MKS Inc.

Andover, MA

UEI
D3QUT46GEX16
CAGE
23582
Primary NAICS
333242 Semiconductor Machinery Manufacturing
SAM.gov registration
Expired

Company facts

Self-certified in SAM.gov
  • For Profit Organization
  • Manufacturer of Goods
Entity structure
Corporate Entity (Not Tax Exempt)
NAICS codes registered in SAM.gov
Corporate family
SAM.gov registration date
Physical address
2 Tech Dr #201, Andover, MA 01810, USA
Website
mks.com
Founded
1961
Employees
5K-10K
Industry
  1. Industrials
  2. Capital Goods
  3. Industrial Conglomerates
  4. Industrials & Manufacturing
SIC code
38 Instruments & Related Products
Profiles

Registration and certifications come from SAM.gov and the SBA; company details from public web sources. Updated .

Recent federal awards

MKS Inc.'s 5 most recent federal contract and grant awards, newest first. Amounts are dollars obligated.
Award Agency Obligated Awarded
OU03-FY26-280-new Contract · 1333ND26PNB030293 National Institute of Standards and Technology $99,900
Installation of new ION source Contract · N0017325P5416 Office of Naval Research $2,260
Lab equipment Contract · N0017325P0401 Office of Naval Research $24,924
Repair of RF generator. Contract · N0017324P1729 Office of Naval Research $0
Vapor phase MFC, 5 sccm 4-hexylstyrene Contract · N0017324P0940 Office of Naval Research $0

About MKS Inc.

Written by GovTribe AI ·

MKS Inc., headquartered in Andover, Massachusetts, manufactures specialized scientific instruments, vacuum components, optical systems, lasers, and analytical equipment sold to federal research and defense agencies as a prime contractor (98% of recent awards) on a full-and-open basis with no set-aside designations. The company operates as a for-profit manufacturer through a parent-subsidiary structure that includes MKS Instruments, Newport Corporation, Ophir Corporation, and Ophir Optics LLC, each contributing specialized capabilities in precision measurement, optical, and vacuum technologies.

MKS's federal customer base spans 56 distinct agencies concentrated in civilian research and naval operations. The Office of Naval Research dominates by award count with 52 awards valued at $527 thousand combined potential, followed by the National Institute of Standards and Technology with 43 awards and $881 thousand in potential value, and the Army Materiel Command Research Development and Engineering Center with 23 awards and $680 thousand. When ranked by dollar value, NIST and Army RDECom together anchor 55% of combined potential value across the portfolio. Recent representative prime work includes a $66,851 NIST purchase order for an optical table with vibration isolation system (April 2024), a $31,143 NOAA purchase order for seven pressure controllers supporting the global air sampling network (July 2023), a $24,924 ONR purchase order for lab equipment (December 2024), a $14,892 NASA Glenn Research Center purchase order for a capacitance manometer system (July 2022), and a $2,260 ONR purchase order for ion source installation (February 2025).

MKS's award portfolio reflects narrow, recurring procurement patterns. The top five NAICS codes account for instruments and process-control manufacturing (171 awards), analytical laboratory instrumentation (64 awards), and semiconductor machinery (46 awards). The top PSC categories mirror this: laboratory equipment and supplies (136 awards), pressure-temperature-humidity measuring instruments (61 awards), and electrical-electronic properties measuring instruments (27 awards). The vendor places work through multiple legacy indefinite delivery contracts, including five single-task-order IDCs (AT0102282, DAAH0184C0983, F3365983C0037, F3365985C0072, F4065084C0086), none of which show active pipeline depth.

Activity has been episodic. Four awards in 2022 dipped to two in 2023, recovered to eight in 2024, then fell to two in 2025 and one year-to-date in 2026, suggesting recompete risk or customer consolidation rather than growth trajectory. Combined potential value across 414 total awards stands at $5.1 million against $7.7 million obligated (150% obligation ratio), indicating awards are completing faster than new ones are entering. The subcontractor footprint is minimal (2% of recent awards by count) but strategically placed: MKS supplies components and instruments to Fluor Marine Propulsion on naval nuclear laboratory management (January 2026), Southwest Research Institute on test-article assembly and pressure transducers (August 2024 and January 2023), The Aerospace Corporation on engineering services for motion controllers (July 2024), Peraton on NASA Balloon Facility operations (February 2024), and Applied Research Associates on mission awareness capabilities (May 2024).

Quick answers

What is MKS Inc.'s UEI?

MKS Inc.'s Unique Entity ID (UEI) in SAM.gov is D3QUT46GEX16.

What is MKS Inc.'s CAGE code?

MKS Inc.'s CAGE code is 23582.

What is MKS Inc.'s primary NAICS code?

MKS Inc.'s primary NAICS code is 333242 (Semiconductor Machinery Manufacturing).

Where is MKS Inc. located?

MKS Inc.'s physical address in SAM.gov is 2 Tech Dr #201, Andover, MA 01810, USA.

Is MKS Inc. registered in SAM.gov?

MKS Inc.'s SAM.gov registration expired on September 12, 2026.

What is MKS Inc.'s most recent federal award?

MKS Inc.'s most recent federal contract award is OU03-FY26-280-new (1333ND26PNB030293), from National Institute of Standards and Technology, on July 29, 2026.

On GovTribe

See MKS Inc.'s full federal record

  • Federal contract awards
  • IDV awards
  • Contract vehicles
  • Subcontracting relationships
  • Funding analysis by agency, NAICS and set-aside
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