Onto Innovation Inc.

Wilmington, MA

UEI
K41YV73EPTH9
CAGE
62055
Primary NAICS
333242 Semiconductor Machinery Manufacturing
SAM.gov registration
Active through

Company facts

Self-certified in SAM.gov
  • For Profit Organization
  • Manufacturer of Goods
Entity structure
Corporate Entity (Not Tax Exempt)
NAICS codes registered in SAM.gov
Corporate family
SAM.gov registration date
Physical address
16 Jonspin Rd, Wilmington, MA 01887, USA
Website
ontoinnovation.com
Founded
2019
Employees
1K-5K
Estimated annual revenue
$500M-$1B
Industry
  1. Information Technology
  2. Semiconductors & Semiconductor Equipment
  3. Semiconductors
SIC code
36 Electronic & Other Electric Equipment
Profiles

Registration and certifications come from SAM.gov and the SBA; company details from public web sources. Updated .

Recent federal awards

Onto Innovation Inc.'s 5 most recent federal contract and grant awards, newest first. Amounts are dollars obligated.
Award Agency Obligated Awarded
Hall measurement sys Contract · N0017316P0082 Office of Naval Research $126,723
One each nanospec 3000 film thickness measurement system specialized hardware tool with optional 4X lens. Contract · W31P4Q09P0400 Aviation and Missile Command $68,280
Measurement paper Contract · DOCSB134105N0149 National Institute of Standards and Technology $650
200202 ! 000113 ! 1700 ! D710J !space and naval warfare systems !N6600102M5019 !a ! N! !n! !20011113 ! 20021112 !… Contract · N6600102M5019 Naval Information Warfare Systems Command $47,305
200112 ! 000529 ! 2100 ! AD17 !USA materiel command acquisition ! DAAD1701P0845 !a ! N!*!n! !20010829 ! 20011127 !… Contract · DAAD1701P0845 Army Contracting Command $39,582

About Onto Innovation Inc.

Onto Innovation Inc., a Wilmington, Massachusetts-based manufacturer and engineering services provider, operates as a prime contractor (85% of recent awards) and subcontractor on defense and space programs, delivering optical instruments, imaging systems, and related hardware and software integration services to the Department of Defense and NASA. The company is a for-profit corporate entity with a named subsidiary, 4 D Technology Corporation, also structured as a for-profit manufacturer.

Onto Innovation's federal footprint reflects a defense and space-focused customer base concentrated across the Department of the Army (5 awards), the Office of the Secretary of Defense (4 awards), and NASA's Goddard Space Center (2 awards), which together account for 52% of recent awards by count. By potential value, the top two funding entities are the Department of the Navy's Office of Naval Research and the Army Materiel Command's Aviation and Missile Life Cycle Management Command. The vendor's award portfolio spans nine distinct customer agencies, with the Navy, Army, OSD, NASA, and related commands dominant.

Onto Innovation's recent capability work centers on optical and imaging instruments for defense and space applications. As a subcontractor, the company supplied a Phasecam 6100 camera and accessories (Qty 1) to Aerodyne-Sgt Engineering Services for the MIST II multidisciplinary space flight and ground system engineering contract awarded in March 2026; delivered three LANDIS flight instrument units and related design, engineering, and algorithm-development services to Raytheon for a remote-sensing payload; provided software maintenance services to MIT Lincoln Laboratory for federally funded research and development center operations under a September 2025 sub award; and supported Northrop Grumman on Defense Support Program operations and maintenance engineering services. The company also operates as a prime on Army and OSD task orders under multiple indefinite-delivery contracts (DAAD0581C0059, DAAD0583C4152, DAAK6086C0049, FA870225DB002, MDA90482C1292).

The vendor's classification spans research and development in physical and engineering sciences (3 awards), precision instruments and related products manufacturing (2 awards), and optical instruments and test equipment (4 awards by PSC). Activity is sparse in recent years — one award in 2024, two in 2025, and one in 2026 — with combined potential value of $196 thousand but $1.8 million in combined obligated dollars, indicating executed work at or near contract values. The long award history (first award dated 1981) and low recent volume suggest a legacy vendor with episodic task-order engagement rather than sustained pipeline growth.

SBA capabilities narrative

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading edge technologies that include: 3D metrology spanning the chip from nanometer-scale transistors to micron level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging

Quick answers

What is Onto Innovation Inc.'s UEI?

Onto Innovation Inc.'s Unique Entity ID (UEI) in SAM.gov is K41YV73EPTH9.

What is Onto Innovation Inc.'s CAGE code?

Onto Innovation Inc.'s CAGE code is 62055.

What is Onto Innovation Inc.'s primary NAICS code?

Onto Innovation Inc.'s primary NAICS code is 333242 (Semiconductor Machinery Manufacturing).

Where is Onto Innovation Inc. located?

Onto Innovation Inc.'s physical address in SAM.gov is 16 Jonspin Rd, Wilmington, MA 01887, USA.

Is Onto Innovation Inc. registered in SAM.gov?

Yes. Onto Innovation Inc.'s SAM.gov registration is active through January 19, 2027.

What is Onto Innovation Inc.'s most recent federal award?

Onto Innovation Inc.'s most recent federal contract award is Hall measurement sys (N0017316P0082), from Office of Naval Research, on October 13, 2015.

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See Onto Innovation Inc.'s full federal record

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  • IDV awards
  • Federal grant awards
  • Subcontracting relationships
  • Funding analysis by agency, NAICS and set-aside
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