimate completion date of September 4, 2024. No small business set-aside was designated for this procurement.
KLA Corporation, a Milpitas, California-based global leader in semiconductor manufacturing equipment and metrology systems, was selected as the sole awardee. The company brings substantial experience supplying specialized etch and deposition equipment to government and commercial microelectronics fabrication facilities, along with an extensive portfolio of federal contracts spanning the Department of Defense, NASA, the National Institute of Standards and Technology, and other agencies. This contract aligns with DMEA's mission to advance critical defense microelectronics capabilities through strategic investments in silicon carbide technology development, which supports next-generation defense system applications.
Quick answers
Who was awarded contract HQ072723C0008?
HQ072723C0008 was awarded to KLA Corporation by Defense Microelectronics Activity (Department of Defense) on September 26, 2023.
How much is contract HQ072723C0008 worth?
The government has obligated $2,285,129 on HQ072723C0008. Its current value, with exercised options, is $2,285,744.
Was contract HQ072723C0008 competed?
The government received 1 offer.
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