Amendment 2 to Solicitation for Ultra-High Vacuum Sample Backout Chamber Extension of Time

The National Institute of Standards and Technology (NIST), an agency within the Department of Commerce, is soliciting quotations for a complete ultra-high vacuum (UHV) bakeout chamber system to support semiconductor industry metrology development under CHIPS Act funding. The procurement requires vendors to deliver a standalone UHV system with integrated pumping equipment, heating capability, and measurement instrumentation that meets specific technical specifications, including achieving a base pressure of 1e-8 Torr within 24 hours, maintaining partial pressures below 5e-11 Torr for masses greater than 44 AMU, and heating samples to a minimum of 300°C. The system must be new equipment (not used or remanufactured) and include a 12-inch cube or sphere chamber with six conflat ports, a 600 CF conflat viewport, infrared heating system, wheeled support stand, pumping equipment, and comprehensive documentation including CAD drawings and user manuals. Award will be made to the lowest-priced, technically acceptable offeror based on conformance to the detailed specifications outlined in the Statement of Work, with the Government reserving the right to make an award without discussions. The original response deadline of February 25, 2026 has been extended by Amendment 2 to March 4, 2026 at 12:00 PM Eastern Time, and pre-quote inquiries were due within two calendar days of the February 12, 2026 solicitation issuance date.

This procurement is designated as a Total Small Business set-aside under NAICS code 334516 (Analytical Laboratory Instrument Manufacturing) with a small business size standard of 1,000 employees. No incumbent contractor or specific award value range is identified in the solicitation documents. The contract includes four line items covering a draft plan deliverable due within two weeks of award, the UHV bakeout system itself, shipping costs, and additional transportation expenses on a not-to-exceed basis, with the complete system delivery required no later than 16 weeks after receipt of order. Payment is structured as 100% upon installation, acceptance, successful completion of testing requirements, and demonstrated performance conformance at NIST's Boulder facility. The place of performance is designated as NIST's Boulder, Colorado location (325 Broadway, Boulder, CO 80305-3337), where NIST reserves the right to conduct performance testing including pressure verification and temperature validation to confirm the system meets all specified requirements.