Purchase of an Electron Beam Lithography (EBL) System - Addendum #1

Louisiana Tech University's Office of Purchasing is soliciting sealed bids for a complete Electron Beam Lithography (EBL) system under an invitation to bid, with bids due October 9, 2026 at 2:00 p.m. at the Office of Purchasing in Ruston, Louisiana.

The system must achieve a resolution limit of 100 nanometers or better in a 100 × 100 micrometers field, write patterns over areas up to approximately 3 millimeters by 3 millimeters or larger, and accommodate sample sizes of at least 2 inches by 2 inches. Required features include fully integrated SEM imaging capabilities, an oil-free vacuum system, and pattern generation software with automatic and manual alignment capabilities. The system will be installed at the Institute of Micromanufacturing, 505 Tech Drive, Ruston, Louisiana. The vendor is responsible for unpacking, assembly, startup, verification of all operations, and end-user familiarization training.

The University will award the contract to the lowest overall per unit price meeting specifications. Per unit pricing must include all costs associated with manufacture, assembly, shipping, handling, importation, final installation, customs clearance, duties, and taxes into the United States. Delivery is FOB destination; bid prices must remain firm for a minimum of 30 days from bid opening. Louisiana Tech University is sales tax exempt and should not be invoiced for tax.

Bids must be submitted on the designated form, manually signed in ink. Vendors must provide complete product literature and documentation; bids lacking such materials are non-responsive. For bids exceeding $50,000, a bid bond equal to 5 percent of the official bid amount is required. A Certificate of Insurance compliant with the solicitation's insurance requirements, naming the University as a Certificate Holder, must be provided prior to award. No pre-bid conference is scheduled.